Annealing Equipment - メーカー・企業9社の製品一覧とランキング

[Custom-made Specialized Equipment Manufacturing Case] Annealing Device

We will introduce a case of achieving miniaturization and weight reduction of a device for annealing (baking) silicon thin films.

We would like to introduce a case of modifying an "annealing device" for the semiconductor industry. It was necessary to renew the electrical equipment of the existing machine due to aging. The machine operates by creating a low vacuum in the chamber and injecting nitrogen for transport, while maintaining vacuum pressure when moving from the stocker to the annealing stage, and it was requested to design it so that only the stocker part can be removed, as well as to arrange cleaning windows for easier cleaning. We achieved miniaturization and weight reduction through the modification of the existing machine, meeting the requirements. [Case Overview] ■ Issues - Maintain vacuum pressure when moving from the stocker to the annealing stage - Design a structure that allows only the stocker part to be removed - Arrange cleaning windows for easier cleaning *For more details, please feel free to contact us.

• 企業：西野製作所
• 価格：Other

• Other machine tools