[SEM-EDX] Energy Dispersive X-ray Spectroscopy (SEM)
It is a method for conducting elemental analysis and compositional analysis by detecting characteristic X-rays generated by electron beam irradiation and spectrally analyzing them by energy.
EDX is a method for performing elemental and compositional analysis by detecting characteristic X-rays generated by electron beam irradiation and spectrally analyzing them by energy. It is also referred to as EDS: Energy Dispersive X-ray Spectroscopy. In many cases, it is attached to SEM or TEM, and this document will explain EDX attached to SEM. - The entire energy measurement range (from B to U) can be measured simultaneously in a short time. - It has excellent detection efficiency, allowing measurements with a low probe current. - Analysis can be easily performed without the need for pretreatment, except for special samples. - It is suitable for the analysis of unknown samples. - Measurements can be conducted in a frozen or cooled state using a cryo holder.
- Company:一般財団法人材料科学技術振興財団 MST
- Price:Other