Conveyance System "Buffer Stacker (Rack Type)"
The substrate JAM detection feature prevents substrate damage! Optional accessories such as substrate hold stoppers are available.
This product is a rack-type transport system. The substrate JAM detection function prevents substrate damage. As options, it comes with auxiliary buffer conveyor devices, cooling fans, and substrate hold stoppers. 【Features】 ■ SMEMA standard interface ■ Stocks 25 substrates ■ FIFO/LIFO ITTI NG ※ FIFO (First In, First Out) ※ LIFO (Last In, First Out) ■ Touch panel operation *For more details, please refer to the PDF document or feel free to contact us.
- 企業:ペントロンジャパン
- 価格:Other