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controller Product List

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Mass Flow Controller 'SFC6000D-50slm'

Mass Flow Controller 'SFC6000D-50slm'

Samples available in a short lead time of 8 weeks! The supply chain is robust.

The "SFC6000D-50slm" is a mass flow controller that demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. It is a highly attractive product with an excellent price-performance ratio and a short delivery time of 8 weeks for obtaining samples. Additionally, its very small and lightweight design allows for optimization of device size and weight, which is a decisive advantage, especially for portable devices. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Excellent performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5300"

Mass Flow Controller "SFC5300"

Introducing MFC for OEM projects with strict cost requirements for mass production!

The "SFC5300" is a mass flow controller capable of measuring and controlling mass flow with excellent accuracy, long-term stability, and reproducibility. Despite its compact size, it can measure over a wide dynamic range, and the body is made of metal. Additionally, the product features a down-mount connection for fluid connections and offers two digital interfaces for connectivity. 【Specifications (partial)】 ■ Full-scale flow: 1, 2, 5, and 10 slm ■ Full-scale flow: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5330"

Mass Flow Controller "SFC5330"

Excellent accuracy, long-term stability, and reproducibility! Achieving outstanding performance.

The SFC5330 is a mass flow controller that achieves a dynamic measurement range while being compact in size. It is a smaller version of the SFC5300, making it suitable for cost-sensitive mass production OEM projects. Additionally, a valve-less type is also available, which has the same performance characteristics and similar applications, allowing for combination use. 【Specifications (partial)】 ■ Full-scale flow rate: 1, 2, and 5 slm ■ Full-scale flow rate: 50, 100, 200, and 500 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5400"

Mass Flow Controller "SFC5400"

The main body is made of metal! A version without a valve is also available.

The "SFC5400" is a versatile mass flow controller that can connect to various interfaces and fluid connections. It can measure a maximum flow rate from 50 sccm to 200 slm, and the sensor signal is calibrated on the chip and directly converted into a temperature-compensated digital signal. Additionally, it can store multiple gas calibration data in one device, allowing you to check whether the operating gas calibration value matches the actual gas being measured. 【Specifications (partial)】 ■ Full-scale flow rates: 1, 2, 5, 10, 20, 50, and 100 slm ■ Full-scale flow rates: 50, 100, 200, and 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-2slm"

Mass Flow Controller "SFC5500-2slm"

Utilizing CMOSens MEMS technology! Available as standard products suitable for a wide range of applications.

The "SFC5500-2slm" is a mass flow controller that does not drift and does not require recalibration in the market. It combines multiple gas calibrations and interchangeable fittings, making it available as a standard product suitable for a wide range of applications. Additionally, it is suitable for a variety of environments in medical, analytical, and industrial settings, and you can choose from standard pre-set variations. 【Specifications (partial)】 ■ Full-scale flow: 2 slm ■ Full-scale flow: 2000 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 8 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-0.5slm'

Mass Flow Controller 'SFC5500-0.5slm'

A culmination of our 20 years of achievements in the precise control of gas flow!

The "SFC5500-0.5slm" is a mass flow controller that combines multiple gas calibrations and interchangeable fittings. This product is based on the microthermal measurement principle and utilizes our proven CMOSens MEMS technology. Additionally, unlike other products on the market, it does not drift and does not require recalibration in the market. 【Specifications (partial)】 ■ Full scale flow rate: 0.5slm ■ Full scale flow rate: 500sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-200slm"

Mass Flow Controller "SFC5500-200slm"

Utilizing CMOSens MEMS technology! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-200slm" is a mass flow controller that can accommodate multiple flow ranges in a single product. It can be obtained as a standard product suitable for a wide range of applications by combining multiple gas calibrations and interchangeable fittings. Additionally, it does not drift and does not require recalibration in the market. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow: 200slm ■ Full-scale flow: 200000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, and N2 flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC6000D-5slm'

Mass Flow Controller 'SFC6000D-5slm'

The supply chain is robust because the number of electronic components used is very small! For semiconductors, analytical instruments, and medical devices.

The SFC6000D-5slm is a highly attractive mass flow controller with an excellent price-performance ratio and a delivery time of 8 weeks. Its small and lightweight design allows for optimization of device size and weight, providing a decisive advantage, especially for portable devices. Furthermore, it demonstrates outstanding performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC6000D-20slm'

Mass Flow Controller 'SFC6000D-20slm'

Excellent price-performance ratio! This is a very attractive product with a delivery time of 8 weeks.

The "SFC6000D-20slm" is a mass flow controller that is very small and lightweight, allowing for optimization of the device's size and weight. Due to advanced integration and a very low number of electronic components used, the supply chain is robust. Furthermore, it demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, enabling optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Robust supply chain due to the very low number of electronic components used *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-50sccm'

Mass Flow Controller 'SFC5500-50sccm'

Combined multiple gas calibrations and interchangeable fittings! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-50sccm" is a mass flow controller based on micro-thermal measurement principles. It utilizes proven CMOSens MEMS technology, ensuring no drift and eliminating the need for recalibration in the market. Additionally, its wide range of flow control capabilities allows a single product to accommodate multiple flow ranges. 【Specifications (partial)】 ■ Full-scale flow: 0.05slm ■ Full-scale flow: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-10slm'

Mass Flow Controller 'SFC5500-10slm'

Full-scale flow rate is 10 slm! A series that combines multiple gas calibrations and interchangeable fittings.

The "SFC5500-10slm" is a mass flow controller available as a standard product suitable for a wide range of applications. This product boasts superior performance equivalent to the "SFC5400," making it ideal for various applications in medical, analytical, and industrial environments. Additionally, a single unit can accommodate multiple flow ranges of conventional mass flow controllers. 【Specifications (partial)】 ■ Full-scale flow: 10slm ■ Full-scale flow: 10000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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