Technical Data: High Output of Xenon Excimer Vacuum Ultraviolet Light Lamp
Realization of light intensity of 1-2 kW/m2! Examination of essential technologies for increasing output.
Around the end of the 1980s, a high-brightness vacuum ultraviolet lamp utilizing excimer emission was developed. For example, an excimer lamp using xenon gas can produce vacuum ultraviolet light at a wavelength of 172 nm with a high light intensity of 100 W/m², and it is actively applied in processes such as photodecomposition cleaning of material surfaces and photomodification of surfaces. In this presentation, we examined the necessary technological elements for achieving a light intensity of 1-2 kW/m², which is 10 to 20 times brighter than conventional lamps. [Contents] - Principles of excimer lamps and research and development objectives - Discharge methods - Lamp shapes *For more details, please refer to the PDF document or feel free to contact us.
- Company:クォークテクノロジー
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