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stage Product List and Ranking from 124 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated: Aggregation Period:Mar 18, 2026~Apr 14, 2026
This ranking is based on the number of page views on our site.

stage Manufacturer, Suppliers and Company Rankings

Last Updated: Aggregation Period:Mar 18, 2026~Apr 14, 2026
This ranking is based on the number of page views on our site.

  1. PI Japan Kanagawa//Electronic Components and Semiconductors
  2. 神津精機 Kanagawa//Optical Instruments
  3. ミラック光学 Tokyo//Testing, Analysis and Measurement
  4. 4 シグマ光機 Tokyo//Testing, Analysis and Measurement
  5. 5 オーテックス Tokyo//Electronic Components and Semiconductors

stage Product ranking

Last Updated: Aggregation Period:Mar 18, 2026~Apr 14, 2026
This ranking is based on the number of page views on our site.

  1. Reproducibility of up to 0.1μm! High-precision linear stage, 1-axis L-836. PI Japan
  2. Positioning accuracy inspection of general machine tools. 高橋レーザー計測 高橋レーザー計測
  3. Ultra-high precision 6-axis alignment stage "RSTZ Series" 神津精機
  4. 4 Ultra-thin XYθ (alignment) stage "NAF3C series" ヒーハイスト 本社・埼玉工場
  5. 4 Rotary Pump DUO Series / 2-Stage Type 伯東 本社

stage Product List

571~600 item / All 713 items

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NM_FZ wedge-shaped stage (precision positioning device)

No errors due to wedge angle.

The FZ wedge-shaped stage (FZ080) is a precision vertical movement stage utilizing a wedge mechanism. The 80mm square stage employs precision cross rollers for linear movement and allows for vertical displacement of up to 10mm. The wedge mechanism uses high-precision optical position sensors to encode vertical displacement, enabling access from any direction.

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Large window (6 inches) Z-axis piezo stage MV-20ZD6

Ideal for high-speed lens positioning in laser interferometers and large-diameter mirror positioning!

The built-in displacement sensor type enables high-precision positioning when combined with a closed piezo controller. For more details, please download the catalog or contact us.

  • Testing Equipment and Devices
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Two-tier rack pallet stage

You can effectively utilize the floor area to about twice its size.

A pallet stage is a mezzanine-style shelf designed to improve the efficiency of space utilization within a warehouse. It is easy to assemble and disassemble, and the construction period is short. [We create racks with the optimal area for the upper space of warehouses, factories, and stores to enhance storage efficiency.] When it is difficult to expand or enlarge a warehouse, or when inventory increases, pallet stages, stacked shelves, and structural steel shelves can effectively utilize limited floor space by approximately doubling it. Additionally, it features a self-supporting structure created by combining modular components, allowing for quick installation.

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Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing

Innovating the semiconductor manufacturing process with nanometer-level precision.

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects yield and product quality. Particularly in wafer inspection and exposure processes, accurate positioning at the nanometer level is required. Conventional rotary stages can cause minor vibrations and eccentricities due to friction, which may lead to a decline in quality. The PIglide A-62x series addresses these challenges with its frictionless air bearing technology. 【Application Scenarios】 - Wafer inspection - Exposure equipment - Precision measurement 【Benefits of Implementation】 - Improved yield through high-precision positioning - Stabilization of product quality - Increased productivity

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Nano Positioning Stage P-752 for Measurement Instruments

High-precision nanopositioning with a maximum stroke of 35 µm and a resolution of 0.1 nm.

In the field of measurement and evaluation, calibration and micro-positioning require nanometer-level resolution and high positional reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with an appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. This supports stable micro-positioning in the calibration and evaluation processes of precision measurement instruments. 【Application Scenarios】 - Calibration and performance evaluation of precision measurement instruments - Alignment and positional correction of optical systems - Micro-displacement control in sensor evaluation and material testing 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of measurement accuracy through stable micro-displacement control

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Nano Positioning Stage P-752 for Biotechnology

High-precision nanopositioning stage optimal for bioanalysis

The P-752 is a high-precision piezo nano positioning stage with a maximum stroke of 35 µm and a maximum resolution of 0.1 nm. Its flexure guide structure and high-resolution capacitive sensors (closed-loop specification) achieve high reproducibility and stability while minimizing the effects of hysteresis. It provides reliable positioning performance in the field of biotechnology, where nanometer precision is required for applications such as cellular-level observation and manipulation of fine samples. 【Application Scenarios】 - Precision focusing in fluorescence microscopy and confocal microscopy - Nanoscale position control of cells and organoids - Micromanipulation - Biosensor evaluation and nano-level alignment 【Benefits of Implementation】 - High-precision positioning with a maximum resolution of 0.1 nm - High reproducibility and stability through closed-loop control - Compatibility for integration into microscopes and analytical devices due to compact design - Improved measurement efficiency through fast response

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[For semiconductors] 0.1nm resolution compact X-axis piezo stage

Achieving high-precision positioning in semiconductor manufacturing. Quick and accurate alignment operations.

In the semiconductor industry, high-precision positioning is essential due to the miniaturization of manufacturing processes. Particularly in wafer inspection and exposure processes, even slight positional deviations can significantly affect product quality. The P-620.1/629.1 addresses these challenges and achieves high-precision positioning. With its built-in capacitive sensor, it achieves a linearity error of 0.02%, contributing to improved yield in semiconductor manufacturing. 【Application Scenarios】 - Wafer inspection - Exposure processes - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Quality improvement through high-precision positioning - Increased yield - Streamlined manufacturing processes For detailed product specifications, please refer to the catalog. If you have any questions, please feel free to contact us.

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0.1nm resolution compact X-axis piezo stage for nano positioning

Stabilizing nano-level measurements with 0.1nm resolution and high linearity.

In the field of nanotechnology measurement, precise positioning is extremely important. Observing fine structures, performing precise machining, and conducting advanced experiments require nanometer-level accuracy. Positioning errors can compromise the reliability of measurement results and hinder research progress. PI's 0.1nm resolution nanopositioner achieves high-precision positioning through built-in capacitive sensors and flexure guides, addressing these challenges. 【Application Scenarios】 - Scanning microscope samples - Optical alignment - Interferometric measurement 【Benefits of Implementation】 - Acquisition of high-precision measurement data - Improved reproducibility of experiments - Enhanced efficiency in research and development

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[For Biotechnology] PIHera Compact X-axis Piezo Stage

Easy nano positioning with 0.1nm resolution and high stability control.

In the field of biotechnology, particularly in cell manipulation, precise positioning is required while minimizing damage to the cells. Nano-level accuracy is essential for elucidating biological phenomena, such as in cell culture, microscopic observation, and microinjection. Inaccurate positioning can lead to experimental failures and decreased reliability of data. PI's 0.1nm resolution nanopositioner enables precise positioning in cell manipulation, contributing to increased efficiency and accuracy in research. 【Application Scenarios】 - Cell culture - Microscopic observation - Microinjection - Cell selection 【Effects of Implementation】 - Minimizing damage to cells and improving the success rate of experiments - Enhancing the reliability of experimental data through accurate positioning - Achieving greater efficiency in research and more detailed observations

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P-726 Piezo Stage for Objective Lenses in Biotechnology

100 µm stroke, sub-nanometer resolution, high-response focus scanner at 560 Hz with a load of 210 g.

In the field of biotechnology, cell observation is affected by minute focus fluctuations that impact image quality. The P-726 PIFOC is a high-load-capable focus scanner with a Z stroke of 100 µm and sub-nanometer resolution. Direct position feedback from a capacitive sensor and a flexure guide structure ensure high positioning accuracy and reproducibility. Furthermore, it maintains high dynamic performance with a resonance frequency of 560 Hz at a load of 210 g, even when equipped with high NA objective lenses. The fast settling time (approximately 6 ms) enhances the efficiency of Z-stack acquisition and focus scanning. 【Application Scenarios】 - Confocal microscopy - Super-resolution microscopy - Live cell imaging - 3D imaging with Z-stack acquisition 【Benefits of Implementation】 - Improved image stability through high-precision focus control - Enhanced measurement efficiency due to fast Z response - Increased design flexibility of optical systems due to high load capacity - High reproducibility in focus positioning

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PIHera XY Piezo Stage for Semiconductor Technology

Maximum 1800µm long stroke and nano precision. Position measurement without physical contact using a unique capacitive sensor.

In semiconductor manufacturing, precise and stable positioning of wafers and masks is required. Nanometer-level positioning accuracy affects product quality. Positioning errors can lead to reduced yield and product defects. The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability, providing high resolution below 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Semiconductor manufacturing equipment - Wafer inspection - Mask alignment - Probing 【Benefits of Implementation】 - Improved yield through high-precision positioning - Increased productivity due to stable operation - Ease of integration into equipment due to compact housing - Enhanced maintainability with long-life actuators

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PIHera XY Piezo Stage for Microscopes

Ideal for microscope sample positioning with a maximum stroke of 1800µm and excellent accuracy provided by capacitive sensors.

In the field of microscopy, it is essential to scan the observation target with high precision to obtain clear images. Particularly in the observation of fine structures and biological samples such as cells, the accuracy of positioning significantly influences the observation results. Low positioning accuracy can lead to a lack of focus, making accurate observation difficult. A compact XY-axis piezo stage achieves high-precision scanning with a resolution of less than 1nm and bidirectional reproducibility of ±0.2nm. 【Application Scenarios】 - Scanning samples in microscopic observation - Fine adjustments during high magnification observation - Cell imaging 【Benefits of Implementation】 - Clear image acquisition through high-precision positioning - Reduction of observation time - Improvement of experimental reproducibility

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PIHera XY Piezo Stage for Biotechnology

Ideal for cell manipulation and live cell observation. Achieves stable XY positioning with sub-nanometer precision.

In the field of biotechnology, particularly in cell manipulation and live cell observation, even slight positional shifts of samples can significantly impact the results. To achieve smooth and high-precision positioning while minimizing damage to cells, sub-nanometer resolution and high reproducibility are essential. This product offers high resolution below 1nm and bidirectional reproducibility of ±0.2nm, ensuring high reliability and efficiency in cell manipulation. 【Application Scenarios】 - Biosensor evaluation - Integration into microfluidic devices 【Benefits of Implementation】 - Improved reproducibility of experiments - Enhanced research efficiency - For detailed product specifications, please refer to the catalog.

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P-5x8 Piezo Stage with Z Chip Tilt Aperture for Scanning Microscopy

Nano-level scanning supporting high magnification observation. Z-chip tilt piezo stage with a 66mm aperture.

In scanning microscopy, even slight misalignments or tilts of the sample or objective lens can significantly affect the resolution and contrast of the image. This is especially critical in high-magnification observations and fine structure analyses, where nanometer-level Z control, angle correction, and high stability are essential. The P-518/P-528 series is a high-precision piezo stage that combines Z-axis strokes of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted observations. With high linearity and reproducibility, it enables the acquisition of high-quality images with minimized blur and distortion, contributing to the performance enhancement of microscopy systems. 【Application Scenes】 - Confocal microscopy - Fluorescence microscopy - Scanning probe microscopy (SPM) - Cell and live cell observation - Material and fine structure analysis 【Benefits of Implementation】 - High-precision Z scanning at the nanometer level - Stabilization of images through chip tilt correction - 66mm aperture for transmitted observations - Improved high-resolution image acquisition and reproducibility - Enhanced research and development efficiency

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P-5x8 Piezo Stage with Z Chip Tilt Aperture for Precision Measurement

Achieving nano-level Z-chip tilt control. High-precision piezo stage with a 66mm aperture.

In the field of precision measurement, even slight positional shifts or angular errors can significantly impact measurement results. This is especially true for the evaluation of fine structures and measurements using transmitted light, where nanometer-level resolution, high stability, and sufficient aperture diameter are required. The P-518/P-528 series is a high-precision piezo stage that combines a Z-axis stroke of 100µm/200µm with chip tilt control. Its large aperture design of 66mm accommodates transmitted light measurements, achieving high linearity and reproducibility. This contributes to improved reliability in precision measurements and alignment processes. [Application Scenarios] - Semiconductor inspection and evaluation equipment - Photonics/optical measurements - Microscope/interferometer systems - High-precision alignment applications [Benefits of Implementation] - High-precision Z and angular adjustments at the nanometer level - Compatibility with transmitted light measurements due to the 66mm aperture - Enhanced measurement reliability through high linearity and stability

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Z-chip tilt aperture piezo stage for photonics

Optimize alignment in the field of photonics with nano-level operation and large apertures.

In the field of photonics, alignment work requires precise positioning of components such as optical fibers and lenses. In particular, misalignment of the optical axis can significantly affect measurement accuracy and efficiency, making precise positioning at the nano level crucial. The Z-Chip Tilt Aperture Piezo Stage P-5x8 addresses these challenges by contributing to high-precision positioning and enabling transmission light measurement through its wide aperture. 【Application Scenarios】 - Optical fiber alignment - Lens alignment - Interferometric measurement - Transmission light applications 【Benefits of Implementation】 - Improved alignment accuracy through precise positioning at the nano level - Enhanced efficiency of transmission light measurement with a 66mm x 66mm aperture - Increased longevity due to high-reliability PICMA piezo ceramics - High linearity achieved with capacitive sensors

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Optical XYZ Axis Piezo Stage P-616

100 µm × 3 axes. A compact XYZ piezo stage that achieves optical alignment with nanometer precision.

In optical systems, even slight deviations in beam position or optical axis can significantly affect coupling efficiency and measurement accuracy. This is especially critical in applications such as interferometric measurements, laser focusing, and fiber alignment, where sub-micron positioning control is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm per axis. Its flexure guide structure enables backlash-free, highly linear motion. With nanometer resolution for fine positioning and high mechanical stability, it supports the precise alignment of optical systems with high reproducibility. Designed to accommodate a range of applications from research to device integration, it meets the advanced positioning control needs in the photonics field. 【Application Scenarios】 - Optical fiber alignment (optimization of coupling efficiency) - Fine adjustment of laser focusing positions - Interferometric and holography devices - Microscopy stage fine motion control - Integration into photonics research equipment 【Benefits of Implementation】 - Improved optical axis adjustment accuracy with nanometer resolution - High reproducibility due to backlash-free structure - Drift reduction through high-stiffness flexure design - Easier integration into devices due to compact design

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XYZ Axis Piezo Stage P-616 for Laser Processing

A 100 µm × 3-axis nanopositioner supporting the focus and position control of fine laser processing.

In laser microfabrication, even slight deviations in beam position or focus directly affect processing quality. This is especially true for microfabrication and high aspect ratio processing, where precise position control at the sub-micron level is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with 100 µm stroke on each axis. Its high-rigidity flexure guide structure enables backlash-free, highly linear motion, allowing for fine position adjustments with nanometer resolution. By integrating it into laser processing equipment, it supports: - Fine adjustment of beam position - High-precision control of focus position - Correction of processing position to enhance the stability of microfabrication. 【Application Scenarios】 - Integration into laser microfabrication equipment - Precise control of focus position - Position correction for micro-drilling processes - Thin film processing and precision patterning 【Benefits of Implementation】 - High-precision control of focus position with nanometer resolution - High reproducibility due to backlash-free structure - Easy integration into equipment with compact design - Stabilization of microfabrication quality

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[Piezostage for Microscopes] XYZ Axis P-616

A compact XYZ piezo stage with a size of 100 µm × 3 axes that supports high magnification observation with nanometer resolution.

In high-magnification microscopy, even slight positional shifts can significantly affect the clarity and reproducibility of images. This is especially true for confocal microscopes, fluorescence microscopes, and live cell observations, where precise XYZ control at sub-micron levels is essential. The P-616 NanoCube is a compact XYZ piezo nanopositioner with a working range of 100 µm on each axis. Its high-stiffness flexure guide structure enables smooth operation without backlash, allowing for fine positioning with nanometer resolution. It also supports Z-axis focus control and XY scanning applications, making it versatile for a wide range of research uses and equipment integration. 【Usage Scenarios】 - Z-axis focus control for confocal microscopes - Multi-point observation with fluorescence microscopes - Live cell imaging - Fine positioning under high-magnification objectives - Observation of nanoscale materials 【Benefits of Implementation】 - High-precision focus control with nanometer resolution - High reproducibility due to backlash-free structure - Stable scanning operation due to high-stiffness design - Easy integration into existing microscopes with compact design

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[For Measurement] XYZ Axis Precision Positioning Stage P-561~563

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

In high-precision measurement, the positioning accuracy of the probe affects the reliability of the measurement results. Even slight vibrations or crosstalk can be sources of error, necessitating stable nanopositioning achieved through high rigidity and closed-loop control. The P-561, P-562, and P-563 PIMars Nanopositioning Stages are XYZ multi-axis piezo flexure stages that utilize a parallel kinematics structure and capacitive sensors. They achieve a reproducibility of ±2 nm and linearity of 0.03%, enabling high-precision probe positioning with low crosstalk. With high resonance frequency and excellent dynamic characteristics, they are suitable for high-speed scanning measurements and micro-displacement measurements. They are ideal for precision measurement applications such as semiconductor inspection and nanomaterial analysis. 【Application Scenarios】 - Semiconductor inspection - Super-resolution microscopy - Photonics alignment 【Benefits of Implementation】 - Achievement of high-precision measurement results - Reduction of measurement time - Improvement of product quality

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High-Speed Tip/Tilt Piezo Stage S-331 for Laser Processing

Precision control of the beam with a high-speed response of 10 kHz. Tip/Tilt stage for laser processing.

In laser processing, even slight variations in the angle and position of the beam directly affect processing accuracy and finish quality. This is especially true in fine processing and high-speed scanning processes, where a beam control mechanism that combines high-speed responsiveness and high resolution is essential. The S-331 is a high-speed Tip/Tilt piezo stage equipped with a maximum resonance frequency of 10 kHz and an operating angle of ±5 mrad. Its excellent dynamic performance enables real-time beam correction, reducing focus shift and processing unevenness. It contributes to the establishment of a high-precision and stable laser processing process. 【Application Scenarios】 - High-speed steering of laser beams - Precision processing such as fine drilling and grooving - Real-time beam correction during processing - High-precision alignment control 【Benefits of Implementation】 - Improved processing accuracy and reproducibility - Enhanced processing efficiency due to high-speed responsiveness - Reduced processing unevenness and improved yield - Advancement of equipment performance

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P-737 Sample Focusing Z Stage for Microscopes

High-precision PIFOC Z stage for achieving high-speed focusing in microscopes.

In the field of research using microscopes, high-speed and high-precision focusing significantly impacts the quality of observation results and the reproducibility of acquired data. Particularly in 3D imaging and Z-stack acquisition using confocal and fluorescence microscopes, high-speed Z positioning with nanometer resolution is required. The P-737 PIFOC Z stage employs a piezo-flexure structure that directly drives the objective lens, achieving high-speed response and high-precision Z-axis control. Its compact design makes it easy to integrate into existing microscope systems, meeting the advanced focusing requirements in research applications. 【Usage Scenarios】 - 3D imaging with confocal microscopes - Z-stack acquisition with fluorescence microscopes - Live cell imaging - Observation of nanoscale structures 【Benefits of Implementation】 - Reduced measurement time through high-speed Z scanning - High-precision focusing with nanometer resolution - Highly reproducible imaging - Easy integration into microscope systems

  • P-737.jpg
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High-output & high-precision piezo linear stage for semiconductor manufacturing

Piezo Walk drive, nanometer precision, for positioning in semiconductor manufacturing.

In the semiconductor manufacturing industry, high precision and stability are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, positioning capability at the nanometer level becomes a crucial factor that affects product quality and yield. Low positioning accuracy can lead to manufacturing defects and inspection errors, potentially resulting in increased costs. Our high-output & high-precision piezo linear stage N-332 achieves nanometer-level positioning through piezo Walk drive, contributing to solving challenges in semiconductor manufacturing. 【Application Scenarios】 - Wafer probing - Mask alignment - Semiconductor manufacturing equipment 【Benefits of Implementation】 - Improved yield through high-precision positioning - Streamlined manufacturing processes - Stabilization of product quality

  • csm_E-712_1AN_PIC_5ee19753e6.jpg
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B-421BIX Small Piezo-Driven Linear Stage for Semiconductor Manufacturing

Ultra-compact piezo-driven linear stage for semiconductor devices with a maximum stroke of 33mm.

In semiconductor manufacturing processes, high precision and reproducibility are required for the positioning of wafers and masks. Particularly in fine processing and inspection processes, positioning accuracy directly affects product quality and yield. The B-421 BIX miniature linear stage achieves high-resolution positioning through piezoelectric drive, despite its ultra-compact design. It is easy to integrate even in limited equipment space and is suitable for semiconductor devices that require precise position control. It supports a maximum stroke of 33mm, providing a compact and high-performance positioning solution. 【Application Scenes】 - Wafer probing equipment - Mask alignment equipment - Semiconductor inspection equipment - Precision assembly equipment 【Benefits of Implementation】 - Stable process control through high-resolution positioning - Contribution to space-saving of equipment - Improved process stability through high-precision control

  • csm_B-421.X31_KATALOGZEICHNUNG.tif_Bilder-Web_f48091c3a4.jpg
  • csm_B-421-XY-Aufbau.tif_Bilder-Web_0de1cd4102.jpg
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B-421 BIX Small Piezo-Driven Linear Stage for Optical Adjustment

Ultra-compact piezo-driven linear stage for precise alignment of optical systems.

In optical systems, the positioning of lenses, mirrors, and optical elements greatly affects performance. Even slight misalignments can lead to image distortion or reduced measurement accuracy. The B-421 BIX miniature linear stage achieves high-resolution position control through piezoelectric drive, despite its ultra-compact design. It is easy to integrate into limited spaces and is suitable for precise optical alignment applications. It supports a maximum stroke of 33mm, addressing a wide range of optical adjustment needs from research and development to equipment integration. 【Application Scenes】 - Adjustment of microscope objective lenses - Focus adjustment for laser processing machines - Optical fiber alignment - Precision positioning for interferometers and measurement devices 【Benefits of Implementation】 - Stable alignment through high-resolution position control - Contribution to space-saving design of equipment - Achieving highly reproducible optical adjustments

  • csm_B-421.X31_KATALOGZEICHNUNG.tif_Bilder-Web_f48091c3a4.jpg
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[B-421 BIX Small Piezo-Driven Linear Stage for Research and Development]

Supports research and development applications | Ultra-compact piezo stage with a maximum stroke of 33mm

In the field of research and development, precise positioning of samples, optical elements, and sensors greatly affects experimental results. There are many cases where slight positional variations impact data accuracy, such as in the observation of fine structures or high-resolution measurements. The B-421 BIX miniature linear stage achieves high-resolution position control through piezoelectric drive, despite its ultra-compact design. It is easy to integrate into limited experimental spaces and is a suitable solution for precise positioning in research applications. It supports a maximum stroke of 33mm and can accommodate flexible experimental configurations and expansion into multi-axis systems. 【Application Scenes】 - Microscopic observation - Microfabrication experiments - Material property evaluation - Optical experiments / Laser experiments - Sensor evaluation tests 【Benefits of Implementation】 - Stable data acquisition through high-resolution position control - Contribution to space-saving of experimental equipment - High reproducibility in positioning - Flexible experimental design through multi-axis configuration

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High-load linear motor stage for laser microfabrication V-D07

Precision and smooth adjustment work for optical instruments. High-precision linear stage.

In laser microfabrication, even slight positional deviations of the workpiece significantly affect processing quality, necessitating high-precision and stable positioning. This is particularly important for microfabrication of semiconductor materials, glass, and films, where precise position control at the nanometer level is crucial. The V-D07 high-load linear motor stage achieves high-precision positioning at the nanometer level and high-speed operation through a high-precision linear encoder and direct drive linear motor. As a high-precision stage for laser microfabrication equipment, it supports a stable processing process. 【Application Scenarios】 - Precise positioning of laser microfabrication equipment - Laser processing of semiconductors and electronic components - Laser processing of glass and films - Alignment adjustment of optical components 【Benefits of Implementation】 - Enables precise positioning at the nanometer level - Smooth operation due to frictionless drive - Stable operation in high-load environments

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High Rigidity and High Precision Z Stage for Semiconductor Inspection V-Z03

Improving the quality and efficiency of semiconductor inspection with high-speed, high-precision Z-axis control.

In the semiconductor field, high precision and stability are required for the positioning of wafers and masks. Especially in inspection processes and microfabrication, even slight positional deviations can lead to measurement errors and reduced yield, significantly impacting product quality. The V-Z03 adopts a direct drive system using a voice coil motor, achieving high-speed response and high-precision Z-axis control. Furthermore, with a high-rigidity cross roller guide and a non-contact linear encoder, it ensures stable positioning without backlash and high reproducibility. It is also optimal for precise positioning of heavy objects, supporting loads of up to 150 N and featuring a pneumatic counterbalance. 【Application Scenarios】 - Semiconductor inspection equipment - Wafer inspection and measurement equipment - Precision measurement instruments 【Benefits of Implementation】 - Improved measurement accuracy through high-precision positioning - Reduced takt time due to high-speed response - Stable operation due to high-rigidity guides - Expanded applications due to high load capacity - Enhanced safety through self-locking functionality

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  • Solenoid Actuators
  • encoder
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High-Precision Z-Axis Voice Coil Motor Stage V-Z03 for Research and Development

Achieves sub-micron level precision Z-axis control with high-speed response and high rigidity.

In experiments in the field of research and development, precise positioning and stable operation are essential. Particularly in the observation of fine structures and precision machining, accurate control in the Z-axis direction determines the success or failure of the experiment. Conventional stages have issues with positioning accuracy and response speed, which have been factors that reduce the efficiency of experiments. The V-Z03 adopts a direct drive system using a voice coil motor, achieving high-speed and high-precision Z-axis control. 【Application Scenarios】 - Precision positioning in industrial and research fields - Semiconductor inspection 【Benefits of Implementation】 - Precise positioning at the sub-micron level - Reduction in experiment time - Improvement in experimental accuracy - Adaptability to diverse experiments

  • Other machine elements
  • Solenoid Actuators
  • encoder
  • stage

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Frictionless High-Precision XY Stage for Wafer Inspection V-P01

High-speed and high-precision wafer inspection is achieved by V-P01.

In the semiconductor industry, wafer inspection requires the detection of minute defects with high precision. The accuracy of the inspection is a crucial factor that influences product quality and yield. Especially as wafers become larger and more densely packed, faster and more accurate positioning becomes essential. The V-P01 achieves high-precision positioning and high-speed scanning through linear motor drive, contributing to the efficiency of wafer inspection. 【Usage Scenarios】 - Automated Optical Inspection (AOI) of wafers - Precision scanning of wafer surfaces - Positioning of fine patterns 【Benefits of Implementation】 - Reduction in inspection time - Improvement in inspection accuracy - Enhancement of yield

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  • Cartesian Robot
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