Vacuum-compatible 1nm feedback stage FS-1050UPX(V)
[Vacuum Compatible] High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.
This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control, possessing characteristics equivalent to those for atmospheric use.
- Company:シグマ光機
- Price:Other