Ultra-high precision 6-axis alignment stage "RSTZ Series"

High-precision alignment (within 1μm of the target) is now possible in all directions of X-Y-Z-θx-θy-θz.

By adopting a parallel link mechanism using a double wedge method in the conventional "RST aligner" drive unit, both lifting and tilting operations can be achieved with a single unit. 【Features】 ■ Maintains a low floor even with 6-axis drive. ■ High followability is achieved by arranging the drive units in a balanced equilateral triangle. ■ Equipped with high-rigidity cross roller guides for high load capacity specifications. (No issues with pressure during bonding) ■ Drive motors can be selected from various options, including servo motors, stepping motors, and AZ motors from different manufacturers. ■ The table is equipped with a large-diameter transparent hole. ■ By modularizing the drive components, the table size and shape can be freely designed, allowing us to propose a stage that perfectly meets your requirements. ■ DLL/sample code necessary for control is provided.

Sputtering EquipmentSemiconductor inspection/test equipmentPhotomask