High-precision alignment (within 1μm of the target) is now possible in all directions of X-Y-Z-θx-θy-θz.
By adopting a parallel link mechanism using a double wedge method in the conventional "RST aligner" drive unit, both lifting and tilting operations can be achieved with a single unit. 【Features】 ■ Maintains a low floor even with 6-axis drive. ■ High followability is achieved by arranging the drive units in a balanced equilateral triangle. ■ Equipped with high-rigidity cross roller guides for high load capacity specifications. (No issues with pressure during bonding) ■ Drive motors can be selected from various options, including servo motors, stepping motors, and AZ motors from different manufacturers. ■ The table is equipped with a large-diameter transparent hole. ■ By modularizing the drive components, the table size and shape can be freely designed, allowing us to propose a stage that perfectly meets your requirements. ■ DLL/sample code necessary for control is provided.
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basic information
【Specifications】 ■RSTZ-003 Table Size: Φ500mm Through Hole: Φ250mm Load Capacity: 300kgf (when evenly loaded) Motor Model: PK513-H100S (Oriental Motor) Drive Unit Resolution: 0.02μm Maximum Stroke in Axial Direction*: X-axis ±15mm, Y-axis ±17.5mm, Z-axis ±7.5mm θz-axis ±4.7°, θx-axis ±2.3°, θy-axis ±2.7° ■RSTZ-004 Table Size: Φ350mm Through Hole: Φ140mm Load Capacity: 120kgf (when evenly loaded) Motor Model: PK513-H100S (Oriental Motor) Drive Unit Resolution: 0.02μm Maximum Stroke in Axial Direction*: X-axis ±9mm, Y-axis ±10.3mm, Z-axis ±4.5mm θz-axis ±4.3°, θx-axis ±2.1°, θy-axis ±2.4° *When moving in multiple axial directions, the range will be narrower than the above strokes.
Price range
P5
Delivery Time
Applications/Examples of results
【Examples of Use】 ■Wafer bonding ■Micro LED laser transfer ■Nanoimprint ■Sputtering (film deposition) ■Exposure ■Printed electronics
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Company information
We offer a full range of positioning solutions required for nano-level high-precision positioning, image processing alignment, semiconductor inspection, optical device assembly, and automotive camera production.