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stage×THKプレシジョン - メーカー・企業と製品の一覧

stageの製品一覧

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High-precision positioning stage | Ultrasonic motor stage

High-precision positioning stage | Ultrasonic motor stage

This is a high-precision positioning stage that uses SPPA actuators. It can achieve a long stroke of up to 100mm with micro-feeding in units of 20nm.

The "Ultrasonic Motor Stage" is a high-precision positioning stage capable of micro-feeding movements in nanometer units up to a maximum of 100mm. It operates with a dedicated controller and closed-loop control using an internal linear scale. It is ideal for optical experiments and analytical measurement instruments that require high positioning reproducibility. It features lower heat generation and magnetic fields compared to electromagnetic motor types, making it suitable for special environments such as vacuum and non-magnetic conditions. We offer a lineup that includes "X-axis stages," "XY-axis stages," and "rotary stages." For more details, please download the catalog or contact us.

  • Actuator

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[Piezostage] PT Tilt and Rotation Type Rotating Stage

[Piezostage] PT Tilt and Rotation Type Rotating Stage

This is a rotation type stage (θz) with the vertical direction as the axis.

The piezo stage PT tilt and rotation type allows for adjustments of minute tilts, rotations, and skew angles. It is ideal for laser beam scanning, mirror alignment, and surface matching. Using piezoelectric elements, it can perform angular displacements such as rotation and tilt quickly and precisely. It features a type with an elastic hinge structure that enables rapid small angular displacements. In addition to rotation and tilt, linear motion is also possible through simultaneous control of multiple axes. The high responsiveness of the piezoelectric elements, combined with feedback control from built-in sensor signals, allows for high-speed and high-precision alignment of small angles. The simple composition of the components enables a compact main body size, making it easy to integrate into devices. We offer a variety of angle adjustment options, including simple tilt types, rotation types, goniometer types with virtual rotation centers, and planar skew with a three-point support structure. *For more details, please download the materials or feel free to contact us.

  • Other machine elements

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Ultra-Precision Positioning Piezo Stage Comprehensive Catalog

Ultra-Precision Positioning Piezo Stage Comprehensive Catalog

It is an ultra-precision stage with a maximum resolution of 1nm and excellent responsiveness.

This is the "Ultra-Precision Positioning Piezo Stage Comprehensive Catalog" from THK Precision, featuring a maximum resolution of 1nm and excellent responsiveness. The catalog includes a wide range of products suitable for various applications: - "Basic Type PS," ideal for a wide range of uses with a rich lineup. - "Open-Type PK," perfect for combinations with microscopes and optical transmission devices. - "Objective Lens Type PF," optimal for focusing objective lenses. - "Tilt and Rotate Type PT," best for alignment and surface matching. - "Precision Machining Type PU," ideal for nano and micro processing in ultra-precision cutting. - "Controller NC," which drives with closed-loop control using displacement sensors. - "Driver PH," which operates with open-loop control by applying voltage. Many products are featured in the catalog. Available for free download via "PDF Download."

  • Other FA equipment

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Ultra-precision positioning piezo stage standard linear stage

Ultra-precision positioning piezo stage standard linear stage

A basic series of piezo stages that includes everything from single-axis to three-axis integrated types, with a wide range of strokes.

■Performance Classification by Two Mechanisms They are classified into "Direct Drive Mechanism," which emphasizes high-speed response with a high resonance frequency, and "Displacement Amplification Mechanism," which ensures stroke. Direct Drive Mechanism - This mechanism moves the stage directly using piezoelectric elements. - By limiting the stroke, it excels in resolution and response. - It has high rigidity, allowing stable positioning even under heavy loads. Displacement Amplification Mechanism - This mechanism mechanically amplifies the extension of the piezoelectric elements. - Depending on the amplification ratio, it can achieve strokes several times to over a dozen times that of direct drive. - Position reproducibility is maintained through feedback control using built-in displacement sensors. *For more details, please refer to the PDF document or feel free to contact us.

  • Other machine elements

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[Piezostage] PT Tilt and Rotation Type Tilt Stage

[Piezostage] PT Tilt and Rotation Type Tilt Stage

This is a type of stage with a sloped table surface. There are two types with different slope directions.

The piezo stage PT tilt and rotation type allows for precise adjustments of minute tilts, rotations, and skew angles. It is ideal for laser beam scanning, mirror alignment, and surface matching. Using piezoelectric elements, it can perform angular displacements such as rotation and tilt quickly and accurately. This type features a flexible hinge structure that enables rapid small-angle displacements. In addition to rotation and tilt, linear motion is also possible through simultaneous control of multiple axes. The high responsiveness of the piezoelectric elements, combined with feedback control from built-in sensor signals, enables high-speed and high-precision alignment of small angles. The simple design of the components allows for a compact main body, making it easy to integrate into devices. We offer a variety of angle adjustment options, including simple tilt types, rotation types, goniometer types with a virtual rotation center, and even planar skew types with a three-point support structure. *For more details, please download the materials or feel free to contact us.

  • Other machine elements

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[Piezostage] PT tilt and rotation type stage for optical mirrors

[Piezostage] PT tilt and rotation type stage for optical mirrors

It is a shape particularly suitable for "tilt adjustment" of optical mirrors. There is one-axis tilt (θx) and two-axis tilt (θx, θy).

The piezo stage type for PT optical mirrors allows for precise adjustments of minute tilts, rotations, and skew angles. It is ideal for laser beam scanning, mirror alignment, and surface matching. Using piezoelectric elements, it can perform angular displacements such as rotation and tilt at high speed and with precision. This type features a flexible hinge structure that enables rapid small-angle displacements. In addition to rotation and tilt, simultaneous control of multiple axes allows for linear motion as well. The high responsiveness of the piezoelectric elements, combined with feedback control from built-in sensor signals, enables high-speed and high-precision alignment of small angles. The simple structure of the components allows for a compact main body size, making it easy to integrate into devices. We offer a variety of angle adjustment options, including simple tilt types, rotation types, goniometric types with a virtual rotation center, and planar skew types with three-point support. *For more details, please download the materials or feel free to contact us.*

  • Other machine elements

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Ultra-precision positioning piezo stage with opening

Ultra-precision positioning piezo stage with opening

Suitable for fine observation and high-precision mapping measurements combined with laser transmission and microscopy/analysis equipment.

■From Compact to Large Aperture We offer a range from compact apertures suitable for small devices to large aperture types that can align large panel substrates. ■Smooth and Accurate Scanning High-precision feedback control enables reliable operation in accordance with command signals. *For more details, please refer to the PDF materials or feel free to contact us.

  • Other machine elements

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Ultra-precision positioning piezo stage - rotation and tilt stage

Ultra-precision positioning piezo stage - rotation and tilt stage

Suitable for micro-angle alignment and precision surface matching of optical devices.

■Rotation guidance using an elastic hinge mechanism The uniquely designed elastic hinge mechanism amplifies the slight expansion and contraction of the piezo element while supporting stable rotational motion. With no friction or wear, it excels in smooth and high-speed movement, making it suitable for applications requiring fine angle adjustments. *For more details, please refer to the PDF document or feel free to contact us.*

  • Other machine elements

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[Comprehensive Catalog Available] Ultra-Precision Positioning Piezo Stage

[Comprehensive Catalog Available] Ultra-Precision Positioning Piezo Stage

For selecting piezo stages! Maximum resolution of 1nm and excellent responsiveness! Application examples are also included.

This is a piezo stage with ultra-high resolution and fast response, featuring a maximum resolution of 1nm. It enables highly reliable positioning through feedback control using an integrated displacement sensor. 【Usage Examples】 ■ Semiconductor and LCD inspection equipment, interferometer devices, analytical instruments, microscope lens focusing, ultra-precision machining, laser-related equipment, nanometer positioning, etc. 【Reasons for Choosing This Product】 ■ Customization available from a single unit ■ Compatible with vacuum and non-magnetic requirements ■ Combination unit support A wide range of products and numerous application examples are available! For more details, please download the catalog or contact us.

  • Other FA equipment

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