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stage×神津精機 - List of Manufacturers, Suppliers, Companies and Products

stage Product List

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Ultra-High Precision Alignment Stage 'RST Aligner'

Ultra-High Precision Alignment Stage 'RST Aligner'

Achieving high tracking accuracy of 0.1μm ± 20nm! It beautifully engraves steps at the sub-micron level.

The "RST Aligner" is a super high-precision alignment stage with a drive unit arranged in a balanced equilateral triangle. This axis configuration enables high-precision micro-drives essential for alignment. The necessary calculations for control are provided free of charge. It consolidates the cutting-edge technology cultivated in the Mont Blanc series. Even at high resolution settings, it follows with excellent sensitivity. 【Features】 ■ Balanced equilateral triangle arrangement ■ Custom-designed drive unit ■ Large diameter transmission hole ■ Customizable table size ■ Z mechanism can be added ■ Custom support available *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices

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Ball screw driven precision swivel stage

Ball screw driven precision swivel stage

With ball screw drive, durability has significantly improved! A suitable □100mm size for high-precision tilt alignment has arrived!

The "Ball Screw Driven Swivel Stage" is a product that allows for control with higher resolution. The weight has been reduced from 2.8 kg to 2.0 kg, a decrease of 28%, and durability has been significantly improved with ball screw drive. It is suitable for wafer alignment and creates free space above and below the workpiece, increasing design flexibility. 【Features】 ■ Allows for control with higher resolution ■ Weight reduced by 28%, from 2.8 kg to 2.0 kg ■ Durability significantly improved with ball screw drive *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices

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Automatic X Stage "SXA Series"

Automatic X Stage "SXA Series"

A positioning stage that achieves both low cost and sub-micron delivery accuracy. Its high load capacity also expands its range of applications.

Kozu Seiki's automatic X and XY stage 'SXA Series' achieves high cost performance in pioneering manufacturing fields. 【Are you facing these issues?】 ■ We use a lot in the production line, so we want to keep costs as low as possible. ■ The client's desired delivery date is fluid, so we want to procure as quickly as possible. ■ We want an automatic X stage with high rigidity, high precision, and a long stroke. ■ We want to use it in a clean room. 【Features】 ■ Achieves a 25% to 40% lower price through standardization of parts and mass production (compared to our company). ■ A lineup of four models starting from 98,000 yen (excluding tax)! ■ Adopts high-rigidity ball screws and dedicated cross roller guides. ■ Both high load capacity and moment rigidity are more than twice that of our conventional models! 【High versatility and high performance coexist】 【1】 High precision = required needs + KOHZU quality 【2】 Low price = cost reduction through parts standardization and process management * Modifications can be accommodated by replacing the motor. * An automatic XY stage 'SYA Series' is also available.

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Alignment stage suitable for semiconductor manufacturing and inspection equipment.

Alignment stage suitable for semiconductor manufacturing and inspection equipment.

You can choose from the 'RST Aligner' that achieves a tracking capability of 0.1μm and the space-saving, thin, and compact 'YRA Series' according to your application needs.

【RST Aligner】 - The most notable feature is the balanced triangular arrangement of the drive units, enabling ultra-high precision micro-movement essential for alignment. - Achieves high responsiveness of 0.1μm ± 20nm without feedback from linear scales, etc. - Allows for large-diameter through holes since it does not use bearings. - Table size can be freely adjusted to match wafer size or workpiece size. - Z mechanism can be added as required for applications such as bonding. - Customizable for high load capacity specifications, color changes, and other specifications. 【YRA Series】 - Achieves high precision and high rigidity while being compact and space-saving. - Integrated structure where each axis of the XYθ axes operates independently. - Four models are available to suit various applications: - YRA-070: The smallest alignment stage in the series. - YRA-071: Capable of accommodating various motor modification requests. - YRA-131: Suitable for bonding small to medium-sized LCDs and wafers. - YRA-200: The largest model in the series with high load capacity specifications.

  • Semiconductor inspection/test equipment
  • Other semiconductor manufacturing equipment
  • Other image-related equipment

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[Guidebook Giveaway] Alignment Stage for Achieving Precise Positioning

[Guidebook Giveaway] Alignment Stage for Achieving Precise Positioning

Select a positioning stage suitable for your application! Introducing the single-axis combinations, high-rigidity YRA series, and ultra-high precision RSTA series, among others.

In the manufacturing process, accurate positioning is crucial for improving the precision and quality of products. Among these, alignment stages require not only the precision demanded of standard positioning stages but also attributes such as followability and positional stability, which are very important. Therefore, it is necessary to select an appropriate stage according to the required precision and positioning time during alignment. At Kozu Seiki, we offer a variety of alignment stages tailored to different applications. We feature the "YRA Series," which employs a guide mechanism that balances high precision and high rigidity, and the "RSTA Series," which achieves high followability with a 0.1μm pitch by evenly distributing the drive units. [YRA Series] - Guide mechanism that balances high precision and high rigidity - Achieves a slim, lightweight, and compact design - Utilizes high-precision ground ball screws - Employs easy-to-control stepping motors Additionally, we have prepared a guidebook regarding alignment stages. We hope it will be a useful reference for your selection process. *For more details, please refer to the PDF materials or feel free to contact us.*

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Ultra-high precision 6-axis alignment stage "RSTZ Series"

Ultra-high precision 6-axis alignment stage "RSTZ Series"

High-precision alignment (within 1μm of the target) is now possible in all directions of X-Y-Z-θx-θy-θz.

By adopting a parallel link mechanism using a double wedge method in the conventional "RST aligner" drive unit, both lifting and tilting operations can be achieved with a single unit. 【Features】 ■ Maintains a low floor even with 6-axis drive. ■ High followability is achieved by arranging the drive units in a balanced equilateral triangle. ■ Equipped with high-rigidity cross roller guides for high load capacity specifications. (No issues with pressure during bonding) ■ Drive motors can be selected from various options, including servo motors, stepping motors, and AZ motors from different manufacturers. ■ The table is equipped with a large-diameter transparent hole. ■ By modularizing the drive components, the table size and shape can be freely designed, allowing us to propose a stage that perfectly meets your requirements. ■ DLL/sample code necessary for control is provided.

  • Sputtering Equipment
  • Semiconductor inspection/test equipment
  • Photomask

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Precision rotary stage

Precision rotary stage

We respond to our customers' diverse needs! We have a lineup of various rotating stages available.

High-precision angle control is essential in scientific experiments and research and development. Our company offers a variety of rotating stages to meet the diverse needs of our customers regarding high-precision angle control. Please feel free to contact us when you need assistance. 【Product Lineup】 ■ Rotating stages that can withstand high loads ■ Rotating stages with no wobble in the rotation axis ■ Rotating stages specialized for ultra-high precision positioning in small areas ■ Stages with two rotational axes arranged coaxially, etc. *For more details, please refer to the PDF document or feel free to contact us.

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Ultra-Precision Positioning Stage "Mont Blanc Series"

Ultra-Precision Positioning Stage "Mont Blanc Series"

A diverse lineup of over 300 varieties! Various combinations are possible.

The "Mont Blanc Series" is a versatile precision positioning stage born from our years of experience in custom-made orders. It is equipped with high precision, high rigidity, and high durability. Please feel free to consult us if you have any requests. 【Lineup】 ■ Manual XY Stage ■ Gothic Arc Stage ■ Manual Z Stage ■ Automatic X Stage ■ Automatic Swivel Stage ■ Manual Swivel Stage ■ Precision Positioner ■ Automatic Rotating Stage *For more details, please download the PDF or feel free to contact us.

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Automatic Z Stage "ZA07A-V201"

Automatic Z Stage "ZA07A-V201"

The structure is simple, and the specifications are cost-effective! It uses ball screws, which provide excellent durability.

We would like to introduce our automatic Z stage, the 'ZA07A-V201'. It features a ball screw, which provides excellent durability and allows for high-speed movement. The structure is simple, and it is designed to be cost-effective. Additionally, we offer products with a table size of 70mm, such as the high-rigidity "ZA07A-V1F01" and the low-profile "ZA07A-W2C02". 【Specifications (partial)】 ■ Table size: 70mm ■ Stage height: max 102.5mm ■ Guidance method: Cross roller ■ Movement range: CW 4mm, CCW 10mm ■ Resolution: 0.25μm *For more details, please refer to the PDF document or feel free to contact us.

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Ultra-thin Precision XY Stage 'CYAT-070'

Ultra-thin Precision XY Stage 'CYAT-070'

Ideal for retrofitting XY axes after the introduction of various devices! The adoption of LM guides enables long strokes. Transparent holes are also secured, making it usable for a wide range of applications.

The "CYAT-070" is an ultra-thin XY stage that achieves significant miniaturization through its integrated two-axis structure. It secures a full stroke with a transparent hole of φ30mm, making it suitable for use as a compact XY stage for microscopes. Due to its thin structure, it is ideal for retrofitting XY axes after the introduction of various devices. Additionally, the adoption of LM guides allows for a long stroke, expanding its range of applications. 【Features】 - Significant miniaturization achieved through the integrated two-axis structure - Total height of 70mm even with the addition of our Z-axis - Full stroke with a transparent hole of φ30mm, also usable as a compact XY stage for microscopes *For more details, please refer to the PDF document or feel free to contact us.

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Tangent Bar Type Small Automatic Rotating Stage 'RA05A-T01'

Tangent Bar Type Small Automatic Rotating Stage 'RA05A-T01'

Achieves precision suitable for high-precision alignment! Contributes to space-saving for the entire mounted equipment!

The "RA05A-T01" is a compact automatic rotating stage with a tangent bar design that contributes to space-saving for the entire mounted equipment due to its slim profile (22mm). It achieves high precision suitable for high-accuracy alignment and high resolution (0.002°) thanks to the tangent bar mechanism. Additionally, it features high durability due to the adoption of high-precision ball screws. 【Features】 ■ Contributes to space-saving for the entire mounted equipment due to its slim profile (22mm) ■ Excellent durability due to the use of high-precision ball screws ■ Achieves high resolution (0.002°) through the tangent bar mechanism ■ Realizes precision suitable for high-accuracy alignment *For more details, please refer to the PDF document or feel free to contact us.

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[Z Stage Special Feature] High-Precision Z Stage Suitable for Semiconductor Manufacturing and Inspection Equipment

[Z Stage Special Feature] High-Precision Z Stage Suitable for Semiconductor Manufacturing and Inspection Equipment

We offer a diverse lineup of mechanisms, sizes, and strokes to meet customer needs. We also accommodate modifications and custom orders.

This is a feature on the Z stage of Kozu Seiki's precision positioning stages, which are active in various production sites such as semiconductor manufacturing equipment. We introduce the upright Z stage and three types of horizontal Z stages. Each stage includes information on table size and model type, as well as essential specifications for selecting a Z stage, such as stroke, overall height, and load capacity. Examples of performance values are also provided. Custom case studies are included as well. This material serves as a helpful resource for selection. Performance values for the Z stage are also available. *For more details, please refer to the PDF document or feel free to contact us.

  • Other semiconductor manufacturing equipment

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