Positioning with a resolution of 1nm due to the built-in linear encoder, with a maximum movement range of 50mm.
An ultra-precision positioning device (feedback stage system) has achieved 1nm resolution and ±2nm reproducibility for optical linear encoders. Compared to positioning devices that use piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capabilities." The available strokes are up to "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.
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basic information
■Stage Minimum resolution: 1nm (relative to the reading value of the built-in scale) Stroke: 20mm to 50mm Maximum moving speed: 5mm/sec (UP series) ■Controller Number of control axes: 2 Minimum command unit: 1nm Maximum operating speed setting: 6mm/sec (the maximum moving speed of the stage takes priority) Control interface: Jog controller, emergency stop input, GP-IB, USB, Ethernet, general-purpose I/O
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Delivery Time
Applications/Examples of results
Various fields that require fine positioning. Applications in inspection devices, exposure devices, and laser processing equipment, as well as stages for microscopes that require high reproducibility in the bio-related field.
Line up（7）
| Model number | overview |
|---|---|
| FS-1050UPX | 1nm resolution (internal scale reading), 50mm stroke stage |
| FS-1040UPX | 1nm resolution (internal scale reading), 40mm stroke stage |
| FS-1020UPX | 1nm resolution (internal scale reading), 20mm stroke stage |
| FS-1050SPX(MD) | 1nm resolution (internal scale reading), 50mm stroke, high torque stage |
| FS-1040SPX(MD) | 1nm resolution (internal scale reading), 40mm stroke, high torque stage |
| FS-1020SPX(MD) | 1nm resolution (internal scale reading), 20mm stroke, high torque stage |
| FC-911 | Controller for 1nm resolution stage |
catalog（5）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
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