1～4 item / All 4 items
No errors due to wedge angle.
The FZ wedge-shaped stage (FZ080) is a precision vertical movement stage utilizing a wedge mechanism. The 80mm square stage employs precision cross rollers for linear movement and allows for vertical displacement of up to 10mm. The wedge mechanism uses high-precision optical position sensors to encode vertical displacement, enabling access from any direction.
Equipped with the HR series ultrasonic motor, we offer standard stages for single-axis and multi-axis motion stages.
Nanomotion's standard stages provide single-axis and multi-axis motion performance for a wide range of applications in the semiconductor, biomedical, and measurement instrument markets.
Positioning with 10nm resolution! Linear stage compatible with single-axis and multi-axis.
The FB linear stage can be used in both single-axis and multi-axis applications. The stage configuration utilizes cross roller bearings, linear optical encoders, and ultrasonic (piezo) motors from Nanomotion. The stage is available in a wide range of travel lengths and can be combined in X/Y or X/Y/Z or other multi-axis configurations. The encoder resolution can be selected from 0.1μm, 1μm, 0.5μm, 50nm, or 10nm.
Supports various speed, force, and positioning requirements up to 1μrad.
The FR Rotary Stage (FRS060) utilizes ultrasonic motors, cross roller bearings, and non-contact high-resolution rotary encoders to provide the most compact footprint. By combining various encoder resolutions and motors, the FRS060 can accommodate a range of speed, force, and positioning requirements down to 1μrad. The FRS060 rotary stage is available in standard, vacuum, and UHV configurations.
