16～23 item / All 23 items
Can be baked up to 300°C in open and closed positions, suitable for harsh environments.
- Durable and long life cycle - Mechanical lock in closed position - Radiation resistance performance - "Hard on hard" sealing
Compact vacuum shut-off valve. Can also be used as an alternative to gate valves.
- Sturdy and compact vacuum shut-off valve for pumps - Operates with differential pressure
Optimal for advanced processes with uniform gas flow.
- Enables uniform exhaust with particle-free operation - Proven track record of excellent pressure control - Equipped with service port (for connecting to PC and Control Performance Analyzer (CPA) via USB)
Ideal for harsh etching and cleaning processes.
- High-speed, particle-free operation - Accurate pressure control - Equipped with service ports (for PC connection and CPA software)
Compatible with corrosive gases!
- Extremely low outgassing amount - Large differential pressure compatibility - CF rotating flange
Design adapted to harsh processes and high temperatures.
- High throughput due to short opening and closing times - Designed for harsh processes and high temperatures - Small distance between the flange faces of the valve
Large square gate valve capable of high-speed operation with lightweight components.
- High operating speed with lightweight components - No system downtime during maintenance - Three different service positions - Safety mode during maintenance
Angle valve for exhaust and venting in high vacuum applications.
- Angle and inline body - Bellows shaft seal - Large differential pressure support - Long cycle life
