1～15 item / All 23 items
Downstream pressure control and vacuum sealing valves in the SEMI/FPD process. Ideal for advanced etching processes.
- Enables uniform exhaust with particle-free operation - Proven track record of excellent pressure control - Equipped with service port (for connection to PC and Control Performance Analyzer (CPA) software via USB)
Multi-purpose valves from UHV to advanced applications.
- No lubricant required - Low particle generation - Shock reduction - Vulcanized seal
For vacuum processes in (extreme) UHV applications
- The seal uses the FLEX VATRING method. - Deformation of the sealing surface is within the range of elastic deformation. - Standard hex wrench, no torque management required. - High conductance. - FLEX VATRING can be replaced up to two times.
For those seeking a simple solution!
- Super high-speed operation - Built-in software operable on Windows - Remote control analog/digital interface
A gate valve ideal for applications requiring minimal particle generation and low vibration.
- Minimal shock - Low particle generation - Vacuum section and mechanism are isolated - Vulcanized gate seal - Long life cycle
Extremely short control response time, and easy to use with a compact design.
- Excellent pressure control capability - Equipped with limit switch - Service port equipped (for PC connection or service box connection)
A combination valve with excellent pressure control capabilities.
Series 61.2: A system that combines a butterfly control valve and a Series 12.1 vacuum sealing gate valve within a single valve body. The gate valve acts as a slave to the butterfly control valve and is suitable for OEM interfaces. Series 95.1: A combination of a control valve and an angle valve, equipped with a bellows shaft seal. The valve can operate open at a differential pressure of 0.1 MPa. Series 95.2: A combination of a control valve and a gate valve, equipped with an O-ring shaft seal.
Capable of handling large differential pressure!
- Large differential pressure response - The aperture can be set using a memory - Angle and inline body
High throughput due to short opening and closing times.
- Low holding costs - High throughput due to short opening and closing times - Customer-specified design
Compact vacuum sealing valve
- Minimal vibration and particle generation during valve opening and closing - Easy and quick maintenance due to the split body structure - No adjustment needed after disassembly and cleaning
High vacuum cylinder valve capable of full conductance.
Valves for exhaust and venting in high vacuum applications that require high conductance - Capable of withstanding harsh environments (high resistance to corrosion). - A perforated cylinder rotates, allowing for full conductance. - A rotating structure that hides the O-ring within the valve body. Protects the O-ring from corrosive gases, ensuring a long lifespan!
High vacuum gate valve capable of opening and closing operations at a differential pressure of 0.1 MPa.
The valve can open and close with a differential pressure of 0.1 MPa. - High vacuum gate valve for vacuum sealing applications - Can be opened and closed even with a pressure difference due to the wedge seal.
VATLOCK system vacuum gate valve
Valves for research and development and low vacuum applications in industry - Gate valve with VATLOCK system that securely seals even in back pressure situations with mechanical locking - Structure that does not burden the pump due to low vibration thanks to air damping - Easy to remove and maintain - Low cost
Vacuum shut-off valve for pumps/chambers that can be used in semiconductor and surface analysis applications.
- Low particle generation - Easy maintenance - Low cost
It can be baked at an open position of 250°C and a closed position of 200°C to remove moisture and maintain an ultra-vacuum state. The seal directly adheres to the plate, preventing the accumulation of debris.
-No lubricant required -Vulcanized seal for DN 63-200 -Easy maintenance
