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Ultrasonic motor Product List and Ranking from 4 Manufacturers, Suppliers and Companies

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

Ultrasonic motor Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. 新生工業 Tokyo//others
  2. null/null
  3. 工苑 Kanagawa//Industrial Electrical Equipment
  4. 4 Piezo Sonic 本社 Tokyo//robot
  5. 5 エヌ・エス・ティ Tokyo//software
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Ultrasonic motor Product ranking

Last Updated： Aggregation Period:Sep 17, 2025～Oct 14, 2025
This ranking is based on the number of page views on our site.

  1. Ultrasonic Motor Product Catalog 新生工業
  2. High torque precision positioning ultrasonic motor for multi-axis semiconductor manufacturing equipment. 工苑
  3. Linear ultrasonic motor [For small robots and precision stages!]
  4. Hollow Ultrasonic Motor: PSM60 R Series Piezo Sonic 本社
  5. 4 Compact, lightweight, low-speed high-torque linear ultrasonic motor [Vibrex]

Ultrasonic motor Product List

1～15 item / All 29 items

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NM Ultrasonic Motor "HR Series"

NM Ultrasonic Motor "HR Series"

High resolution, high-speed response, space-saving! Unlimited range of motion and high responsiveness!

The "HR Series" is an ultrasonic motor (piezo motor) used to move linear and rotary stages. It has a wide variable speed range from a few μm/sec to 250 mm/sec and can be easily mounted on devices such as stages with low friction resistance. Available in various lineups, from single-element motors to motors made by stacking eight elements. Vacuum specifications are also available. 【Features】 ■ 10 nm step resolution ■ Achieves 1 nm step resolution in DC mode with AB2 amplifier ■ Wide speed range from 1 μm/s to 250 mm/s ■ Unlimited range of motion and high responsiveness ■ Excellent driving force of 4 to 32 N * For more details, please refer to the PDF materials or feel free to contact us. We also offer the "AB Driver" series, optimized for the "HR" series. Please feel free to inquire about this as well.

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NM Small Ultrasonic Motor (Piezo Motor) 'EDGE Motor'

NM Small Ultrasonic Motor (Piezo Motor) 'EDGE Motor'

The smallest industrial ultrasonic motor (piezo motor) handled by Nanomotion Ltd.

The EDGE motor is the smallest industrial ultrasonic motor (piezo motor) handled by Nano Motion Inc. This motor is driven by a compact ASIC-based driver and can be controlled by connecting it to many commercially available servo controllers. It is particularly suitable for mass-produced equipment.

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KN_【SEMICON Japan 2021】 About Exhibited Products

KN_【SEMICON Japan 2021】 About Exhibited Products

We will introduce the products that will be exhibited at SEMICON Japan 2021 Hybrid.

Our company will be exhibiting at "SEMICON Japan 2021 Hybrid," which will be held at Tokyo Big Sight from December 15 (Wednesday) to December 17 (Friday), 2021. At this exhibition, we will showcase the ultrasonic motors (piezo motors) and stage products from Nanomotion, which have over 20 years of proven track record in semiconductor manufacturing equipment and engineering testing and analysis instruments, as well as the digital servo driver products from Advanced Motion Controls. 【Exhibited Products】 ■ Ultrasonic Motor (Piezo Motor) "SE8 Motor" ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (Demo available) ■ Ultrasonic Motor (Piezo Motor) "EDGE Motor" ■ FB Stage (Nanomotion Standard Stage) ■ Digital Servo Driver "FlexPro" We sincerely look forward to your visit.

  • Laser Components

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Ultrasonic Motor Standard Type Model USR30-B Series

Ultrasonic Motor Standard Type Model USR30-B Series

Built-in type small ultrasonic motor

The standard model is ideal for prototyping devices using ultrasonic motors and building systems for general environments. The USR30-B series is a built-in type of small ultrasonic motor. The maximum torque is 0.1 [Nm] and the maximum rotation speed is 300 [rpm]. We offer the single-shaft type USR30-B3, which has an output shaft only, and the dual-shaft type USR30-B4, which allows for sensor mounting. For more details, please download and view the catalog.

  • DC Motor

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Ultrasonic Motor Standard Type Encoder-equipped Model USR60-E Series

Ultrasonic Motor Standard Type Encoder-equipped Model USR60-E Series

Model equipped with an incremental rotary encoder.

The standard model is ideal for prototyping devices using ultrasonic motors and building systems for general environments. The USR60-E series is equipped with an incremental rotary encoder. The maximum torque is 1.0 [Nm] and the maximum rotational speed is 150 [rpm]. The encoder resolution can be selected from two options: 500 [P/R] and 1,000 [P/R]. The USR60-E3 features a 500 [P/R] encoder, while the USR60-E3T is equipped with a 1,000 [P/R] encoder. For more details, please download and view the catalog.

  • DC Motor

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Ultrasonic Motor Non-Magnetic Type Basic Model USR30-SN Series

Ultrasonic Motor Non-Magnetic Type Basic Model USR30-SN Series

Highly robust, with the ability to connect and disconnect cables via connectors!

The non-magnetic ultrasonic motor is designed for use in high magnetic fields such as MRI, with metal components made only from special aluminum and copper alloys. It can be safely used in environments with a magnetic flux density exceeding 3[T]. The USR30-SN series is housed in a robust case and features a non-magnetic model that allows for cable connection and disconnection via connectors. The maximum torque is 0.1[Nm], and the maximum rotational speed is 250[rpm]. We offer a single-shaft type USR30-S3N with an output shaft only, and a dual-shaft type USR30-S4N that allows for sensor mounting. For more details, please download and view the catalog.

  • DC Motor

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Ultrasonic Motor Non-Magnetic Type Encoder Equipped Model USR60-EN Series

Ultrasonic Motor Non-Magnetic Type Encoder Equipped Model USR60-EN Series

Non-magnetic model equipped with an incremental rotary encoder.

Non-magnetic ultrasonic motors are designed for use in high magnetic fields such as MRI, and the metal components are made only from special aluminum and copper alloys. They can be safely used in environments where the magnetic flux density exceeds 3[T]. The USR60-EN series is a non-magnetic model equipped with an incremental rotary encoder. The maximum torque is 1.0[Nm], and the maximum rotational speed is 150[rpm]. The encoder resolution can be selected from two options: 500 [P/R] and 1,000 [P/R]. The USR60-E3 is equipped with a 500 [P/R] encoder, while the USR60-E3T features a 1,000 [P/R] encoder. For more details, please download and view the catalog.

  • DC Motor

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Ultrasonic Motor "Motor for Magnetic Field Environment"

Ultrasonic Motor "Motor for Magnetic Field Environment"

A special motor that does not emit a magnetic field during operation, so it does not affect external devices!

We would like to introduce our ultrasonic motor, the "Magnetic Field Environment Motor." Constructed entirely from non-magnetic materials, down to the last screw, it is unaffected by magnetic field environments and does not influence them either. It can be safely used in magnetic field environments such as inside MRI machines. We offer a wide range of products, including the "Sensorless Single-Axis Motor for Magnetic Field Environments" and the "Motor with 500p/r Encoder for Magnetic Field Environments." 【Series Lineup】 ■ Magnetic Field Environment Motor (PSM60N SERIES) ■ Magnetic Field Environment Motor (PSM40N SERIES) *For more details, please refer to the PDF document or feel free to contact us.

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  • Vibration motor

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Hollow Ultrasonic Motor: PSM60 R Series

Hollow Ultrasonic Motor: PSM60 R Series

A hollow motor with a through hole of φ12 and a flange mounting interface.

The central through hole with a diameter of 12mm allows for the passage of cables and shafts, achieving a maximum torque of 1.2N·m, comparable to other models in the PSM60 series! The external interface adopts a flange shape that excels in versatility during embedding. This is a new type of ultrasonic motor that contributes to the thinning of robot joints and devices.

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High Torque Ultrasonic Motor: PSM60 W Series

High Torque Ultrasonic Motor: PSM60 W Series

Maintains a high torque of 2.0 [N/m], the world's lightest and thinnest motor in its class.

It can maintain a high torque of 2.0 [N·m] without power or control signals, and without brakes or clutches, allowing for the maintenance of the posture and angle of robots and conveyor systems. There is no backlash when stationary, and it is the world's lightest and thinnest motor in its class. It achieves high torque without modification, using the same interface as the PSM60 series.

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NM Ultrasonic Motor (Piezo Motor) 'SE Motor'

NM Ultrasonic Motor (Piezo Motor) 'SE Motor'

With a driving force of 32N, the maximum speed is 500mm/sec! Power consumption is half that of conventional products.

The "SE Motor" expands its product line based on the extensive experience of NanoMotion Inc. in the fields of measurement, semiconductors, optics, and defense with ultrasonic motors (piezo motors). It is designed based on an expanded motor structure that incorporates a more efficient drive core to achieve high rigidity, high-speed drive, and sub-nanometer motion resolution. Compared to NanoMotion's existing "HR Motor," this product offers double the speed with the same driving force while consuming half the power. 【Features】 ■ High vacuum applications ■ Sub-nanometer positioning accuracy ■ Excellent energy conversion efficiency ■ Wide dynamic speed range ■ Zero backlash and high rigidity *For more details, please refer to the PDF document or feel free to contact us.

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NM_【Adopted by domestic semiconductor manufacturing companies】 Vacuum-compatible ultrasonic motor

NM_【Adopted by domestic semiconductor manufacturing companies】 Vacuum-compatible ultrasonic motor

[Adopted by domestic semiconductor manufacturers] An ultrasonic motor used in semiconductor manufacturing that combines high-speed movement and precise positioning in a vacuum.

Nanomotion's ultrasonic motors come in various sizes and are suitable for environments ranging from atmospheric pressure to ultra-high vacuum. We have built motion platforms for a wide range of applications, from various micro-stages in the semiconductor industry to 300mm wafer inspection stages. The features of Nanomotion's ultrasonic motors include backlash-free direct drive, allowing the stage to be held even without power. The motor alone can provide a driving force of up to 32N, but in situations where more torque is needed, multiple ultrasonic motors can be installed to increase the driving force. They can also be used in high vacuum environments, and a non-magnetic model is available for ion beam applications. ■ SE Motor (Latest Model) Speed range of 1μm to 500mm/sec, sub-nanometer step resolution, maximum driving force of 32N. This ultrasonic motor was developed with Nanomotion's involvement in a development consortium for 7nm processes and has garnered attention from domestic manufacturers. ■ HR Motor (Standard Model) Speed range of 1μm to 250mm/sec, 1nm step resolution, maximum driving force of 32N. This ultrasonic motor is widely used by domestic manufacturers.

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High torque precision positioning ultrasonic motor for multi-axis semiconductor manufacturing equipment.

High torque precision positioning ultrasonic motor for multi-axis semiconductor manufacturing equipment.

Heavy objects can achieve both high-speed movement and high-precision positioning by increasing torque with multiple ultrasonic motors.

Nanomotion's ultrasonic motors "SE" and "HR" are products capable of high-speed movement (up to 500mm/sec) and high precision positioning of 1nm, even in a vacuum. A notable feature is the driving force; the HR8 motor has a maximum torque of 32N. For example, using four HR8 motors can achieve a torque of 128N, allowing for the stacking of multiple stages or the movement of heavy payloads. *The payload capacity varies significantly depending on conditions such as movement speed, precision, and stage size. ■ 1nm Multi-Axis Precision Stage for Semiconductor Manufacturing Evaluation A 3-axis stage used within a vacuum chamber, featuring sub-nanometer step resolution with SE motors. ■ Stage for Electron Beam and Ion Beam (FIB) A 4-axis (X-Y-Z-θ) stage designed for inspection, vacuum-compatible, and non-magnetic. Achieves high resolution of 1nm with position stability below 6nm. ■ Stage for Light Sheet Microscopy Achieves an accuracy of 10nm and stable low-speed operation (200nm/sec). It features 5 axes: XYZ and Tip-Tilt. *For other examples, please refer to the "Examples of Achievements" section below.

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