Water-sealed vacuum pump 'MEA' for the semiconductor processing industry
Resin-made water-sealed vacuum pump provides a clean vacuum environment.
In the semiconductor manufacturing process, it is important to maintain a clean working environment. Our water-sealed vacuum pump "MEA" keeps the working environment clean by adopting a water-sealed design, making it suitable for the suction of gases containing droplets and water vapor. Miura's water-sealed vacuum pump was developed not only with a focus on performance but also with a strong emphasis on ease of use. It features a hygienic resin casing and a stainless steel two-stage impeller inside the pump. The structure is durable, resistant to suction troubles and damage. The lightweight, compact body with a directly connected motor is also effective for space-saving. 【Application Scenarios】 - As a vacuum source for fixing in semiconductor manufacturing - Processes requiring a clean suction environment - Suction of gases containing water vapor or moisture 【Benefits of Implementation】 - Space-saving - Maintenance of a clean working environment
- Company:三浦工業
- Price:Other