Substrate AOI "SX Series"
From high-resolution pattern inspection at L/S = 5/5 µm to laser via inspection, we provide the optimal solution for all your visual inspection needs.
We offer a comprehensive lineup of AOI systems covering a wide range of substrates—from high-end models supporting minimum line/space widths of 5/5 µm to mid-range models. Our systems deliver ultra-high-precision inspection for everything from circuit patterns to laser vias. In addition to standard circuit and laser via inspection, our solutions are also capable of measuring and outputting line/space widths as well as top/bottom diameters of vias. 【Rich Options】 - Verify inspection results directly on a PC using defect images saved by the inspection system—no dedicated verification machine required. - Significantly reduce verification workload with AI-based automatic defect classification. - Analyze defect trends by type and location using panel-level data mapping, enabling effective feedback to upstream processes. - Offline teaching system allows recipe creation without occupying the inspection equipment. - Optional server system available for storing inspection results.
- Company：INSPEC Inc.
- Price：Other
