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  3. センシリオン
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Electronic Components and Semiconductors
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センシリオン

number of employees10
addressKanagawa/Kohoku-ku, Yokohama-shi/6th Floor, Shin-Yokohama Center Building, 2-5-15 Shin-Yokohama
phone045-270-4506
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last updated:Feb 26, 2025
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センシリオン List of Products and Services

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Temperature and humidity Temperature and humidity
Temperature Temperature
CO2 CO2
PM PM
Environmental sensor node Environmental sensor node
Liquid flow Liquid flow
Differential pressure Differential pressure
Gas flow Gas flow
Mass flow controller Mass flow controller
Refrigerant detection Refrigerant detection
VOC・Nox VOC・Nox
Formaldehyde Formaldehyde
Evaluation kit Evaluation kit
Vehicle-mounted sensors and sensor modules Vehicle-mounted sensors and sensor modules
Medical-use sensor Medical-use sensor
Sensor for semiconductor applications Sensor for semiconductor applications
Medical-use

Medical-use sensor

Sensors ideal for various medical applications such as respirators, CPAP, artificial heart-lung machines, anesthetic machines, and exhalation analysis. We provide reliable and proven solutions.

Digital Differential Pressure Sensor 'SDP31'

Reflow soldering compatible! Suitable for applications requiring mass production and cost-effectiveness, such as medical and semiconductor use.

The "SDP31" is a micro differential pressure sensor that is among the smallest in the world. With dimensions of 5x8x5mm, this world-class small size expands the possibilities for new applications. The sensor is based on a CMOSens sensor chip and is at the core of our new platform for measuring differential pressure and flow. 【Specifications (partial)】 ■ Pressure range: 500 - 500Pa ■ Accuracy: 3% m.v. ■ Zero point accuracy: 0.1Pa *For more details, please download the PDF or feel free to contact us.

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Digital Differential Pressure Sensor 'SDP32'

It is the core of our new platform for measuring differential pressure and flow rate!

The "SDP32" is a digital differential pressure sensor that supports reflow soldering and offers extended features such as multiple I2C bus address assignments, interrupt functionality, and high-speed sampling times. Like all our differential pressure sensors, it is characterized by excellent accuracy and long-term stability. Utilizing all these features, it is well-suited for applications where miniaturization is essential, and mass production and cost-effectiveness are required. Additionally, the digitalized differential pressure sensor comes with complete calibration and temperature compensation, and multiple versions are available. 【Specifications (partial)】 ■ Pressure range: 125 - 125Pa ■ Accuracy: 3% m.v. ■ Zero point accuracy: 0.08Pa *For more details, please download the PDF or feel free to contact us.

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Digital Differential Pressure Sensor 'SDP33'

The differential pressure sensor with complete calibration and temperature compensation is available in multiple versions!

The "SDP33" is a digital differential pressure sensor with dimensions of 5x8x5mm, which expands the possibilities for new applications due to its world-class small size. It supports reflow soldering and offers extended features such as multiple I2C bus address assignments, interrupt functions, and high-speed sampling times. The sensor is based on the CMOSens sensor chip and serves as the core of our new platform for measuring differential pressure and flow. 【Specifications (partial)】 ■ Pressure range: 1500 - 1500Pa ■ Accuracy: 3% m.v. ■ Zero point accuracy: 0.2Pa *For more details, please download the PDF or feel free to contact us.

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Analog Differential Pressure Sensor 'SDP36'

It expands the possibilities for new applications with the world's smallest class size!

The "SDP36" is an analog differential pressure sensor that measures 500Pa bidirectionally. It supports reflow soldering and offers extended features such as multiple I2C bus address assignments, interrupt functions, and high-speed sampling times. Like all of our differential pressure sensors, it boasts excellent accuracy and long-term stability. Leveraging all these features, it is well-suited for applications where miniaturization is essential, and mass production and cost-effectiveness are required. 【Specifications (partial)】 ■ Pressure range: 500 - 500Pa ■ Accuracy: 3% m.v. ■ Zero point accuracy: 0.1Pa *For more details, please download the PDF or feel free to contact us.

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Analog Differential Pressure Sensor 'SDP37'

Provides extended features such as multiple assignments of I2C bus addresses, interrupt functionality, and high-speed sampling times!

The "SDP37" is an analog differential pressure sensor that measures bidirectionally at 125 Pa. With dimensions of 5x8x5 mm, its world-class small size expands the possibilities for new applications. Additionally, the sensor is based on the CMOSens sensor chip and serves as the core of our new platform for measuring differential pressure and flow. It is well-suited for applications where miniaturization is essential, and mass production and cost-effectiveness are required. 【Specifications (partial)】 ■ Pressure range: 125 - 125 Pa ■ Accuracy: 3% m.v. ■ Zero point accuracy: 0.08 Pa *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor "SFM3304-D"

The successor to the SFM3300-D! It is robust, offers high cost performance, and can be easily connected to breathing tubes for medical use.

The "SFM3304-D" is a disposable proximal gas flow sensor, individually packaged and designed for use near patients. It accurately monitors both inspiratory and expiratory flow rates up to a maximum of ±250 slm through bidirectional measurement. Additionally, it is equipped with a built-in heater to prevent condensation, allowing it to function even in very high humidity conditions. 【Features】 ■ Accurately monitors both inspiratory and expiratory flow rates up to a maximum of ±250 slm ■ Equipped with a built-in heater to prevent condensation ■ Robust ■ High cost performance ■ Easily connects to breathing tubes *For more details, please download the PDF or feel free to contact us.

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Gas Flow Sensor "SFM3400-D"

It can measure up to 33 slm in both directions and is fully calibrated for air, nitrogen, and oxygen gases!

The "SFM3400-D" is a flow meter designed for use in respiratory medical devices such as ventilators and anesthetic machines, specifically for infants and children. Its special flow channel design achieves a small dead space of less than 1ml. Additionally, it features a standard medical cone for air pressure connection to the respiratory cycle and a structure that allows for easy electrical connections. 【Features】 ■ Excellent measurement accuracy ■ High-speed signal processing time ■ Robustness ■ Small dead space of less than 1ml ■ Air pressure connection to the respiratory cycle *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor 'SFM3003-300-CET'

Output with an easy-to-integrate digital I2C interface! The signal is linearized internally and temperature compensated.

The "SFM3003-300-CET" is a high-flow flow meter designed for measuring inhalation flow rates in medical ventilators. It measures the flow of air, oxygen, and gases mixed with these at flow rates ranging from 30 to 300 slm with excellent accuracy, reliability, and long-term stability, with no need for recalibration. Additionally, it has very low pressure loss, an ultra-fast response time, and an excellent signal-to-noise ratio. 【Features】 ■ Output with an easy-to-integrate digital I2C interface ■ Signals are linearized internally and temperature compensated ■ Very low pressure loss ■ Ultra-fast response time ■ Excellent signal-to-noise ratio *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor "SFM3003-300-CE"

Introduction of a multi-purpose low-pressure loss sensor for measuring inhalation flow rate for medical ventilators!

The "SFM3003-300-CE" is a flow meter capable of measuring the flow of air, oxygen, and gases mixed with these at flow rates ranging from -30 to 300 slm with excellent accuracy, reliability, and long-term stability. It features a digital I2C interface for easy integration, with no need for recalibration. The signal is linearized internally and temperature compensated. Additionally, it has very low pressure loss, ultra-fast response time, and an excellent S/N ratio. Please feel free to contact us for inquiries. 【Specifications (partial)】 ■ Full scale flow: -150 - 300 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor "SFM3003-300-CL"

Multi-purpose low pressure loss digital flow sensor! Wider flow range and enhanced specifications.

The "SFM3003-300-CL" is a high-flow flow meter designed for measuring inhalation flow rates in medical ventilators. It can measure the flow of air, oxygen, and mixtures of these gases in the range of -30 to 300 slm with excellent accuracy, reliability, and long-term stability. Additionally, it outputs through an easy-to-integrate digital I2C interface, with the signal being linearized and temperature compensated internally. 【Specifications (partial)】 ■ Full-scale flow rate: -30 - 300 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor "SFM3119"

Supports digital I2C output and enhanced specifications! Achieves a very stable and accurate system.

The SFM3119 is a compact digital flow meter. It measures the flow of air and oxygen from -10 to 240 slm with high accuracy and speed, and can be easily integrated into existing equipment. Additionally, it is particularly suitable for detecting inhalation flow rates in applications such as ventilators and anesthesia, as well as for accurately mixing oxygen and air. 【Specifications (partial)】 ■ Full-scale flow: -10 - 240 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: O-ring *For more details, please download the PDF or feel free to contact us.

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Liquid Flow Sensor 'LD20-2600B'

More effective drug therapy! Low flow of up to 16.6 ml/min in disposable sensor design.

The "LD20-2600B" is a liquid flow sensor that optimizes costs while minimizing the size of the flow sensor, making fluid, electrical, and mechanical connections easier. With a standard lure lock fitting, it can be safely and easily implemented into fluid lines such as catheters and infusion sets. The inert wetted materials provide excellent chemical resistance and compatibility with various media. By using this product, the delivery of medications can be measured accurately and in real-time. As a result, monitoring and control become easier, making drug therapy more effective. 【Specifications (partial)】 ■ Full-scale flow rate (H2O): 16.6 ml/min ■ Accuracy (H2O): 5% ■ Repeatability (H2O): 0.5% ■ Maximum operating pressure: 3 bar ■ Fluid connector port: Barb fitting *For more details, please download the PDF or feel free to contact us.

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Liquid Flow Sensor 'LD20-0600L'

Ultra-low flow rate of up to 333µl/min in disposable sensor design!

The "LD20-0600L" is a liquid flow sensor that measures the flow rate of liquids directly and at necessary points to enhance patient treatment effectiveness and safety. It combines our proven liquid flow sensing technology with an optimized design for disposable applications, suitable for mass production in the medical, life sciences, and food industries. It enables bidirectional flow measurement from 1200 ml/h down to single-digit ml/h, while reliably detecting abnormal modes such as occlusion, free flow, and bubbles with speed and sensitivity. 【Specifications (partial)】 ■ Full-scale flow rate (H2O): 333 ul/min ■ Accuracy (H2O): 5% ■ Repeatability (H2O): 0.5% ■ Maximum operating pressure: 3 bar ■ Fluid connector port: Luer lock fitting *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor "SFM4300-20-B"

Operates up to a maximum pressure of 6 bar! Stores multiple gas calibrations and can perform self-tests during use.

The "SFM4300-20-B" is a mass flow meter that can be used for mixed gases, fuel cells, and other OEM applications in both the medical and industrial fields. The compact sensor is calibrated for gases such as air, O2, CO2, and N2O, and can also be used for monitoring mixed gases. Additionally, it can adjust the concentration of a wide variety of mixed gases with high precision, store multiple gas calibrations, and perform self-tests during operation. 【Specifications (partial)】 ■ Full-scale flow rate: 0 - 20 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, N2O, CO2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor 'SFM4300-20-P'

Pressure-resistant multi-gas flow sensor! The sensor unit is equipped with an I2C interface.

The "SFM4300-20-P" is a mass flow meter with a full-scale flow rate of 0 to 20 slm and a standard accuracy of ±2% m.v. The sensor unit is equipped with an I2C interface, generating a fully calibrated temperature-compensated output signal. It can also be used for mixed gases in both medical industry fields, fuel cells, and other OEM applications. 【Specifications (partial)】 ■ Full-scale flow rate: 0 - 20 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, N2O and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: Legris push-in (8 mm) *For more details, please download the PDF or feel free to contact us.

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Gas Flow Sensor 'SFM4300-20-O'

Pressure-resistant flow sensor with O-ring fittings! Suitable for considerations of safety and reliability.

The "SFM4300-20-O" is a mass flow meter calibrated for small sensors to measure gases such as air, O2, CO2, and N2O. It can also be used to monitor mixed gases, featuring a zero point precision of 0.005 slm across a full range of up to 50 slm. Additionally, the sensor operates at a maximum pressure of 6 bar, can store multiple gas calibrations, and can perform self-tests during use. 【Specifications (partial)】 ■ Full scale flow rate: 0 - 20 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, N2O and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: O-ring *For more details, please download the PDF or feel free to contact us.

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Gas Flow Sensor 'SFM4300-50-B'

Air and O2, 50 slm base mount! Also usable for monitoring mixed gases.

The "SFM4300-50-B" is a mass flow meter capable of adjusting the concentration of a wide variety of mixed gases with high precision. It features excellent sensitivity and accuracy even at low flow rates, and the sensor unit is equipped with an I2C interface. Additionally, it generates fully calibrated temperature-compensated output signals, making it suitable for mixed gases in both the medical industry and fuel cells, as well as other OEM applications. 【Specifications (partial)】 ■ Full scale flow: 0 - 50 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor 'SFM4300-50-P'

Push-in type mounting device! Generates a temperature-compensated output signal that is fully calibrated.

The "SFM4300-50-P" is a mass flow meter that can also be used to monitor mixed gases. This product can be used in both the medical and industrial sectors for mixed gases, fuel cells, and other OEM applications. Additionally, it operates at a maximum pressure of 6 bar, can store multiple gas calibrations, and can perform self-tests during use. 【Specifications (partial)】 ■ Full-scale flow rate: 0 - 50 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: Legris push-in (8 mm) *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor 'SFM4300-50-O'

Can also be used for monitoring mixed gases! Capable of adjusting the concentration of a wide variety of mixed gases with high precision.

The "SFM4300-50-O" is a mass flow meter that offers excellent sensitivity and accuracy even at low flow rates. The compact sensor is calibrated for gases such as air, O2, and N2O, and can also be used for monitoring mixed gases. Additionally, the sensor unit is equipped with an I2C interface, generating fully calibrated temperature-compensated output signals. 【Specifications (partial)】 ■ Full scale flow rate: 0 - 50 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: O-ring *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor 'SFM6000D-5slm'

Suitable for applications in semiconductors, analytical instruments, medical devices, and industrial automation!

The "SFM6000D-5slm" is a valve-less sibling product of the SFC6000 mass flow controller, providing excellent performance at a lower price as a gas flow sensor. Based on the principle of thermal mass measurement and utilizing proven CMOSens MEMS technology, Sensirion offers mass flow controllers with class-leading performance and response speed. Unlike most other devices available on the market, this one does not drift and does not require service recalibration. 【Specifications (partial)】 ■ Full-scale flow rate: 5slm ■ Full-scale flow rate: 5000sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, N2, O2, N2O, Ar, and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor 'SFM6000D-20slm'

Excellent price-performance ratio, distribution, 20 slm! No drifting, and no need for service readjustment.

The "SFM6000D-20slm" is a valve-less sister product of the SFC6000 mass flow controller, providing excellent performance at a lower price as a gas flow sensor. The SFC6000 is very small and lightweight, optimizing the size and weight of devices. This is a decisive advantage, especially for portable devices. Furthermore, it exhibits excellent performance in terms of reproducibility, accuracy, control range, and speed. The SFC6000 has advanced integration and uses a very small number of electronic components, making the supply chain robust. 【Specifications (partial)】 ■ Full-scale flow: 20slm ■ Full-scale flow: 20000sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, N2, O2, N2O, Ar, and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.

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Gas flow sensor 'SFM6000D-50slm'

For analytical instruments such as gas chromatography and bioreactors, as well as industrial automation applications!

The "SFM6000D-20slm" is a valve-less sister product of the SFC6000 mass flow controller, providing excellent performance at a lower price as a gas flow sensor. The SFC6000 is very small and lightweight, optimizing the size and weight of devices, which is a decisive advantage, especially for portable devices. Based on the principle of thermal mass measurement and utilizing proven CMOSens MEMS technology, Sensirion offers mass flow controllers with class-leading performance and response speed. 【Specifications (partial)】 ■ Full-scale flow rate: 50 slm ■ Full-scale flow rate: 50000 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, N2, and O2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-50sccm'

Combined multiple gas calibrations and interchangeable fittings! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-50sccm" is a mass flow controller based on micro-thermal measurement principles. It utilizes proven CMOSens MEMS technology, ensuring no drift and eliminating the need for recalibration in the market. Additionally, its wide range of flow control capabilities allows a single product to accommodate multiple flow ranges. 【Specifications (partial)】 ■ Full-scale flow: 0.05slm ■ Full-scale flow: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-2slm"

Utilizing CMOSens MEMS technology! Available as standard products suitable for a wide range of applications.

The "SFC5500-2slm" is a mass flow controller that does not drift and does not require recalibration in the market. It combines multiple gas calibrations and interchangeable fittings, making it available as a standard product suitable for a wide range of applications. Additionally, it is suitable for a variety of environments in medical, analytical, and industrial settings, and you can choose from standard pre-set variations. 【Specifications (partial)】 ■ Full-scale flow: 2 slm ■ Full-scale flow: 2000 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 8 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-0.5slm'

A culmination of our 20 years of achievements in the precise control of gas flow!

The "SFC5500-0.5slm" is a mass flow controller that combines multiple gas calibrations and interchangeable fittings. This product is based on the microthermal measurement principle and utilizes our proven CMOSens MEMS technology. Additionally, unlike other products on the market, it does not drift and does not require recalibration in the market. 【Specifications (partial)】 ■ Full scale flow rate: 0.5slm ■ Full scale flow rate: 500sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller 'SFC5500-10slm'

Full-scale flow rate is 10 slm! A series that combines multiple gas calibrations and interchangeable fittings.

The "SFC5500-10slm" is a mass flow controller available as a standard product suitable for a wide range of applications. This product boasts superior performance equivalent to the "SFC5400," making it ideal for various applications in medical, analytical, and industrial environments. Additionally, a single unit can accommodate multiple flow ranges of conventional mass flow controllers. 【Specifications (partial)】 ■ Full-scale flow: 10slm ■ Full-scale flow: 10000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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Mass Flow Controller "SFC5500-200slm"

Utilizing CMOSens MEMS technology! Suitable for a wide range of applications in medical, analytical, and industrial environments.

The "SFC5500-200slm" is a mass flow controller that can accommodate multiple flow ranges in a single product. It can be obtained as a standard product suitable for a wide range of applications by combining multiple gas calibrations and interchangeable fittings. Additionally, it does not drift and does not require recalibration in the market. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow: 200slm ■ Full-scale flow: 200000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5bar ■ Calibration: Air, O2, and N2 flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

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