センシリオン List of Products and Services

The "SLQ-QT500" is an excellent liquid flow sensor capable of measuring a flow rate range of up to 120ml/min for liquids based on water or hydrocarbons (alcohols, solvents, oils, fuels, adhesives), and is particularly effective for measuring liquids containing particles or high-viscosity liquids. It can be easily integrated into demanding coating systems in the semiconductor industry and various dispensing and liquid flow systems in other industries when combined with one of the SCC1 sensor cables. The high sensitivity and measurement speed of this product provide new added value for monitoring and controlling high-speed dispense processes. 【Specifications (partial)】 ■ Full-scale flow rate (H2O): 120ml/min ■ Accuracy (H2O): 5% ■ Repeatability (H2O): 0.5% ■ Full-scale flow rate (IPA): 120ml/min ■ Accuracy (IPA): 5% *For more details, please download the PDF or feel free to contact us.

The SFC6000D-5slm is a highly attractive mass flow controller with an excellent price-performance ratio and a delivery time of 8 weeks. Its small and lightweight design allows for optimization of device size and weight, providing a decisive advantage, especially for portable devices. Furthermore, it demonstrates outstanding performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, allowing for optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Very few electronic components used, resulting in a robust supply chain *For more details, please download the PDF or feel free to contact us.

The "SFC6000D-20slm" is a mass flow controller that is very small and lightweight, allowing for optimization of the device's size and weight. Due to advanced integration and a very low number of electronic components used, the supply chain is robust. Furthermore, it demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, enabling optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Robust supply chain due to the very low number of electronic components used *For more details, please download the PDF or feel free to contact us.

The "SFM6000D-5slm" is a valve-less sibling product of the SFC6000 mass flow controller, providing excellent performance at a lower price as a gas flow sensor. Based on the principle of thermal mass measurement and utilizing proven CMOSens MEMS technology, Sensirion offers mass flow controllers with class-leading performance and response speed. Unlike most other devices available on the market, this one does not drift and does not require service recalibration. 【Specifications (partial)】 ■ Full-scale flow rate: 5slm ■ Full-scale flow rate: 5000sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, N2, O2, N2O, Ar, and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.

The "SFC5500-50sccm" is a mass flow controller based on micro-thermal measurement principles. It utilizes proven CMOSens MEMS technology, ensuring no drift and eliminating the need for recalibration in the market. Additionally, its wide range of flow control capabilities allows a single product to accommodate multiple flow ranges. 【Specifications (partial)】 ■ Full-scale flow: 0.05slm ■ Full-scale flow: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

The "SFC5400" is a versatile mass flow controller that can connect to various interfaces and fluid connections. It can measure a maximum flow rate from 50 sccm to 200 slm, and the sensor signal is calibrated on the chip and directly converted into a temperature-compensated digital signal. Additionally, it can store multiple gas calibration data in one device, allowing you to check whether the operating gas calibration value matches the actual gas being measured. 【Specifications (partial)】 ■ Full-scale flow rates: 1, 2, 5, 10, 20, 50, and 100 slm ■ Full-scale flow rates: 50, 100, 200, and 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.