センシリオン List of Products and Services

The "SFM6000D-5slm" is a valve-less sibling product of the SFC6000 mass flow controller, providing excellent performance at a lower price as a gas flow sensor. Based on the principle of thermal mass measurement and utilizing proven CMOSens MEMS technology, Sensirion offers mass flow controllers with class-leading performance and response speed. Unlike most other devices available on the market, this one does not drift and does not require service recalibration. 【Specifications (partial)】 ■ Full-scale flow rate: 5slm ■ Full-scale flow rate: 5000sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, N2, O2, N2O, Ar, and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.

The "SFM6000D-20slm" is a valve-less sister product of the SFC6000 mass flow controller, providing excellent performance at a lower price as a gas flow sensor. The SFC6000 is very small and lightweight, optimizing the size and weight of devices. This is a decisive advantage, especially for portable devices. Furthermore, it exhibits excellent performance in terms of reproducibility, accuracy, control range, and speed. The SFC6000 has advanced integration and uses a very small number of electronic components, making the supply chain robust. 【Specifications (partial)】 ■ Full-scale flow: 20slm ■ Full-scale flow: 20000sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, N2, O2, N2O, Ar, and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.

The "SFM6000D-20slm" is a valve-less sister product of the SFC6000 mass flow controller, providing excellent performance at a lower price as a gas flow sensor. The SFC6000 is very small and lightweight, optimizing the size and weight of devices, which is a decisive advantage, especially for portable devices. Based on the principle of thermal mass measurement and utilizing proven CMOSens MEMS technology, Sensirion offers mass flow controllers with class-leading performance and response speed. 【Specifications (partial)】 ■ Full-scale flow rate: 50 slm ■ Full-scale flow rate: 50000 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, N2, and O2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.

The "SFM5300" is a high-performance mass flow meter that utilizes CMOSens technology, which integrates the sensor element and signal processing circuit onto a single CMOS chip. Combined with high-quality materials, it results in stable durability and high-speed, high-precision products. This product is a version of the mass flow controller "SFC5300" without a valve, and the "SFC5300" has the same performance characteristics as the mass flow meter, making it suitable for similar applications. These two products are an ideal combination. 【Specifications (partial)】 ■ Full-scale flow rates: 0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50, and 100 slm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector port: Down mount *For more details, please download the PDF or feel free to contact us.

The "SFM5400" is a mass flow meter that features high precision (error < 1%), long-term stability, and high repeatability, as well as a wide dynamic range. It is made of a metallic body and supports various fittings and interfaces, capable of measuring from 50 sccm to 200 slm. Additionally, it utilizes CMOSens technology, which integrates the sensor element and signal processing circuit onto a single CMOS chip. Combined with high-quality materials, this results in a stable durability and a fast, high-precision mass flow meter. 【Specifications (partial)】 ■ Full-scale flow rate: 0.05, 0.1, 0.2, 0.5, 1, 2, 5, 10, 20, 50, and 100 slm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.

The "SFM5500-50sccm" is a mass flow meter that features a metal body, enabling high pressure resistance. The full-scale flow rate is 0.05slm/50sccm. The accuracy is 0.2% FS or 2% SP. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow rate: 0.05slm ■ Full-scale flow rate: 50sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

The "SFM5500-0.5slm" is a mass flow meter that does not drift and does not require recalibration during operation. It can accommodate multiple flow ranges of a typical mass flow meter with a single device, and its metal body allows for higher pressure resistance. Additionally, the full-scale flow rate is 0.5 slm / 500 sccm. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow rate: 0.5 slm ■ Full-scale flow rate: 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

The "SFM5500-2slm" is a high-pressure mass flow meter for multiple gases with a full-scale flow rate of 2 slm. Thanks to the very wide measurement range achieved by the CMOSens MEMS flow sensor, one device can accommodate multiple flow ranges of a typical mass flow meter. Additionally, the use of a metal body allows for even greater pressure resistance. Please feel free to contact us when you need assistance. 【Specifications (partial)】 ■ Full-scale flow rate: 2 slm ■ Full-scale flow rate: 2000 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

The "SFM5500-10slm" is a mass flow meter based on the micro calorimetry measurement principle, utilizing Sensirion's proven CMOSens MEMS technology. This product does not drift and does not require recalibration during operation. Additionally, it combines multi-gas calibration with interchangeable fittings, making it suitable for applications in the medical, analytical, and industrial sectors. 【Specifications (partial)】 ■ Full-scale flow: 10slm ■ Full-scale flow: 10000sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 10bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, and N2O flow ■ Fluid connector port: Legris *For more details, please download the PDF or feel free to contact us.

The "SFM4300-50-O" is a mass flow meter that offers excellent sensitivity and accuracy even at low flow rates. The compact sensor is calibrated for gases such as air, O2, and N2O, and can also be used for monitoring mixed gases. Additionally, the sensor unit is equipped with an I2C interface, generating fully calibrated temperature-compensated output signals. 【Specifications (partial)】 ■ Full scale flow rate: 0 - 50 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: O-ring *For more details, please download the PDF or feel free to contact us.

The "SFM4300-50-P" is a mass flow meter that can also be used to monitor mixed gases. This product can be used in both the medical and industrial sectors for mixed gases, fuel cells, and other OEM applications. Additionally, it operates at a maximum pressure of 6 bar, can store multiple gas calibrations, and can perform self-tests during use. 【Specifications (partial)】 ■ Full-scale flow rate: 0 - 50 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: Legris push-in (8 mm) *For more details, please download the PDF or feel free to contact us.

The "SFM4300-50-B" is a mass flow meter capable of adjusting the concentration of a wide variety of mixed gases with high precision. It features excellent sensitivity and accuracy even at low flow rates, and the sensor unit is equipped with an I2C interface. Additionally, it generates fully calibrated temperature-compensated output signals, making it suitable for mixed gases in both the medical industry and fuel cells, as well as other OEM applications. 【Specifications (partial)】 ■ Full scale flow: 0 - 50 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

The "SFM4300-20-O" is a mass flow meter calibrated for small sensors to measure gases such as air, O2, CO2, and N2O. It can also be used to monitor mixed gases, featuring a zero point precision of 0.005 slm across a full range of up to 50 slm. Additionally, the sensor operates at a maximum pressure of 6 bar, can store multiple gas calibrations, and can perform self-tests during use. 【Specifications (partial)】 ■ Full scale flow rate: 0 - 20 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, N2O and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: O-ring *For more details, please download the PDF or feel free to contact us.

The "SFM4300-20-P" is a mass flow meter with a full-scale flow rate of 0 to 20 slm and a standard accuracy of ±2% m.v. The sensor unit is equipped with an I2C interface, generating a fully calibrated temperature-compensated output signal. It can also be used for mixed gases in both medical industry fields, fuel cells, and other OEM applications. 【Specifications (partial)】 ■ Full-scale flow rate: 0 - 20 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, N2O and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: Legris push-in (8 mm) *For more details, please download the PDF or feel free to contact us.

The "SFM4300-20-B" is a mass flow meter that can be used for mixed gases, fuel cells, and other OEM applications in both the medical and industrial fields. The compact sensor is calibrated for gases such as air, O2, CO2, and N2O, and can also be used for monitoring mixed gases. Additionally, it can adjust the concentration of a wide variety of mixed gases with high precision, store multiple gas calibrations, and perform self-tests during operation. 【Specifications (partial)】 ■ Full-scale flow rate: 0 - 20 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, N2O, CO2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 7 bar ■ Fluid connector port: Downmount *For more details, please download the PDF or feel free to contact us.

The "SFM3200" is a mass flow meter characterized by a wide dynamic range of 250 slm and high accuracy, especially at low flow rates. Thanks to the special mechanism design of the flow channel, the pressure loss in the sensor section is very low, making it suitable for ventilators and other respiratory-related applications. Additionally, the thermal sensor element performs linearization of the output signal and temperature compensation internally, enabling fast signal processing times and bidirectional measurement. 【Specifications (partial)】 ■ Full-scale flow rate: -100 - 250 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air and O2 ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.07 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

The SFM3119 is a compact digital flow meter. It measures the flow of air and oxygen from -10 to 240 slm with high accuracy and speed, and can be easily integrated into existing equipment. Additionally, it is particularly suitable for detecting inhalation flow rates in applications such as ventilators and anesthesia, as well as for accurately mixing oxygen and air. 【Specifications (partial)】 ■ Full-scale flow: -10 - 240 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: O-ring *For more details, please download the PDF or feel free to contact us.

The "SFM3100" is a compact and easily implementable analog mass flow meter. A temperature sensor is installed in the gas flow path, achieving high-precision temperature compensation, eliminating the need for an additional temperature sensor. Moreover, it can measure flow rates ranging from -24 slm to +240 slm, and since it can also detect negative flow, it can reliably identify errors and backflow. 【Specifications (partial)】 ■ Full-scale flow rate: -24 - 240 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air and O2 ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.07 bar ■ Fluid connector port: O-ring *For more details, please download the PDF or feel free to contact us.

The "SFM3020" is a mass flow meter suitable for high flow rate measurements. It features a flow path design that results in low pressure loss, making it suitable for medical respirators, and can measure air and oxygen flow rates from -10 slm to 160 slm with excellent accuracy and very high speed. Additionally, the gas is measured using a thermal sensor element that has a wide measurement dynamic range compared to other flow measurement technologies and offers high long-term stability. 【Specifications (partial)】 ■ Full scale flow rate: -10 - 160 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air and O2 ■ Sensor output: Flow ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

The SFM3019 is a mass-produced digital flow meter capable of measuring air and oxygen flow rates from -10 slm to 240 slm with excellent accuracy and speed. Due to its flow path design, which allows for very low pressure loss through the sensor element, it is highly suitable for use in ventilators. Additionally, the 16-bit digital signal is output at a frequency of 2 kHz, and this signal is linearized and temperature compensated internally. 【Specifications (partial)】 ■ Full-scale flow rate: -10 - 240 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

We would like to introduce the gas flow sensor we handle, the 'SFM3013-300-CLM'. The full-scale flow rate is -30 to 300 slm, with a standard accuracy of ±2% m.v. Calibration is done with Air, O2, HeOx, and mixtures thereof. Additionally, the sensor output is Flow and T, and the maximum operating pressure is 1.3 bar. Please feel free to contact us if you have any inquiries. 【Specifications (partial)】 ■ Full-scale flow rate: -30 - 300 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O₂, HeOx, and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

We would like to introduce the gas flow sensor 'SFM3013-300-CL' that we handle. The sensor output is Flow and T, with a maximum operating pressure of 1.3 bar and a full-scale flow range of -30 to 300 slm. Additionally, the standard accuracy is ±2% m.v., and the calibration is for Air, O2, and mixtures thereof. 【Specifications (partial)】 ■ Full-scale flow: -30 - 300 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

The "SFM3003-300-CL" is a high-flow flow meter designed for measuring inhalation flow rates in medical ventilators. It can measure the flow of air, oxygen, and mixtures of these gases in the range of -30 to 300 slm with excellent accuracy, reliability, and long-term stability. Additionally, it outputs through an easy-to-integrate digital I2C interface, with the signal being linearized and temperature compensated internally. 【Specifications (partial)】 ■ Full-scale flow rate: -30 - 300 slm ■ Standard accuracy: ±2% m.v. ■ Calibration: Air, O2, and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

The "SFM3003-300-CE" is a flow meter capable of measuring the flow of air, oxygen, and gases mixed with these at flow rates ranging from -30 to 300 slm with excellent accuracy, reliability, and long-term stability. It features a digital I2C interface for easy integration, with no need for recalibration. The signal is linearized internally and temperature compensated. Additionally, it has very low pressure loss, ultra-fast response time, and an excellent S/N ratio. Please feel free to contact us for inquiries. 【Specifications (partial)】 ■ Full scale flow: -150 - 300 slm ■ Standard accuracy: ±2.5% m.v. ■ Calibration: Air, O2 and mixtures thereof ■ Sensor output: Flow and T ■ Maximum operating pressure: 1.3 bar ■ Fluid connector port: Medical cone (22 mm) *For more details, please download the PDF or feel free to contact us.

The "SFM3003-300-CET" is a high-flow flow meter designed for measuring inhalation flow rates in medical ventilators. It measures the flow of air, oxygen, and gases mixed with these at flow rates ranging from 30 to 300 slm with excellent accuracy, reliability, and long-term stability, with no need for recalibration. Additionally, it has very low pressure loss, an ultra-fast response time, and an excellent signal-to-noise ratio. 【Features】 ■ Output with an easy-to-integrate digital I2C interface ■ Signals are linearized internally and temperature compensated ■ Very low pressure loss ■ Ultra-fast response time ■ Excellent signal-to-noise ratio *For more details, please download the PDF or feel free to contact us.

The "SFM3300-AW" is a disposable mass flow meter that excels in long-term stability and outputs fast and accurate signals. This sensor can measure flow rates of up to 250 slm bidirectionally, making it suitable for measuring flow at the mouth in applications such as ventilators and other respiratory-related uses. Additionally, due to the special design of the flow channel mechanism, it achieves a small dead space, and the slightly increased pressure loss reduces dependence on various inlet conditions during mouth measurements. 【Features】 ■ Excellent long-term stability with fast and accurate signal output ■ Achieves a small dead space ■ Capable of measuring flow rates of up to 250 slm bidirectionally *For more details, please download the PDF or feel free to contact us.

The "SFM3400-D" is a flow meter designed for use in respiratory medical devices such as ventilators and anesthetic machines, specifically for infants and children. Its special flow channel design achieves a small dead space of less than 1ml. Additionally, it features a standard medical cone for air pressure connection to the respiratory cycle and a structure that allows for easy electrical connections. 【Features】 ■ Excellent measurement accuracy ■ High-speed signal processing time ■ Robustness ■ Small dead space of less than 1ml ■ Air pressure connection to the respiratory cycle *For more details, please download the PDF or feel free to contact us.

The "SFM3304-D" is a disposable proximal gas flow sensor, individually packaged and designed for use near patients. It accurately monitors both inspiratory and expiratory flow rates up to a maximum of ±250 slm through bidirectional measurement. Additionally, it is equipped with a built-in heater to prevent condensation, allowing it to function even in very high humidity conditions. 【Features】 ■ Accurately monitors both inspiratory and expiratory flow rates up to a maximum of ±250 slm ■ Equipped with a built-in heater to prevent condensation ■ Robust ■ High cost performance ■ Easily connects to breathing tubes *For more details, please download the PDF or feel free to contact us.

The "SFM3200-AW" is a mass flow meter characterized by a wide dynamic range of 250 slm and high accuracy, especially at low flow rates. Thanks to the special mechanical design of the flow channel, the pressure loss in the sensor section is very low, making it suitable for ventilators and other respiratory-related applications. Additionally, the thermal sensor element performs linearization of the output signal and temperature compensation internally, enabling fast signal processing times and bidirectional measurement. 【Features】 ■ Wide dynamic range of 250 slm ■ High accuracy, especially at low flow rates ■ Special mechanical design of the flow channel ■ Very low pressure loss in the sensor section ■ Reusable *For more details, please download the PDF or feel free to contact us.

The "SFM3300-AW" is a mass flow meter that can withstand pressurized steam sterilization (AUTOCLAVE) treatment, allowing for sterilization and cleaning for reuse. This sensor can measure flow rates of up to 250 slm bidirectionally, making it suitable for measuring flow at the mouth in applications such as ventilators and other respiratory-related uses. Additionally, due to the special design of the flow channel, it achieves a small dead space, and the slightly increased pressure loss reduces dependence on various inlet conditions during mouth measurement. 【Features】 ■ Can withstand pressurized steam sterilization (AUTOCLAVE) treatment ■ Reusable after pressurized steam sterilization and cleaning ■ Capable of measuring flow rates of up to 250 slm bidirectionally *For more details, please download the PDF or feel free to contact us.

The "SFM3400-AW" is a flow meter designed for use with respiratory medical devices such as ventilators and anesthetic machines, specifically for premature infants and children. It features a standard medical cone for air pressure connection to the respiratory cycle and a structure that allows for easy electrical connection. Additionally, it can measure up to 33 slm in both directions and has been fully calibrated for air, nitrogen, and oxygen gases. 【Features】 ■ Excellent measurement accuracy ■ High-speed signal processing time ■ Robustness ■ Capable of measuring up to 33 slm in both directions ■ Reusable *For more details, please download the PDF or feel free to contact us.

We would like to introduce the 'SEK-SFM3200' handled by Sensirion AG. It is a gas flow sensor evaluation kit characterized by excellent low power performance and low pressure loss. Additionally, the flow range is up to 250 slm (bidirectional). 【Included Items】 ■SFM3200×1 ■Connector cable×1 *For more details, please download the PDF or feel free to contact us.

We would like to introduce the 'SEK-SFM3119' handled by Sensirion AG. It is a gas flow sensor with low pressure loss and a compact design, along with an evaluation kit. It is a versatile digital flow meter. 【Included Items】 ■SFM3119×1 ■Connector cable×1 *For more details, please download the PDF or feel free to contact us.

We would like to introduce the gas flow sensor evaluation kit 'SEK-SFM3019' handled by Sensirion AG. The SEK-SensorBridge is required separately. It is suitable for air, oxygen, and ventilators. Please feel free to contact us when you need assistance. 【Included Items】 ■ SFM3019 × 1 ■ Connector cable × 1 *For more details, please download the PDF or feel free to contact us.

We would like to introduce the 'SEK-SFM3003' handled by Sensirion AG. It is a versatile digital flow meter designed for mass production and cost-effective gas flow sensor evaluation kits. Additionally, it features a wider flow range and improved specifications. 【Included Items】 ■SFM3003×1 ■Connector cable×1 *For more details, please download the PDF or feel free to contact us.

We would like to introduce the 'SEK-SFM3013' handled by Sensirion AG. This is a gas flow sensor evaluation kit focused on mass production and cost efficiency, offering a wider flow range and improved specifications. It is a versatile digital flow meter. [Included items] ■ SFM3013 x 1 ■ Connector cable x 1 *For more details, please download the PDF or feel free to contact us.

We would like to introduce the 'SEK-SFM3000' handled by Sensirion AG. It is a gas flow sensor evaluation kit with low pressure loss and bidirectional measurement. A versatile digital flow meter. [Included Items] ■ SFM3000 x 1 ■ Connector cable x 1 *For more details, please download the PDF or feel free to contact us.

We would like to introduce the 'SEK-SFM4300-20-P' handled by Sensirion AG. This is a gas flow sensor evaluation kit with a flow range of 0-20 slm / 0-50 slm, similar to the SFM4300-50-x. Additionally, it offers high precision and high sensitivity (especially for low flow rates). 【Included Items】 ■ SFM4300-20-P × 1 ■ Connector cable × 1 *For more details, please download the PDF or feel free to contact us.