クォークテクノロジー List of Products and Services

By forming a thin film on the surface of metals and polymer materials, it is possible to control the mechanical, thermal, chemical, and electrical properties of the material's surface. Various methods are employed for the film formation of thin films used in this surface modification, including vacuum deposition, PVD, and plasma CVD methods. It is expected that the exploration and development of new film formation methods will continue in the future. In this document, we present the results of our examination of the potential of a thin film manufacturing process using a "high-output xenon excimer lamp." [Contents] ■ Introduction ■ Film formation speed of the photochemical CVD method using a "high-output xenon excimer lamp" ■ Conclusion *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

A method for obtaining silica films through relatively low-temperature heat treatment has been reported, which involves firing ceramic precursor polymers such as perhydropolysilazane in the atmosphere or in water vapor at a temperature of around 450°C. This study aimed to utilize the strong oxidative action of active oxygen species to convert PHPS, which does not contain oxygen unlike TMOS and TEOS, into silica at low temperatures. To investigate the influence of oxygen concentration in the irradiation atmosphere during thin film formation and the necessity of bond cleavage due to photon energy, we examined the film quality when VUV light was irradiated on spin-coated films using PHPS solution under varying irradiation conditions. 【Contents】 ■ Introduction ■ Experiment ■ Results and Discussion ■ Conclusion *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

In the late 1980s, a powerful vacuum ultraviolet light source utilizing dielectric barrier discharge, known as the xenon excimer lamp, was developed. The light obtained from this source at a wavelength of 172 nm has a high energy of 7.2 eV, enabling efficient photodissociation of various molecular bonds. As a result, the lamp has been put to practical use in applications such as the precision optical cleaning of glass substrates used in liquid crystal display panels, among various other applications. In this study, we examined the physical and chemical changes on the surface of polyethylene, a general-purpose resin that has low printability and adhesion, when exposed to vacuum ultraviolet light. [Contents] ■ Introduction ■ Experiment ■ Results and Discussion ■ Conclusion *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

This document introduces the current status of "vacuum ultraviolet excimer lamps" and their industrial applications. Excimer refers to a dimer formed by one atom or molecule in an excited state and one atom or molecule in a ground state. "Vacuum ultraviolet excimer lamps" have features such as the ability to emit quasi-monochromatic light and short wavelengths not found in general lamps, as well as the capability for instant lighting and flashing. Additionally, vacuum ultraviolet light has a short wavelength and high photon energy, allowing it to break molecular bonds through non-thermal processes. [Contents] ■ What are vacuum ultraviolet excimer lamps? ■ Applications of vacuum ultraviolet excimer lamps *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

Polymers are lightweight and flexible, making them suitable for various applications. Recently, a surface modification technique using vacuum ultraviolet (VUV) light has gained attention. VUV light has a short wavelength and high photon energy, allowing it to break molecular bonds through a non-thermal process. Compared to typical physical surface treatments such as plasma treatment, it is low-cost, causes minimal damage to the surface, and can effectively modify the surface. In this study, we irradiated polymers with vacuum ultraviolet light and examined the physical and chemical changes on the surface resulting from the irradiation, as well as the differences in modification effects due to the ambient gas during irradiation. 【Contents】 ■Introduction ■Experiment ■Results and Discussion *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

To obtain a strong and dense film on plastics with low heat resistance, it is necessary to lower the temperature in the thin film formation process. The photon process using vacuum ultraviolet (VUV) light has an energy per photon that is greater than the bond energy of atoms in most materials. Furthermore, since it can cleave atomic bonds solely through the action of photons without accompanying thermal processes from irradiation, it is expected to contribute to the reduction of temperature in the thin film formation process. In this study, we compared the decomposition process and changes in crystal structure of TiO2, which is widely used in industry, when gel films were thermally treated and when a combination of VUV light irradiation from an excimer lamp and thermal treatment was applied. 【Contents】 ■ Introduction ■ Experimental Methods ■ Results and Discussion *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

Around the end of the 1980s, a high-brightness vacuum ultraviolet lamp utilizing excimer emission was developed. For example, an excimer lamp using xenon gas can produce vacuum ultraviolet light at a wavelength of 172 nm with a high light intensity of 100 W/m², and it is actively applied in processes such as photodecomposition cleaning of material surfaces and photomodification of surfaces. In this presentation, we examined the necessary technological elements for achieving a light intensity of 1-2 kW/m², which is 10 to 20 times brighter than conventional lamps. [Contents] - Principles of excimer lamps and research and development objectives - Discharge methods - Lamp shapes *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

The sol-gel method, which is a promising approach to obtaining coatings with uniform composition, typically requires heat treatment at several hundred degrees Celsius to remove moisture from the gel film and to decompose organic components. Therefore, it is challenging to obtain a strong film on plastics with low heat resistance. In this context, the vacuum ultraviolet (VUV) light-based photon process can be considered applicable for modifying thin films, as it can break atomic bonds solely through the action of photons without accompanying thermal processes from irradiation. This document introduces the changes in state when VUV light is irradiated onto nickel oxide thin films adjusted by the sol-gel method, using an excimer lamp developed as a practical light source. [Contents] ■ Introduction ■ Experiment ■ Results and Discussion *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

Vacuum ultraviolet (VUV) light, due to its short wavelength and high photon energy, can break molecular bonds through non-thermal processes, leading to advancements in applications such as cleaning, fine processing, and surface modification. In this document, after spin-coating a PVA aqueous solution onto a gold-coated substrate, a heat treatment was performed to create a film, which was then irradiated with a xenon excimer lamp (172 nm) under a nitrogen or dry air atmosphere. Using an infrared spectrometer and X-ray photoelectron spectroscopy, we observed changes in the chemical state of the PVA film due to VUV irradiation. [Features] ■ Introduction ■ Experiment ■ Results and Discussion *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

The photochemical surface treatment method for materials using vacuum ultraviolet excimer lamps has features such as "low cost" and "ease of processing large areas." As a result, it can be applied to various industrial fields, including photonic cleaning, photonic thin film formation, photonic modification, and photochemical modification. This document presents the results of an investigation into the effects of photochemical surface treatment using atomic force microscopy (AFM). [Contents] ■ Introduction ■ Experiment ■ Results *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

The "QEV Series" is a tube-type excimer lamp that offers high customization at a low price. We provide units for batch irradiation and scanning irradiation. The wavelength is 172nm, with a distribution of ±15%. It can be used for wafer cleaning, mask cleaning, and experimental equipment. Please feel free to contact us for inquiries. 【Specifications for Batch Irradiation Unit (Partial)】 ＜QEV-160＞ ■ Wavelength: 172nm ■ Utilities: N2 / Cooling water / AC100V ■ Distribution: ±15% ■ Irradiation aperture: 176×176 ■ Compatible work size: 6inch *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

We would like to introduce our excimer UV irradiation device, the 'OVL Series.' This is a high-intensity, high-distribution transport processing unit. It is equipped with an illuminance monitoring function, allowing for feedback control. It can be used for various applications, including glass substrate cleaning, pre-treatment before coating, pre-treatment before lamination, and polymer surface modification. 【Features】 ■ Illuminance monitoring function ■ Feedback control ■ Compatible with transport processing *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

The "SPC Series" is a flat-type excimer UV irradiation device. It improves the illuminance distribution from the conventional ±15% to ±5%. It is an excimer irradiation unit capable of high illuminance bulk irradiation. It can be utilized for wafer cleaning, exposure light sources, coater pretreatment, resist modification, and more. 【Features】 ■ Illuminance monitor function ■ Feedback control ■ Vacuum compatibility ■ Improved illuminance distribution from the conventional ±15% to ±5% *For more details, please refer to the PDF document or feel free to contact us.

• Ultraviolet irradiation equipment

An "excimer lamp" is a light source that can emit vacuum ultraviolet light, differing from conventional discharge lamps (such as mercury lamps and xenon lamps) in its principle of light emission and structure. It allows for surface treatment at low temperatures. It produces relatively little unnecessary visible and infrared light, which prevents thermal damage to the workpiece during processes like dry cleaning and modification. Additionally, it generates vacuum ultraviolet light (VUV) at a wavelength of 172 nm, which has higher photon energy compared to mercury lamps (which emit at wavelengths of 185 nm and 254 nm). 【Features】 ■ Quasi-monochromatic light ■ Surface treatment possible at low temperatures ■ Emits excimer light at a wavelength of 172 nm ■ Instant on/off flashing ■ Improves quality by preventing peeling and enhancing adhesion after the mounting of electronic components *For more details, please refer to the PDF materials or feel free to contact us.

• Ultraviolet irradiation equipment

The "eVIO" is a UV light that has achieved the use in human environments, which was previously impossible with conventional UV wavelengths, through a new technology that maintains the original virus suppression and sterilization capabilities of ultraviolet light while minimizing the impact on humans and animals. It does not use an external filter and can emit a wavelength of 222nm ultraviolet light on its own. Additionally, it is effective for sterilizing surfaces of objects, and especially in unoccupied environments, continuous irradiation is possible, maximizing the sterilization effect. 【Features】 ■ Excellent effectiveness for space sterilization ■ Effective for sterilizing surfaces of objects ■ Established safety for use in human environments ■ 222nm ultraviolet light ■ Does not use external filters, which were common in conventional products *For more details, please refer to the PDF materials or feel free to contact us.

• Ultraviolet irradiation equipment
• Other safety and hygiene products

The "portable contact angle meter" is a measuring instrument that can measure the surface of objects such as wafers and photomasks before and after surface treatment simply by placing it on the surface. There is no need to cut the sample during measurement, and it can measure samples with small surface areas or curved surfaces. When using this instrument for measurement, the sample, which is the object of measurement, must have a measurement area larger than 10mm x 16mm. 【Features】 ■ Measurement is possible just by placing it on the surface of the object ■ No need to cut the sample ■ Can measure even with small surface areas ■ Can measure even with curved surface areas *For more details, please refer to the catalog or feel free to contact us.

• Other measurement and measuring equipment

Quark Technology Co., Ltd.'s illuminance monitor supports a variety of applications from excimer ultraviolet to LED ultraviolet. There are three types of monitors based on measurement wavelength, each used for measuring different wavelengths. With a low price, easy operation, and compact size, we encourage you to make a purchase. 【Features】 ■ Supports excimer ultraviolet to LED ultraviolet ■ Simple operation ■ Compact size ■ Low price *For more details, please refer to the catalog or feel free to contact us.

• Other measurement and measuring equipment

Quark Technology Co., Ltd.'s UV-LED irradiation device has a longer lifespan, lower power consumption, and can process without causing thermal damage to the workpiece compared to traditional lamps. Irradiation unevenness is reduced, and with the built-in cooling unit, the illuminance is stabilized, allowing for low-temperature curing without an increase in temperature on the workpiece. Additionally, it enables the design of irradiation devices with greater flexibility, allowing for large irradiation areas that were impossible with conventional spot systems. 【Features】 ■ Reduced irradiation unevenness ■ Built-in cooling unit ■ Direct light source without transmission materials ■ Low power consumption, long lifespan ■ Maintenance-free *For more details, please refer to the catalog or feel free to contact us.

• Optical Components
• Electronic Components
• FPD/Touch Panel

The excimer irradiation device from Quark Technology Co., Ltd. generates excited oxygen atoms necessary for organic cleaning and surface modification using a high photon energy vacuum ultraviolet light source from excimer lamps. It is utilized in various devices, including semiconductor manufacturing equipment and film surface modification systems. It has good energy conversion efficiency with quasi-monochromatic light, and relatively little unwanted visible and infrared light compared to other discharge lamps, which prevents thermal damage to the workpiece. Additionally, it can instantaneously turn on and off without damaging the excimer lamp. Moreover, high-efficiency cleaning allows for irradiation during conveyor transport. We also offer flat types of excimer irradiation devices with different features, so please choose according to your application. 【Features】 ■ Quasi-monochromatic light ■ Wavelength 172nm ■ Instantaneous on/off ■ Irradiation during conveyor transport is possible ■ Reduced number of lamps, no auxiliary equipment required *For more details, please refer to the catalog or feel free to contact us.

• Semiconductors and ICs
• Optical Components
• Electronic Components

This catalog is the product catalog of Quark Technology Co., Ltd., which mainly deals with the manufacturing and sales of ultraviolet irradiation devices, exposure devices, and various quartz and ceramic products. It includes "excimer irradiation devices" used in various film surface modification devices such as semiconductor manufacturing equipment, as well as "UV-LED irradiation devices" and various measuring instruments. You can choose from a variety of products according to your application. [Contents] ■ Company Overview ■ UV Spectrum and Applications ■ Technical Principles ■ Effects of Excimer Light ■ Excimer Irradiation Devices ■ UV-LED Irradiation Devices ■ Various Measuring Instruments ■ Product Lineup *For more details, please refer to the catalog or feel free to contact us.

• LED
• Semiconductors and ICs
• Other measurement and measuring equipment

The UV-LED irradiation device is characterized by its long lifespan and low power consumption compared to traditional lamps, and it can process without causing thermal damage to the workpiece. Additionally, it enables irradiation of large surfaces, which is not possible with conventional spot types. Quark Technology Co., Ltd. offers three types of UV-LED irradiation devices: surface irradiation type, inline irradiation type, and line irradiation type. We can also customize the devices to meet the specific needs of our customers. 【Features of the UV-LED Irradiation Device】 ○ Reduced irradiation unevenness ○ No temperature rise on the workpiece, allowing for low-temperature curing ○ Flexible design of the irradiation device ○ Stabilization of illuminance through an integrated cooling unit ○ Direct light source without using transmission materials like optical fibers For more details, please contact us or download the catalog.

• Ultraviolet irradiation equipment

The UV-LED irradiation device is characterized by its long lifespan and low power consumption compared to lamps, and it can process without causing thermal damage to the workpiece. It also enables irradiation of large surfaces, which is impossible with conventional spot types. Quark Technology Co., Ltd. offers three types of UV-LED irradiation devices: surface irradiation type, inline irradiation type, and line irradiation type. Additionally, we can customize the devices to meet the specific needs of our customers. 【Features of the UV-LED Irradiation Device】 ○ Reduced irradiation unevenness ○ No temperature rise on the workpiece, allowing for low-temperature curing ○ Flexible design of the irradiation device ○ Stabilization of illuminance due to built-in cooling unit ○ Direct light source without using transmission materials like optical fibers For more details, please contact us or download the catalog.

• Ultraviolet irradiation equipment

The UV-LED irradiation device is characterized by its long lifespan and low power consumption compared to traditional lamps, and it can process without causing thermal damage to the workpiece. Additionally, it enables irradiation of large surfaces, which is impossible with conventional spot types. Quark Technology Co., Ltd. offers three types of UV-LED irradiation devices: surface irradiation type, inline irradiation type, and line irradiation type. We can also customize the devices to meet the specific needs of our customers. 【Features of the UV-LED Irradiation Device】 ○ Reduced irradiation unevenness ○ No temperature rise on the workpiece, allowing for low-temperature curing ○ Flexible design of the irradiation device ○ Stabilization of illuminance through built-in cooling units ○ Direct light source without using transmission materials like optical fibers For more details, please contact us or download the catalog.

• Ultraviolet irradiation equipment

Quark Technology Co., Ltd. manufactures and sells various industrial equipment utilizing cutting-edge optical application technology. Through the development of vacuum ultraviolet and UV-LED light sources, we have introduced manufacturing technologies for semiconductor production, as well as new displays such as LCDs, PDPs, films, and EL, along with various electronic materials and devices. Additionally, we are planning research and development to address the demand for waste and environmental management equipment, which are pressing medical and social issues. All substances are composed of atoms, nucleons, and "quarks." At Quark Technology, we continue to research light and challenge ourselves in industrial application technologies. 【Business Activities】 ○ Manufacturing and sales of ultraviolet irradiation devices ○ Manufacturing and sales of UV-LED irradiation devices ○ Manufacturing and sales of semiconductor manufacturing equipment ○ Handling of various quartz and ceramic products For more details, please contact us or download our catalog.

• Ultraviolet irradiation equipment
• Other measurement, recording and measuring instruments

Mercury lamps and metal halide lamps, compared to ride lamps, have a long lifespan, low power consumption, and can operate at low temperatures.

• LED Module

Organic material cleaning and surface modification can be performed at low temperatures using a high photon energy vacuum ultraviolet light source excimer lamp. The flat type is a high-output, high-density, high-distribution model where the surface itself emits light.

• Other surface treatment equipment

Compatible with various types from excimer UV to LED UV Easy operation Compact size Low price

• Other measurement, recording and measuring instruments

You can measure simply by placing the workpiece on the device. Even small workpieces and curved surfaces can be measured.

• Other measurement, recording and measuring instruments