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  3. Technetics Group Japan
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Technetics Group Japan

capital8406Ten thousand
number of employees5
addressTokyo/Chuo-ku/Kyobashi 3-10-1, NEWS Kyobashi 8th Floor
phone03-6271-0546
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last updated:May 11, 2026
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Technetics Group Japan Product Lineup

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Helicoflex HELICOFLEX(R) Helicoflex HELICOFLEX(R)
膨張シール CEFIL'AIR 膨張シール CEFIL'AIR
Delta Seal HNV HELICOFLEX(R) DELTA Delta Seal HNV HELICOFLEX(R) DELTA
Other metal seals Other metal seals
Elastomer seal Elastomer seal
Metal and carbon fiber brush seals. Metal and carbon fiber brush seals.
BELLFAB(R) welded bellows BELLFAB(R) welded bellows
Nuclear industry Nuclear industry
semiconductor industry semiconductor industry
semiconductor

semiconductor industry

Our company is focusing on the development of seals for the semiconductor industry, particularly for semiconductor manufacturing equipment. In recent years, we have mainly been working on updating existing elastomer O-rings to our metal seals (for pump piping in vibration-prone exhaust devices and for existing flanges that require helium leaks where bolt hole modifications are not possible).

Clamp for ultra-high vacuum and high-temperature NW/KF flanges QDS

Set of NW/KF flanges for ultra-high vacuum, dedicated helico and delta, and dedicated clamps! QDS: Quick Disconnect System

The "Quick Disconnect System (QDS)" combined with the HelicoFlex series significantly reduces assembly time while achieving ultra-high vacuum. It can accommodate everything from NW/KF small diameters to custom products. The RH type, which allows for remote operation, is suitable for reducing operator exposure, in radioactive environments, and when maintenance space is limited (video available). 【Features】 ■ Structural verification completed with FEA (Finite Element Analysis) ■ Non-magnetic (optional) ■ Compatible from NW/KF10 to large diameters *For more details, please refer to the PDF document or feel free to contact us.

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[For the semiconductor industry] Replacement of rubber O-rings with spring-loaded C-rings HNRV

No need to change the size or number of existing bolts? A must-see for those struggling with "wanting to eliminate gas permeation and gas release from vacuum rubber O-rings" in semiconductor manufacturing equipment!

Our "Delta Beta HNRV" is a combination of a delta seal designed with a low tightening pressure (Y) and a specially processed internal spring, achieving replacement of rubber O-rings, performance enhancement, and PFAS-free status. For those who have concerns such as: "I want to eliminate gas permeation and gas release from rubber O-rings." "I cannot change the number or size of bolts on existing flanges." "I am troubled by PFAS in rubber O-rings." This metal seal is recommended. 【Features】 ■ Mainly for ultra-high vacuum applications ■ Even lower design tightening pressure than before ■ Can be replaced with elastomer O-rings ■ Two delta-shaped protrusions on the contact side of the cross-section ■ PFAS-free This does not guarantee compatibility with existing flanges. Specifications for existing flanges are required. For more details, please download the PDF or feel free to contact us.

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Replace the rubber O-ring with a spring-energized metal C-ring! "Delta Beta HNRV"

"Replace rubber O-ring to metal seal, Eliminate gas permeation and gas release." This can be possible with Delta Beta HNRV.

The Delta Beta HNRV(low load type HELICOFLEX) is originally designed with a low design tightening pressure (Y) and a special processing of the internal spring, achieving replacement of rubber O-rings, performance enhancement, and PFAS-free characteristics. It is a metal seal recommended for those who have concerns such as: "I want to eliminate gas permeation and gas release from vacuum rubber O-rings." "I cannot change the number or size of bolts on existing flanges." "I am troubled by PFAS in rubber O-rings." 【Features】 ■ Mainly for ultra-high vacuum ■ Even lower design tightening pressure than before ■ Can be replaced with elastomer O-rings ■ Two delta-shaped protrusions on the contact side of the cross-section ■ PFAS-free This does not guarantee compatibility with existing flanges. Specifications for existing flanges are required. For more details, please download the PDF or feel free to contact us.

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Metal seals for critical environments (accelerators, aerospace, cryogenics and nuclear fusion reactors)

It is used in the most demanding/critical environments such as accelerators, aerospace, and nuclear fusion reactors!

Our HELICOFLEX(R) spring-energized C-ring metal seals are designed for advanced sealing in critical applications. We offer structures beyond the standard, such as the "HL," which is equipped with an internal limiter to prevent over-tightening, and the "HNR," which features specially processed springs to achieve low design tightening pressure. These seals are used in harsh environments, including accelerators, aerospace, fusion reactors, nuclear power plants, cryogenics, and semiconductor manufacturing equipment. 【Features】 ■ HLO: Can be used as a substitute for ring joint gaskets ■ HL: Equipped with an internal limiter to prevent over-tightening ■ HNR: A type with specially processed springs to achieve low design tightening pressure ■ HNV: Keeps initial seal levels and design tightening pressure low *For more details, please refer to the PDF document or feel free to contact us.

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Low tightening pressure 'Ultra High Vacuum Delta Seal' for Semiconductor fields such as PVD, CVD, Etching device

Delta Seal (HNV HELICOFLEX(R) DELTA) achieves ultra-high vacuum! [Standardized for JIS V-groove flanges]

The Delta Seal (HNV HELICOFLEX(R) DELTA) has two delta-shaped protrusions on the contact side of the cross-section. The delta-shaped protrusions are designed to collapse and disappear during the compression of the outer casing when integrated into the flange groove, and the design tightening pressure of the Delta Seal is lower compared to the Helicoflex seal, allowing for replacement with elastomer O-rings. Leakage rate: *For circular shapes, 10⁻¹² Pa·m³/sec. (10⁻¹¹ atm·cm³/sec.) *Depends on the quality of the installation side. Also varies depending on the seal shape. 【Features】 ■Two delta-shaped protrusions on the contact side of the cross-section ■Achieves ultra-high vacuum ■Has excellent elasticity and can be used at high temperatures ■Can be replaced with elastomer O-rings *For more details, please refer to the PDF document or feel free to contact us.

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Metal seal adoption case: Chemical substance canister for semiconductor manufacturing

Metal seal for canisters. Good news for substances that cannot use resin or elastomer seal materials! By adopting metal seals, helium leak tightness has been achieved.

We would like to introduce a case where our "HELICOFLEX Delta Seal" was adopted for seals used in canisters by a chemical company. The specifications for the chemical company's canister seals required reliability to achieve helium leak tightness under both vacuum and positive pressure, as well as excellent durability, which ruled out the use of resin or elastomer materials. After adoption, helium leak tightness was achieved, and the design tightening pressure was lower than usual, resulting in reduced bolt load and a decrease in the number of bolts for the canister cover, which has limited space. 【Case Overview】 ■ Challenge - Desire to repeatedly transport chemicals with helium leak tightness ■ Results - Achieved helium leak tightness - Reduced bolt load due to lower design tightening pressure, leading to a decrease in the number of bolts for the canister cover - Also serves as a solution for PFAS measures *For more details, please refer to the PDF document or feel free to contact us.

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