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Ultra Fine Leak Test System
MEMS components and small electronic parts, such as angular velocity sensors and infrared image sensors, need to maintain airtightness inside the product over a long period of time, requiring high gas tightness. Fukuda has developed a high-sensitivity helium leak detection technology called the "capsule accumulation method" as a measurement technique for ultra-micro leaks. The MUH-0100 series is a gas tightness inspection device specifically designed for ultra-micro leak measurement using the "capsule accumulation method."