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  1. Home
  2. Testing, Analysis and Measurement
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Testing, Analysis and Measurement
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フクダ

EstablishmentNovember 17, 1964
capital4960Ten thousand
number of employees130
addressTokyo/Nerima-ku/Kuki 3-16-5
phone03-3577-1111
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last updated:Sep 25, 2025
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フクダ List of Products and Services

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Product List Product List
Comprehensive Product Guide / Technical Manual (Leak Test) Comprehensive Product Guide / Technical Manual (Leak Test)
Flow meter (flow tester, flow unit, laminar flow meter) Flow meter (flow tester, flow unit, laminar flow meter)
Air leak tester Air leak tester
Hydrogen leak detector Hydrogen leak detector
Helium leak test system Helium leak test system
Dedicated leak test system for small electronic components Dedicated leak test system for small electronic components
Ultra Fine Leak Test System Ultra Fine Leak Test System
Sealed product air leak test device Sealed product air leak test device
Packaging Container Air Leak Test Device Packaging Container Air Leak Test Device
Pseudo-defect / pinhole Pseudo-defect / pinhole
Flow standard / reference instrument / calibrator Flow standard / reference instrument / calibrator
Peripheral devices (leak test, leak tester) Peripheral devices (leak test, leak tester)
Electric Air Regulator Electric Air Regulator
Regulator Regulator
Digital pressure gauge Digital pressure gauge
Ultra

Ultra Fine Leak Test System

MEMS components and small electronic parts, such as angular velocity sensors and infrared image sensors, need to maintain airtightness inside the product over a long period of time, requiring high gas tightness. Fukuda has developed a high-sensitivity helium leak detection technology called the "capsule accumulation method" as a measurement technique for ultra-micro leaks. The MUH-0100 series is a gas tightness inspection device specifically designed for ultra-micro leak measurement using the "capsule accumulation method."

Ultrafine Leak Test System | MUH-0100

High-sensitivity leak testing for small electronic components! We offer solutions down to ultra-fine leaks [patented technology].

The "MUH-0100 series" is a leak testing device specifically designed for ultra-micro leak measurement that employs the "capsule accumulation method." Our company has developed a high-sensitivity helium leak detection technology called the "capsule accumulation method" for measuring ultra-micro leaks. MEMS components such as angular velocity sensors and infrared image sensors, as well as small electronic components, need to maintain their sealing properties over long periods, requiring high airtightness. 【Capsule Accumulation Method Features】 ■ Capable of measuring up to 4×10⁻¹⁵ Pa·m³/s (He) ■ Significantly reduces background noise ■ Capable of detecting ultra-micro helium leaks ■ Reduces the influence of gases other than helium, which can be sources of error ■ Eliminates the need for heaters or ultra-low temperature pumps, with startup maintenance times comparable to standard helium leak detectors ■ Commercially available standard leaks can be used for calibrating helium accumulation amounts *For more details, please refer to the PDF document or feel free to contact us.

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