キヤノンアネルバ List of Products and Services

This product is a rotary feedthrough used to introduce rotational motion to equipment installed in a vacuum, capable of operating in ultra-high vacuum regions with pressures below 10^-8 Pa. We offer magnetic coupling rotary feedthroughs and bellows-type rotary feedthroughs. Adopting vacuum brazing for joining, it does not use any elastomer seals, making it suitable for ultra-high vacuum systems. 【Features】 ■ High torque transmission ■ Long lifespan ■ Bake-out capable ■ Outer rotor stopper ■ Motor drive capable *For more details, please refer to the PDF materials or feel free to contact us.

The "Linear Feedthrough" is used to introduce linear motion of equipment installed in a vacuum, and it can be used in ultra-high vacuum areas with a pressure below 10^-8 Pa. Since it is made entirely of metal, hard baking is possible. It is suitable for ultra-high vacuum systems. By utilizing the expansion and contraction of the bellows, it introduces linear motion into the vacuum without the concern of leaks during operation. 【Features】 ■ A bellows-type linear feedthrough that completely isolates the vacuum side from the atmospheric side with bellows. ■ All components are made of non-magnetic materials, making it suitable for vacuum systems that are sensitive to magnetism (excluding models 954-7626 and 7627). ■ All models have a linear movement of 1 mm per one full rotation of the handle, with the handle scale divided into 20 increments. *For more details, please refer to the PDF document or feel free to contact us.

We offer a variety of "current terminals" with ceramic-sealed terminals welded to ICF flanges. These terminals have excellent insulation properties and are mechanically and thermally robust, with no risk of leakage. As a result, they are used in ultra-high vacuum systems and devices with high thermal loads, providing high reliability. 【Features】 ■ Proven soldering technology and ICF flanges enable compatibility with high-temperature baking ■ Excellent thermal, mechanical, and electrical properties ■ Usable in ultra-high vacuum regions ■ Available in various types for large current introduction, small current introduction, high-pressure current introduction, and multi-terminal configurations *For more details, please refer to the PDF materials or feel free to contact us.

Since our establishment in 1967, we have been developing, manufacturing, selling, and providing services for vacuum thin film manufacturing equipment and vacuum component products, utilizing the vacuum technology and film processing technology we have cultivated over many years. With the theme "Opening the Future with Vacuum Technology," we have been providing high value-added products to our customers and contributing to the development of the market. In 2005, we became a member of the Canon Group, and today, as part of the Canon Industrial Equipment Group, we aim to maximize the strengths of our global group network in our business development. 【Business Activities】 ■ Manufacturing and sales of vacuum thin film processing equipment ■ Manufacturing and sales of vacuum component products ■ Maintenance services *For more details, please refer to the PDF document or feel free to contact us.