キヤノンアネルバ List of Products and Services

The "P-500" is a control device for operating ion pumps or noble pumps in high vacuum conditions ranging from 10^-2 Pa to 10^-4 Pa or lower. It features large green LEDs for improved visibility from a distance. While considering compatibility with conventional models, it achieves enhanced functionality and compliance with CE and RoHS standards. In addition to its comprehensive I/O functions, it is suitable for automation equipment and remote operation devices, with the possibility of supporting RS232C communication through optional board additions. 【Features】 ■ High performance ■ Comprehensive functionality ■ High compatibility ■ Communication support ■ Compliance standards: CE marking, RoHS directive compliance *For more details, please refer to the PDF materials or feel free to contact us.

The "Ion Pump - Noble Pump" is an ultra-high vacuum pump. By generating cold cathode discharge in a magnetic field, ionized gas molecules are embedded in the cathode, and during collisions with the cathode material (Ti), sputtering occurs, continuously creating an active getter film for evacuation. Since it does not use any oils or organic materials, it achieves a clean vacuum without contaminating the system. 【Features】 ■ Completely oil-free ■ Ultra-high vacuum, extreme ultra-high vacuum ■ Unmanned operation ■ Exhaust of inert gases (Noble Pump) *For more details, please refer to the PDF document or feel free to contact us.

The "Excel Pump" is a compact and lightweight vacuum pump. Based on an ion pump, it has been developed by improving the discharge characteristics in low-pressure regions, featuring pump elements and a built-in heater that enables efficient baking. Additionally, the incorporation of a NEG (non-evaporable getter) pump allows for the achievement of XHV. 【Features】 ■ High exhaust capacity in UHV and XHV regions ■ Realization of high-efficiency baking ■ Compact and lightweight ■ Compatible with clean rooms *For more details, please refer to the PDF document or feel free to contact us.

The POWER series product is a high-performance cryopump that enhances practical exhaust performance and temperature stability during multi-operation. The average value of vibration acceleration is less than about one-tenth compared to conventional models (our comparison). Even if only one pump is regenerated during multi-operation, the startup time does not become excessively long, minimizing changes in startup time due to operating conditions. 【Features】 ■ Achieves safe, heater-less high-speed regeneration ■ Excellent practical startup characteristics and temperature stability ■ Low vibration ■ Maintains good exhaust performance up to the limit of argon exhaust capacity ■ Significantly increases refrigeration capacity, sustaining stable hydrogen exhaust performance for extended periods *For more details, please refer to the PDF materials or feel free to contact us.

The POWER Eco series product is a high-performance energy-saving cryopump developed with the aim of reducing power consumption and cooling water usage from an energy-saving perspective. Due to the increased efficiency of refrigeration units and multi-wave control, the number of cryopumps that can be operated with a single compressor has increased, significantly reducing power consumption and cooling water usage per unit. 【Features】 ■ Effective for energy and resource savings [Power consumption, cooling water usage: Reduction of 15-70% possible] ■ Shortened regeneration and startup time [Less than half compared to conventional models (compared to our company)] ■ Improved exhaust performance [Substantially increased effective argon exhaust capacity by 1.5 to 4 times (compared to our company)] ■ Low vibration [Approximately 1/10 or less compared to conventional models] *For more details, please refer to the PDF materials or feel free to contact us.

The "Foreline Trap" efficiently adsorbs oil molecules using a molecular sieve installed in the gas pathway. Furthermore, by cooling the molecular sieve with liquid nitrogen, it effectively adsorbs not only oil molecules but also water vapor (in the case of the Foreline Trap S). Additionally, since it has a built-in heater, the adsorption capacity of the molecular sieve can be easily regenerated by baking the molecular sieve before use. 【Features】 ■ Easily prevents backflow of oil ■ Efficiently adsorbs oil molecules using the molecular sieve installed in the gas pathway ■ The adsorption capacity of the molecular sieve can be easily regenerated by baking it before use *For more details, please refer to the PDF document or feel free to contact us.

Since our establishment in 1967, we have been developing, manufacturing, selling, and providing services for vacuum thin film manufacturing equipment and vacuum component products, utilizing the vacuum technology and film processing technology we have cultivated over many years. With the theme "Opening the Future with Vacuum Technology," we have been providing high value-added products to our customers and contributing to the development of the market. In 2005, we became a member of the Canon Group, and today, as part of the Canon Industrial Equipment Group, we aim to maximize the strengths of our global group network in our business development. 【Business Activities】 ■ Manufacturing and sales of vacuum thin film processing equipment ■ Manufacturing and sales of vacuum component products ■ Maintenance services *For more details, please refer to the PDF document or feel free to contact us.