キヤノンアネルバ List of Products and Services

The "Ultra High Vacuum L-Type All-Metal Valve" is a fully metallic product that can be used down to 10^-8 Pa or lower. The valve body is made of austenitic stainless steel, and the shaft seal also uses a bellows made of austenitic stainless steel. It features an all-welded structure, and the areas exposed to vacuum are oil-free and clean. Additionally, the valve sealing structure employs a reliable Capturing seal design similar to ICF flanges. 【Features】 ■ For ultra high vacuum applications ■ Capturing seal structure ■ Excellent tolerance to heating ■ Easy gasket replacement ■ Parallel piping connection possible (excluding 951-7148 mini metal valve) ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.

The "Ultra High Vacuum L-Type Polyimide Valve" is a product that can be used in ultra high vacuum areas of approximately 10^-8 Pa. For the vacuum seal, polyimide resin is used, which has a high heat resistance and low gas release. It is suitable for valves used in ultra high vacuum devices that involve baking at temperatures above 150°C. Additionally, the valve body is made of austenitic stainless steel, and the shaft seal also uses a bellows made of austenitic stainless steel. 【Features】 ■ Can be used in ultra high vacuum areas of approximately 10^-8 Pa ■ Excellent heat tolerance ■ Seal material with low gas release ■ Small tightening torque *For more details, please refer to the PDF document or feel free to contact us.

The "V Series" is an L-type valve that can be used in high vacuum areas down to approximately 10^-4 Pa. Fluororubber (Viton) O-rings are used for vacuum seals and shaft seals. It is suitable as a valve for high vacuum devices and as a roughing valve for ultra-high vacuum devices. Additionally, the air cylinder used for the pneumatic drive valve is equipped with a position sensor switch for opening and closing. 【Features】 ■ Usable in high vacuum areas down to approximately 10^-4 Pa ■ Fluorogrease is used only for the shaft seal section ■ Equipped with a position sensor switch for opening and closing ■ Drive methods - Pneumatic - Manual *For more details, please refer to the PDF document or feel free to contact us.

The "V Series" is an L-type valve designed for longevity and improved maintenance. The bellows built into the valve are made from Hastelloy alloy. All air cylinders used in the valve come standard with position sensor switches (magnetic sensors) for opening and closing. The valve body is made of stainless steel, and special connection flanges can be easily welded. Additionally, cleaning of internal valve components and replacement of maintenance parts can be done in a short time. 【Features】 ■ Usable up to ultra-high vacuum levels ■ Long-life valve ■ Opening and closing position sensor switches ■ Excellent heat tolerance ■ Abundant connection flanges ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.

The "Ultra High Vacuum Variable Leak Valve" is a product used in vacuum devices that require adjustment of the introduced gas flow rate. It allows for gas introduction from an extremely low flow rate region, with an adjustable minimum leak rate of 6.7×10^-9 Pa·m³/sec or less. Additionally, it is made entirely of metal and can withstand baking up to 450°C, making it suitable for ultra high vacuum devices. 【Features】 ■ Seal section resistant to heat and external shocks ■ Stable adjustment of minute gas flow rates ■ Excellent heat tolerance ■ Capable of adjusting a wide range of gas flow rates ■ Compatible with ultra high vacuum connections *For more details, please refer to the PDF document or feel free to contact us.

The "951-7179 Inlet Valve" is a product designed to introduce specific gases into vacuum systems. The shaft seal is made of austenitic stainless steel bellows, and the vacuum seal uses fluororubber (Viton). It is suitable as a gas introduction valve for high vacuum and ultra-high vacuum devices. It can also be used in ultra-high vacuum areas down to approximately 10^-7 Pa. 【Features】 ■ For ultra-high vacuum areas ■ No atmospheric contamination ■ Excellent heat tolerance ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.

The "V-025SV" is primarily used by attaching it to the intake port of an oil rotary vacuum pump. It is equipped with the functions of a cut-off valve and a vent valve, which helps prevent backflow of pump oil due to power outages or operational errors. The driving source utilizes the vacuum force generated by the oil rotary vacuum pump. Unlike conventional automatic valves, there is no need for compressed air and associated piping. (The valve does not open when the pump is not operating.) 【Features】 ■ Prevents backflow of pump oil ■ No need for compressed air and associated piping ■ Utilizes the vacuum force generated by the oil rotary vacuum pump as the driving source ■ No control circuit required *For more details, please refer to the PDF materials or feel free to contact us.

Since our establishment in 1967, we have been developing, manufacturing, selling, and providing services for vacuum thin film manufacturing equipment and vacuum component products, utilizing the vacuum technology and film processing technology we have cultivated over many years. With the theme "Opening the Future with Vacuum Technology," we have been providing high value-added products to our customers and contributing to the development of the market. In 2005, we became a member of the Canon Group, and today, as part of the Canon Industrial Equipment Group, we aim to maximize the strengths of our global group network in our business development. 【Business Activities】 ■ Manufacturing and sales of vacuum thin film processing equipment ■ Manufacturing and sales of vacuum component products ■ Maintenance services *For more details, please refer to the PDF document or feel free to contact us.