キヤノンアネルバ List of Products and Services

The "M-311HG" is an ion gauge from the transducer vacuum gauge series. Ion gauges (thermal cathode ionization vacuum gauges) have excellent reproducibility and linearity, allowing for a wide range of pressure measurements, making them outstanding as vacuum gauges. The sensor uses a proven miniature gauge (MG-2I type). 【Features】 ■ Wide pressure measurement range ■ High response analog output ■ Four emission current setting modes ■ Space-saving and low power consumption ■ A product that considers safety and the environment, compliant with RoHS and CE marking *For more details, please refer to the PDF document or feel free to contact us.

The "M-336MX" is a combination gauge that features a crystal gauge with excellent reproducibility and responsiveness for low vacuum measurements, and a miniature B-A gauge with a long track record for high vacuum measurements. It can measure a wide pressure range from atmospheric pressure to ultra-high vacuum with this one device. It can be used for rough pumping and final pressure measurements of vacuum systems, as well as pressure measurements in semiconductor and electronic component manufacturing equipment. 【Features】 ■ Combination gauge that combines a crystal gauge and a miniature B-A gauge ■ From ultra-high vacuum to atmospheric pressure ■ High precision and excellent reproducibility in low vacuum regions *For more details, please refer to the PDF document or feel free to contact us.

The M-361CP is a combination gauge that integrates a Pirani gauge for measuring atmospheric pressure to medium vacuum and a cold cathode gauge for measuring high to ultra-high vacuum. It can measure a wide pressure range with a single unit, contributing to cost reduction and reduced management burden for the system by serving dual purposes. Additionally, it features easy maintenance with only parts replacement required. 【Features】 ■ Improved measurement stability - The newly developed discharge assist function reduces switching failures between the Pirani and cold cathode, as well as measurement interruptions due to lack of discharge. ■ Achieves excellent atmospheric pressure detection (compared to our products) - The Pirani gauge equipped in this device has improved stability and reproducibility near atmospheric pressure. *For more details, please refer to the PDF document or feel free to contact us.

The M-370CG is a robust cold cathode gauge (cold cathode ionization vacuum gauge) that does not use thermal filaments. It achieves stable pressure measurement from high vacuum to ultra-high vacuum. With excellent measurement stability, it reduces measurement interruptions due to discharge and fluctuations in pressure readings. 【Features】 ■ Good start-up performance under high vacuum ■ Eliminates discharge and discharge delay ■ Easy maintenance with only parts replacement required *For more details, please refer to the PDF document or feel free to contact us.

The Pirani gauge "M-351PG" uses Ni filament to improve corrosion resistance and is compatible with hard process equipment such as RIE and CVD. It offers good reproducibility at a low price, with no restrictions on installation direction. It can be used in various devices, including semiconductor and electronic device manufacturing equipment, as well as food and pharmaceutical manufacturing equipment. 【Features】 - Improved corrosion resistance (such as the use of Ni filament) - Good reproducibility at a low price - Operating range from 5×10^-2 Pa to atmospheric pressure - No restrictions on installation direction *For more details, please refer to the PDF document or feel free to contact us.

The Pirani gauge "M-350PG" is a versatile Pirani vacuum gauge that combines ease of measurement from atmospheric pressure and high cost performance. It can be used in various industries, including food, automotive, and pharmaceuticals, for measuring in the low to medium vacuum range and for integration into various systems. 【Features】 ■ Good reproducibility and low price ■ Measurement range from 5×10^-2 Pa to atmospheric pressure ■ Suitable for measuring in the low to medium vacuum range *For more details, please refer to the PDF document or feel free to contact us.

The capacitance gauge "M-342DG" is a diaphragm vacuum gauge that achieves high-precision and stable pressure measurement with minimal zero-point adjustment frequency. Weighing 200g and measuring W46mm × H49mm × L106mm, it is lightweight and compact. It employs a newly developed small silicon MEMS chip in the pressure sensor section, minimizing the influence of external environments such as temperature, vibration, and atmospheric pressure fluctuations. 【Features】 ■ High-precision and stable pressure measurement ■ Excellent zero-point stability ■ Low temperature dependence, achieving excellent stability without a temperature adjustment mechanism ■ Excellent vibration noise performance *For more details, please refer to the PDF document or feel free to contact us.

The "M-431HG" is a vacuum gauge control power supply specifically designed for miniature gauges. The input voltage is wide voltage. It comes standard with RS-232C communication functionality for external input and output, and complies with CE marking and RoHS. It can be used for pressure measurement in automated vacuum systems, as well as for measuring and controlling process pressures such as sputtering. 【Features】 ■ External input and output ■ Standard RS-232C communication functionality ■ Wide input voltage ■ CE marking and RoHS compliant ■ Cables available with heat resistance up to 80℃/250℃ *For more details, please refer to the PDF materials or feel free to contact us.

The "M-833HG" is a control unit specifically designed for miniature B-A gauges. An expansion board is available as an option to support various gauges, data output, and more. By combining the miniature B-A gauge with the TC gauge (optional) and incorporating an auto-filament for automatic gauge switching, it enables high-precision vacuum measurement from atmospheric pressure to ultra-high vacuum. 【Features】 ■ Easy-to-read LCD display format ■ Pressure and various messages displayed on the LCD ■ Pressure range automatically switches ■ Complete remote control possible with rich external control functions ■ Standard equipped with 2 set points *For more details, please refer to the PDF document or feel free to contact us.

The "M-723HG, M-823HG, M-923HG" series is a general-purpose B-A type ionization vacuum gauge series equipped with a variety of expansion boards that support diverse gauges. It comes standard with remote operation functions necessary for vacuum process control and an effective range hold function with APC (Automatic Pressure Control). The "M-823HG" features an auto-filament function that allows for the combination of wide-range B-A gauges and thermocouple gauges, enabling automatic switching between gauges to accurately cover the range from atmospheric pressure to high vacuum with a single unit. 【Features】 ■ Automatic switching of pressure ranges ■ Pressure and various messages displayed on LCD ■ Complete remote operation possible with rich external control functions ■ Two set points standard equipped ■ D/A output standard equipped for recorder output *For more details, please refer to the PDF materials or feel free to contact us.

The "M-601GC/603GC" is a display unit compatible with the transducer-type vacuum gauge series. It features a large digital LCD display for easy visibility and significantly improved operability. It is packed with various innovations aimed at enhancing convenience on-site. You can choose between a 1-channel type and a 3-channel type according to your needs. 【Features】 ■ Automatic gauge recognition ■ Large digital LCD display ■ Standard RS232C interface ■ Excellent operability ■ Easy-to-read three types of display - Digital display, trend graph (up to 18 hours), analog meter *For more details, please refer to the PDF document or feel free to contact us.

Temperature-compensated diaphragm vacuum gauge, capacitance gauge 'M-342DG' 【Features】 ■ High precision and stable pressure measurement - Excellent zero point stability - Low temperature dependence - Excellent vibration resistance ■ Compact and low power consumption - Lightweight and compact with a mass of 200g and dimensions of W46mm × H49mm × L106mm - Power consumption of 0.5W *For more details, please refer to the PDF document or feel free to contact us.

The "Piranigage" is a versatile vacuum gauge that combines ease of measurement from atmospheric pressure with high cost performance. It has good reproducibility and is suitable for measuring in low to medium vacuum ranges. It can be used in various industries, including food, automotive, and pharmaceuticals, for various system installations. 【Features】 ■ High cost performance ■ Measurement range from 5×10^-2 Pa to atmospheric pressure ■ Usable in various industries ■ Applications include pressure measurement in roughing systems, pressure monitoring in exhaust systems, and control purposes. *For more details, please refer to the PDF document or feel free to contact us.

The "Miniature Gauge" is a metal small gauge ball that eliminates the disadvantages of glass gauge balls, which are large and prone to breaking. It is easy to select the installation location, and it can be miniaturized (1/20 of the conventional size according to our company) without compromising the performance of the gauge, such as sensitivity and measurement range. Pressure measurement from the target pressure to process pressures like sputtering (measurable in the range of 1 Pa) can be performed with a single gauge. 【Lineup】 ■ MG-2 ■ MG-2M ■ MG-2I/NW16, 25 ■ MG-2I/φ34ICF, φ70ICF ■ MG-2F ■ MG-2WF *For more details, please refer to the PDF materials or feel free to contact us.

Since our establishment in 1967, we have been developing, manufacturing, selling, and providing services for vacuum thin film manufacturing equipment and vacuum component products, utilizing the vacuum technology and film processing technology we have cultivated over many years. With the theme "Opening the Future with Vacuum Technology," we have been providing high value-added products to our customers and contributing to the development of the market. In 2005, we became a member of the Canon Group, and today, as part of the Canon Industrial Equipment Group, we aim to maximize the strengths of our global group network in our business development. 【Business Activities】 ■ Manufacturing and sales of vacuum thin film processing equipment ■ Manufacturing and sales of vacuum component products ■ Maintenance services *For more details, please refer to the PDF document or feel free to contact us.

The "Capacitance Gauge" is a temperature-compensated diaphragm vacuum gauge that can measure absolute pressure with high precision and stability. It features excellent zero-point stability, low temperature dependence, and outstanding vibration resistance. The "Cold Cathode Pirani Gauge" is a combination gauge that combines a robust cold cathode gauge (cold cathode ionization vacuum gauge) and a Pirani gauge, offering a wide pressure measurement range from atmospheric pressure to high vacuum. For more details, please refer to the PDF document or feel free to contact us.