キヤノンアネルバ List of Products and Services

The process gas monitor "M-080QA-HPM" is a quadrupole mass spectrometer capable of measuring in the mass range of 1 to 80 amu, and it can measure from pressures below 2.0 Pa (no differential pumping system required). It monitors the partial pressure of gases during the process, detects abnormalities such as process gas anomalies and leaks, and provides process stability. It can be utilized for quality control and residual gas analysis during the process. 【Features】 ■ High sensitivity detection of hydrogen during the process ■ High sensitivity measurement across a wide pressure range ■ Long maintenance cycle and low running costs ■ Various alarm functions to detect abnormalities during production *For more details, please refer to the PDF document or feel free to contact us. The document states the operating pressure as "below 1.3 Pa," but the correct value is "below 2.0 Pa."

The "M-101/201QA-TDM" is a quadrupole mass spectrometer specifically designed for PC control, achieving high sensitivity, high functionality, and low gas emissions. It uses a secondary electron multiplier in the detector, allowing for fine adjustments of ionization voltage and emission current. It is widely used for gas analysis in thin film manufacturing equipment and accelerator gas analysis, among other applications. Additionally, we offer a cost-effective version suitable for residual gas monitoring in various vacuum systems, the "M-070QA-TDF." 【Features】 ■ Uses a secondary electron multiplier in the detector ■ Adopts a low gas emission ion source ■ Allows for fine adjustments of ionization voltage and emission current ■ QUADVISION ■ Comes standard with a rich array of I/O functions *For more details, please refer to the PDF document or feel free to contact us.

Canon Anelva Corporation offers high-performance and high-functionality quadrupole mass spectrometers capable of measuring mass numbers up to 410 amu. We provide the "M-401QA-MGSY/MUSY," which can acquire data at intervals of 1 second for m/z = 1 to 410, and the "M-401QA-MGHY/MUHY," which features high sensitivity with an 8-digit dynamic range. You can choose between UHV type (cage type) and gas introduction type (box type), and we employ an ion source with low gas emission and have degassing functionality. 【Features】 ■ Choice of UHV type (cage type) or gas introduction type (box type) ■ Adoption of an ion source with low gas emission ■ Degassing functionality included *For more details, please refer to the PDF document or feel free to contact us.

The "D Series" is a suitable gas analysis system for various gas analysis and research and development fields. It allows for easy measurements controlled by a computer. Depending on the application, it features a flexible configuration that can combine a quadrupole mass spectrometer with a TMP exhaust system and optional components. 【Features】 ■ Five models to choose from: ・M-101QA-TDF, M-101/201QA-TDM, M-401QA-M (high sensitivity/high speed) ■ System upgrades can be combined according to application needs ■ Compact and space-saving ■ Easy operability *For more details, please refer to the PDF materials or feel free to contact us.

The "C Series" is a gas analysis system that is designed to be simple and compact while accommodating a variety of gas analysis applications. By selecting the basic configuration (exhaust system + mass filter) and further choosing from a range of recommended options that are preset for various applications, it is possible to create a system configuration that suits the customer's needs. Despite its simplicity, it comes standard with basic interlock functions, allowing for safe use. 【Features】 ■ Flexible customization options ■ Can be installed in a compact space of W480mm x D500mm ■ Simple yet equipped with basic interlock functions as standard ■ Can be ordered as an exhaust unit for gas analysis without the need for an analysis tube *For more details, please refer to the PDF document or feel free to contact us.

Since our establishment in 1967, we have been developing, manufacturing, selling, and providing services for vacuum thin film manufacturing equipment and vacuum component products, utilizing the vacuum technology and film processing technology we have cultivated over many years. With the theme "Opening the Future with Vacuum Technology," we have been providing high value-added products to our customers and contributing to the development of the market. In 2005, we became a member of the Canon Group, and today, as part of the Canon Industrial Equipment Group, we aim to maximize the strengths of our global group network in our business development. 【Business Activities】 ■ Manufacturing and sales of vacuum thin film processing equipment ■ Manufacturing and sales of vacuum component products ■ Maintenance services *For more details, please refer to the PDF document or feel free to contact us.

Gas analysis systems have been used in a wide range of fields and industries as a means of quality control in manufacturing and research and development. However, due to differences in the analysis targets, there can be variations in measurement conditions, and in some cases, individual responses are necessary to perform suitable measurements. At Canon Anelva, we use our own quadrupole mass spectrometer to design custom configurations based on customer requests, proposing optimal system configurations that align with their needs and measurement purposes.