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  3. プレテック 静岡製作所
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プレテック 静岡製作所

addressShizuoka/Yaizu-shi/Oshima 1143
phone054-623-3741
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last updated:Nov 07, 2025
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プレテック 静岡製作所 Product Lineup

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精密洗浄装置 精密洗浄装置
ファインシリーズ洗浄ユニット ファインシリーズ洗浄ユニット
ウルトラソニック洗浄ユニット​ ウルトラソニック洗浄ユニット​
スピンソニッククリーナー スピンソニッククリーナー
スピンソニッククリーナー

スピンソニッククリーナー

サブミクロンのパーティクルまでも非接触でウェハー両面を同時洗浄。 ウェハー横置き、枚葉式ファインジェット方式の採用で高い洗浄能力を実現。 スピンソニッククリーナーは、サブミクロンのパーティクルまでも取り除きます。 さらに工程数をカットし、薬液管理およびヒーターが不要に。 洗浄時間の短縮、ランニングコストの節約などを可能とするすぐれたパフォーマンスを発揮します。

LEO Unit PT-0878LEO

Achieving long-duration running! A cleaning liquid treatment unit equipped with deep ultraviolet LEDs for a dehydrated mercury-free society.

The "LEO Unit PT-0878LEO" is a high-power infrared (UV) LED cleaning unit that features a compact design and localized ultraviolet irradiation, enabling process treatment at low flow rates. It achieves long running times compared to mercury lamps. By combining deep ultraviolet light with ozone water, it generates highly efficient OH radicals, contributing to the breakdown of organic substances. This product is expected to be utilized in the medical and food sectors due to its high sterilization power against viruses and other pathogens. 【Features】 ■ Achieves a cleaning liquid processing unit equipped with deep ultraviolet LEDs for a mercury-free society ■ Achieves long running times compared to mercury lamps ■ Realizes a compact design and localized ultraviolet irradiation, enabling process treatment at low flow rates *For more details, please download the PDF or feel free to contact us.

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Radical cleaning unit for semiconductors

High-efficiency OH radical generation, space-saving design, mercury-free UV-C LED equipped.

In the semiconductor industry’s precision cleaning processes, advancements in microfabrication technology have led to demands for higher cleaning accuracy and reduced environmental impact. In particular, the complete removal of organic contaminants and photoresist residues, as well as the suppression of metal contamination, are critical challenges that affect product quality and yield. Radical cleaning units achieve high-purity cleaning and contribute to solving these issues. 【Usage Scenarios】 - SPM-free photoresist removal process - Suppression of organic and metal contamination - Metal film oxidation prevention process 【Benefits of Implementation】 - Improved cleaning efficiency - Reduced environmental impact - Enhanced product quality

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Radical Cleaning Unit for Medical Devices

Increased sterilization efficiency with OH radicals! Compact design for space-saving.

In the medical device industry, advanced sterilization processes are required. Particularly for medical instruments that come into direct contact with the patient's body, such as surgical tools and endoscopes, reliable sterilization is essential to reduce the risk of infections. Inadequate sterilization can lead to health hazards for patients. Our radical cleaning unit generates OH radicals, achieving efficient sterilization processes. 【Usage Scenarios】 - Sterilization of surgical instruments - Sterilization of endoscopes - Sterilization of medical tubes 【Benefits of Implementation】 - Reduction of infection risks due to high sterilization effectiveness - Space-saving design due to compact structure - Reduced environmental impact by using mercury-free LEDs

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Radical Cleaning Unit for Research Institutions

High-efficiency OH radical generation, compact design, mercury-free LED equipped.

In the cleaning of experimental equipment at research institutions, high cleaning performance is required to prevent contamination and obtain accurate experimental results. In particular, the removal of fine organic materials and metal contaminants is a crucial factor that affects the precision of experiments. Radical cleaning units efficiently generate OH radicals to address these challenges. 【Usage Scenarios】 - Cleaning of experimental equipment - Cleaning of fine parts - Metal contamination countermeasures 【Benefits of Implementation】 - Improved experimental accuracy due to high cleaning power - Reduced environmental impact - Lower running costs

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Radical Cleaning Unit for Electronic Components

High-efficiency OH radical generation! Space-saving design optimizes the surface treatment of electronic components.

In the surface treatment process of the electronic components industry, the removal of fine organic and metal contaminants significantly affects product quality and reliability. Particularly in electronic components where high density is advancing, it is crucial to thoroughly eliminate contamination and perform high-quality surface treatment. The radical cleaning unit addresses these challenges through highly efficient OH radical generation. 【Application Scenarios】 - Photoresist removal - Prevention of metal film oxidation - Removal of organic and metal contamination 【Benefits of Implementation】 - Improved cleaning efficiency - Reduced environmental impact - Enhanced product quality

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Display-oriented radical cleaning unit

High-efficiency OH radical generation, space-saving design. For foreign matter removal in display manufacturing.

In the display industry, the removal of foreign substances, which affects product quality, is crucial. In particular, the presence of fine foreign particles can lead to display malfunctions and a decrease in product lifespan. Our radical cleaning unit efficiently generates OH radicals and strongly supports the removal of foreign substances in the display manufacturing process. 【Application Scenarios】 - Removal of foreign substances in the display manufacturing process - Removal of photoresist residues - Suppression of metal contamination 【Benefits of Implementation】 - Quality improvement through high-purity cleaning - Cost reduction through space-saving design - Reduction of environmental impact

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Radical Cleaning Unit for Pharmaceuticals

High-efficiency OH radical generation, compact design, mercury-free LED equipped.

In the pharmaceutical industry, advanced decontamination technologies are required to minimize the risk of contamination in the manufacturing process. In particular, in the pharmaceutical manufacturing environment, trace amounts of organic matter or metal contamination can have a serious impact on product quality. Our radical cleaning unit efficiently generates OH radicals to address these challenges. 【Application Scenarios】 * Decontamination of pharmaceutical manufacturing equipment * Removal of contaminants in clean rooms * Cleaning of laboratory instruments in research and development facilities 【Benefits of Implementation】 * Reduction of contamination risk * Improvement of product quality * Streamlining of the manufacturing process

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Radical Cleaning Unit for Food Processing

Sterilizing food with OH radicals. Compact design for space-saving.

In the food processing industry, maintaining product quality and ensuring safety are crucial. In particular, effective sterilization methods are required to suppress the growth of bacteria and mold that can cause foodborne illnesses. Traditional sterilization methods carry the risk of quality degradation due to the use of chemicals or high-temperature heating. Our radical cleaning unit generates OH radicals to efficiently sterilize bacteria and microorganisms attached to food. With an LED design that does not use mercury, it achieves safe sterilization without compromising food quality. 【Usage Scenarios】 - Sterilization on food processing lines - Sterilization of food packaging materials - Sterilization of food manufacturing equipment 【Benefits of Implementation】 - Preservation of food quality - Reduction of foodborne illness risks - Safe food provision

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