テカンジャパン Product Lineup

In the semiconductor manufacturing industry, managing the purity of liquids, which significantly affects product quality, is extremely important. The presence of trace impurities can lead to a decline in product performance and a deterioration in yield. Our micropump eliminates the need for calibration and enables high-precision liquid sample extraction, supporting the maintenance of liquid purity in the manufacturing process. 【Usage Scenarios】 - Sample extraction in quality inspection processes - Chemical supply in semiconductor manufacturing lines - Supply of wafer cleaning solutions 【Benefits of Implementation】 - Maintains liquid purity, contributing to improved product quality - Enhances yield - Achieves a stable manufacturing process

In the water treatment industry, accurate sample collection in water quality testing affects the reliability of test results. Particularly when analyzing trace components or when continuous monitoring is required, precise sample collection and stable supply are essential. Inaccurate sample collection can lead to incorrect analysis results, potentially lowering the accuracy of water quality management. Our micro pumps support accurate sample collection in water quality testing with high-precision dispensing capabilities and a variety of interfaces. 【Usage Scenarios】 - Water quality testing laboratories - Wastewater treatment facilities - Water quality monitoring of rivers and lakes - Drinking water production processes 【Benefits of Implementation】 - Improved reliability of analysis results through accurate sample collection - Enhanced work efficiency through automation - Adaptability to various samples - Reduction in running costs

In the further miniaturization and high integration of semiconductor manufacturing, what influences product quality and yield is **"the extreme precision of liquid handling."** Particularly in next-generation processes where even slight flow variations can lead to catastrophic defects, challenges have emerged that conventional liquid delivery systems cannot address. The Cavro Centris Pump provides unprecedented stability in each process as miniaturization advances, thanks to its industry-leading resolution (up to 192,000 steps). 【Application Scenes】 - Precision dispensing of photoresist (lithography) - Supply of resin for nanoimprinting - Flow control for slit die coating (thin film formation) - Automatic adjustment of electroless plating solutions - Additive management for electroplating (ECP) - Inline blending of chemicals - Precise supply of slurry and additives in CMP (chemical mechanical polishing) processes 【Effects of Implementation】 The Centris Pump eliminates slight variations and pulsations in discharge volume that can cause coating inconsistencies, contributing to a dramatic improvement in yield. Its compact design, intended for integration into equipment, maximizes design flexibility for upgrading existing systems and developing next-generation devices.

The Cavro Xcalibur is a compactly designed precision liquid delivery engine that is ideal for semiconductor-related devices where miniaturization and high integration are required. Despite its slim housing with a 30mm stroke, it maintains the quantitative accuracy inherited from higher-end models. Its flexibility in installation allows for the construction of multi-channel liquid delivery lines with multiple pumps arranged in parallel, all within a minimal footprint. "I want to maintain high precision liquid delivery while making the device more compact" — this embodies the aesthetic functionality dedicated to making that ideal a reality. 【Usage Scenarios】 - Multi-channel chemical supply units: Suitable for multi-system supply systems that individually control and supply multiple different chemicals. - Benchtop and lab semiconductor evaluation devices: Ideal for integration into prototype coaters for research and development or small devices that evaluate material properties. - Integration into analysis and inspection modules: Functions as a sampling and dilution pump for analysis units that monitor chemical concentrations in real-time during semiconductor processes or impurity inspection devices. 【Why Xcalibur?】 - Short body design with a 30mm stroke. - Optimal for multi-channel liquid delivery. - Sufficient accuracy and reasonable introduction costs.

In the manufacturing of fuel cells (MEA), the uniformity of the catalyst layer is a decisive factor that affects the cell's power generation efficiency and yield. Tekan's high-end liquid delivery module, Cavro Centris, achieves an ideal thin film coating through smooth motion. 【Application Scenarios】 - Liquid supply to die coaters or comma coaters for the formation of MEA (membrane electrode assembly) catalyst layers - Optimization of catalyst composition: Automatic and precise reproduction of fine variations in mixing ratios that are impossible to achieve manually - Hydrophilization treatment and surface modification of the electrolyte membrane (PEM): Droplet application and coating of modification liquid onto the electrolyte membrane 【Benefits of Introducing Cavro Centris】 - Dramatic improvement in coating quality due to pulsation-free liquid delivery - Minimization of loss of expensive catalyst materials through "drop" control - Robust design that withstands harsh slurry characteristics - Continuous flow achieved through tandem operation (using two units)

In semiconductor manufacturing, where precise pattern formation and advanced process control are required, accurate dispensing of chemicals is essential. The Cavro pump series from Tecan provides optimal solutions for precise liquid delivery in the range of 1μl to 50ml, making it easy to integrate into customers' equipment. Syringe Pumps: Centris, Xcalibur, XLP6000 Multi-channel Syringe Pump: XMP6000 Delivery Speed: 17nl/min to 2.4L/min (actual dispensing volume monitored via encoder) Reliable liquid delivery at actual capacity without relying on flow controller adjustments. [Application Scenes] - Spin coating - Spray coating - Precise droplet dispensing of photoresist onto wafers - Slurry addition in chemical mechanical polishing (CMP) - Chemical formulation in cleaning and etching processes - Automatic titration adjustment - Automatic dilution - Additive management in plating processes (electrolytic and non-electrolytic) - Packaging processes, etc.

Fully compatible with semi-additive manufacturing methods, achieving high reproducibility and easy precise flow rate adjustment, realizing CV of 0.05% at a low cost. Flow rate control from the start with a liquid delivery unit that does not depend on external pressure! Liquid delivery volume range per operation: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 250μl syringe is installed Volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec) Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to switch liquid paths and up to 12-port valves can be installed.

Fully compatible with semi-additive manufacturing methods, achieving high reproducibility and easy precise flow rate adjustment, realizing CV of 0.05% at a low cost. Flow rate control from the start with a liquid delivery unit that does not depend on external pressure! Liquid volume range for a single delivery: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec to) (※) ※ Depends on the capacity of the installed syringe. Example: When a 250μl syringe is installed Volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec to) Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to switch liquid paths and 12-port valves can be installed.

Fully compatible with semi-additive manufacturing methods, achieving high reproducibility and easy precise flow rate adjustment, realizing CV of 0.05% at a low cost. Flow rate control from the start with a liquid delivery unit that does not depend on external pressure! Volume range for a single delivery: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec to) (※) ※ Depends on the capacity of the installed syringe Example: When a 250μl syringe is installed Volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec to) Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to switch liquid paths and 12-port valves can be installed.

Significant achievements in semiconductor manufacturing and plating solution management devices. High reproducibility and easy precise flow rate adjustment, achieving CV of 0.05% at a low cost. Optimizing flow rate and flow volume based on solution material is extremely simple! Liquid volume range for a single delivery: 1nl to 50ml Liquid volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec to) (※) ※ Depends on the capacity of the syringe installed Example: When a 250μl syringe is installed Liquid volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec to) Example: When a 10ml syringe is installed Liquid volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices. Contributes to a decrease in the failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to 12-port valves for liquid path switching can be installed.

Optimal for dropping resist liquid with spin coaters and slit coaters. Affordable with high reproducibility (CV value: 0.05%). Flow rate control from the start by a delivery unit that does not depend on external pressure and flow controllers! Single delivery volume range: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl to Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Equipped with a thorough management function for discharge volume and speed using an encoder, as well as a reporting function to notify errors in case of abnormalities. Easy operation linkage with I/O terminals. Maintenance timing is easily managed with the operation amount memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution command with 6000 or 48,000 steps. Three-way valves to switch liquid paths and 12-port valves can be installed.

Ideal for dispensing resist liquid droplets for spin coaters and slit coaters. Affordable with high reproducibility (CV value: 0.05%). Flow rate control from the dispensing unit that does not depend on external pressure and flow controllers! Liquid volume range per dispensing: 1nl to 50ml Liquid volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 10ml syringe is installed Liquid volume adjustment unit: minimum 0.2μl to Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Equipped with a thorough management function for discharge amount and speed using an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage with I/O terminals. Simple management of maintenance timing with operating amount memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution command with 6000 or 48,000 steps. Three-way valves to switch liquid paths and up to 12-port valves can be installed.

Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) at a low cost. It allows for easy control of flow rate from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) *Dependent on the capacity of the installed syringe. Example: When a 2.5ml syringe is installed Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. It has a working volume memory function. Built robustly to reduce service costs for embedded devices and contributes to lowering the failure occurrence rate of the equipment.

Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy control of flow rate from the start with a delivery unit that does not depend on unstable external pressure and flow controllers. Volume range per delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) * Depends on the capacity of the installed syringe. Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy linkage operation with I/O terminals. Has a working volume memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

Achievements in the introduction of PCR devices for the detection of the novel coronavirus by manufacturers worldwide. Numerous implementations in high-sensitivity immunoassay devices. Short-term development of devices that reliably detect infections. - Wearable disposable chips: Chips ranging from 10μl to 1ml (liquid volume range: less than 1μl to 1000μl) can be attached using one type of unit. Grades for gene samples for PCR testing are also provided. Filters to prevent false positives in genetic testing are also available. - Easy device integration and liquid control: Communication and power supply are managed solely through the DA15 adapter. Liquid suction, discharge, and speed control can be easily managed via commands without directly controlling the stepper motor. No liquid path design is required, making adjustments simple. - Simple dispensing sequence design and operational assurance: Liquid level detection (to prevent cross-contamination and accuracy fluctuations) and automatic chip ejection can be executed with a single command. Liquid transfer operations are confirmed using an encoder. Functions for recognizing the presence of chips and monitoring pressure during liquid suction (detecting air suction, blockage from floating debris, bubble suction, etc.) ensure reliable dispensing operations. *For more details, please click the "Download Catalog" button below. ↓

Fluid control syringe pump that prevents waste of expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy flow rate control from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml Volume adjustment unit: minimum 2nl and above Adjustable flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min and above (2nl/sec) *Depends on the syringe capacity used Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl and above Adjustable flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min and above (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. Memory function for operating volume. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

＝＝＝＝＝ Overview ＝＝＝＝＝ The Tekan Cavro XCalibur is a compact, lightweight OEM syringe pump with high dispensing accuracy. In recent years, the Excalibur has been applied to analytical devices and clinical diagnostic equipment worldwide due to its performance and robustness, and it is actively incorporated into our automatic dispensing systems. It is suitable for product development that requires space-saving and high dispensing accuracy. It is fully compliant with RoHS III. The valve supports various liquid path switching (from 3-way valves to 12-port valves). The photo shows a model equipped with a specially designed valve. Additionally, a new solenoid valve type has also been released. Usage examples: Blood sample pretreatment devices, in vitro diagnostic reagent analytical devices, analytical devices involving titration processes, coating and dispensing of semiconductor wafers, plating solution management, solid-phase extraction, automatic elemental analyzers, manufacturing of stick-type test reagents, and more. Features for continuously monitoring flow rate and flow speed are included. Compatible syringe capacities: 50μl to 5ml (please refer to the catalog). (*Demo and pump rental (including evaluation kits) are available.) For detailed specifications, please click "Download Catalog" below.

The Centris Pump is a compact syringe pump module for device integration that offers high accuracy, reliability, and reproducibility, with extremely low pulsation. The new Centris Pump features a simple and robust mechanical design that requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. Applications: Flow cytometers, micro-dosing in wafer manufacturing, titration devices, microfluidics, thin-layer chromatography production, pathogen detection devices, atmospheric analysis devices, and more. ★ Please download the catalog to view the technical specifications ★ ＝＝＝＝＝ Features ＝＝＝＝＝ - Can be equipped with long-life ceramic valves - High reproducibility: 0.05% CV or less/FS - High resolution: 181,490 steps (liquid delivery volume and flow rate can be adjusted in increments of 0.3 nl) - Programmable flow rate: 5 nl/s to 12.5 ml/s (up to one stroke possible in 50 hours) - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.