日本エンギス Product Lineup

The high-pressure FMD lamp is an optical flatness measurement device that replaces the old helium lamp. The green day temporary (wavelength: 5461Å) supports the optical flat and vividly displays interference fringes on the mirror surface.

• LED Module

Used when replacing the base plate (wrapping plate). <Product lineup> - For 15 inches: LB-80 type (Maximum load capacity: 80kg) - For 24 inches: LB-350 type (Maximum load capacity: 350kg) - For 15 inches: LB-1000 type (Maximum load capacity: 1000kg)

• LED Module

It is used to remove shavings from the grooves of the record.

• LED Module

Polishing cloths are used to finish to a mirror surface after wrapping, in case there are still smaller scratches remaining, to remove those scratches. <Lineup> - Woven type (9450, 9415, 410) - Flocked type (4FV4, 432, 437) - Compressed hair type (434, 530N) - Suede type (540N)

• LED Module

The compact vertical grinding machine from the "Trinity-Y" series has been born. It is particularly suitable for grinding hard and brittle materials, making it ideal for small lot production and research and development institutions. Furthermore, by combining it with other Trinity-Y models, space-saving can be achieved, allowing for the construction of a highly functional processing system without waste. Additionally, combining it with other Trinity-Y models enables space-saving and the creation of an efficient, high-performance processing system. 【Specifications】 [HVG-200/HVG-250] ○ Maximum workpiece size: equivalent to 6-inch wafer / equivalent to 8-inch wafer ○ Maximum grinding wheel diameter: φ200mm / φ250mm For more details, please contact us or download the catalog.

• Grinding Machine

The horizontal grinding machine "EHG-170AV" performs grinding operations while the grinding wheel axis and work axis rotate in opposite directions. The grinding wheel axis also oscillates left and right, enabling high processing efficiency and high precision flatness. By selecting the appropriate grinding wheel, it demonstrates effective power on almost all workpieces, including ceramics, and a wide range of difficult-to-machine materials. 【Specifications】 [EHG-170AV/EHG-250NC] ○ Maximum workpiece size: equivalent to 6-inch wafer / equivalent to 8-inch wafer ○ Maximum grinding wheel diameter: φ180mm / φ250mm ○ Rotational speed: maximum 2,500rpm / maximum 2,000rpm For more details, please contact us or download the catalog.

• Grinding Machine

The "Facing Unit" can be mounted on the ultra-precision single-sided lapping device "EJW Series." Models equipped with the Facing Unit allow anyone to easily correct the flatness of the lapping plate in just a few minutes. <Features> - High-precision plate correction is possible for anyone with ease. - In higher models (GNC), spiral groove machining on the plate is also possible.

• Other processing machines

The DMP pad is a woven type pad made from strong fibers. It is specifically designed for diamond abrasives, demonstrating high polishing performance while maintaining surface roughness. It is particularly suitable for the pre-processing of hard and brittle materials in CMP. <Lineup> - For rough finishing: DMP-R10 - For finishing pad: DMP-F66

• LED Module

The ultra-precision single-sided lapping machine 'EJW-400IF' is a highly versatile device that can be equipped with a facing device. The model with the facing attachment allows anyone to easily correct the flatness of the lapping plate in just a few minutes. In lapping processes that rigorously pursue accuracy, it is always possible to obtain workpieces with stable flatness. 【Usable plate outer diameter: Φ380 mm】 <Features> - Can be used for polishing various materials by selecting different plates (lapping plates) - Equipped with a facing device (automatic plate correction device) - Standard water cooling mechanism (additional cooling equipment required) - Compatible with various options* *Please feel free to consult us if you have any requests.

• Other processing machines

The ultra-precision single-sided lapping machine 'EJW-460IF' is a highly versatile device equipped with a facing device. The model with the facing attachment allows anyone to easily correct the flatness of the lapping plate in just a few minutes. In lapping processes that rigorously pursue accuracy, it is always possible to obtain workpieces with stable flatness. 【Usable plate outer diameter: Φ460 mm】 <Features> - Can be used for polishing various materials by selecting different plates (lapping plates) - Equipped with a facing device (automatic plate correction device) - Standard water cooling mechanism (cooling device required separately) - Compatible with various options* *Please feel free to consult us if you have any requests.

• Other processing machines

The ultra-precision single-sided lapping machine 'EJW-610IF' is a highly versatile device that can be equipped with a facing device. The model with the facing attachment allows anyone to easily correct the flatness of the lapping plate in just a few minutes. In lapping processes that rigorously pursue accuracy, it is always possible to obtain workpieces with stable flatness. 【Usable plate outer diameter: Φ610 mm】 <Features> - Can be used for polishing various materials by selecting different plates (lapping plates) - Capable of being equipped with a facing device (automatic plate correction device) - Standard equipped with a water cooling mechanism (cooling device required separately) - Compatible with various options* *Please feel free to consult us if you have any requests.

• Other processing machines

The ultra-precision single-sided lapping machine 'EJW-710IF' is a highly versatile device equipped with a facing unit. The model with the facing unit allows anyone to easily correct the flatness of the lapping plate in just a few minutes. In lapping processes that thoroughly pursue precision, it is always possible to obtain workpieces with stable flatness. 【Usable plate outer diameter: Φ710 mm】 <Features> - Can be used for polishing various materials by selecting the appropriate plate (lapping plate). - Capable of equipping a facing unit (automatic plate correction device). - Standard equipped with a water cooling mechanism (cooling device required separately). - Compatible with various options* *Please feel free to consult us if you have any requests.

• Other processing machines

The ultra-precision single-sided lapping device 'EJW-910IF' is a highly versatile machine equipped with a facing device. The model with the facing attachment allows anyone to easily correct the flatness of the lapping plate in just a few minutes. In lapping processes that rigorously pursue accuracy, it is always possible to obtain workpieces with stable flatness. 【Usable plate outer diameter: Φ910 mm】 <Features> - Can be used for polishing various materials by selecting the appropriate plate (lapping plate) - Capable of being equipped with a facing device (automatic plate correction device) - Standard water cooling mechanism (cooling device required separately) - Compatible with various options* *Please feel free to consult us if you have any requests.

• Other processing machines

The ultra-precision single-sided lapping machine 'EJW-1200IF' is a highly versatile device equipped with a facing unit. The model with the facing unit allows anyone to easily correct the flatness of the lapping plate in just a few minutes. In lapping processes that thoroughly pursue precision, it is always possible to obtain workpieces with stable flatness. 【Usable plate outer diameter: Φ1200 mm】 <Features> - Can be used for polishing various materials by selecting the appropriate plate (lapping plate) - Capable of equipping a facing unit (automatic plate correction device) - Standard equipped with a water cooling mechanism (cooling device required separately) - Compatible with various options* *Please feel free to consult us if you have any requests.

• Other processing machines

A compact and multifunctional CMP-compatible double-sided polishing device in size 6B has been developed from the "Trinity-Y" series. It is made with a full stainless steel dust cover and thoroughly uses corrosion-resistant materials throughout, making it suitable for all types of slurries and ideal for simultaneous double-sided polishing of difficult-to-machine materials. Additionally, by combining it with other Trinity-Y models, space-saving can be achieved, allowing for the construction of a highly functional processing system without waste.

• Wafer processing/polishing equipment

There are various types of polishing liquids.

• Lubricants
• Chemicals
• others

The precision double-sided wrapping machine EJD-6BY is particularly suitable for wrapping materials that require strict parallelism.

• Other surface treatment equipment