日本エム・ケー・エス List of Products and Services

This is an introduction to Japan MKS Inc., which develops, manufactures, and supplies equipment, components, and subsystems for the measurement, control, and analysis of gases used in various manufacturing processes, including semiconductor and FPD manufacturing, as well as the development, manufacturing, and supply of reactive gas generators and power supplies. *For more details, please refer to the PDF document or feel free to contact us.*

• Other measurement, recording and measuring instruments

This is an introduction to Japan MKS Inc., which develops, manufactures, and supplies equipment, components, and subsystems for the measurement, control, and analysis of gases used in various manufacturing processes, including semiconductor and FPD manufacturing, as well as the development, manufacturing, and supply of reactive gas generators and power supplies. *For more details, please refer to the PDF document or feel free to contact us.*

• others

The "MultiGas TFS Monitor" is a 19-inch rack-mounted, online, multi-gas compatible trace gas monitoring device. It utilizes Tunable Filter spectroscopy technology, which enables high selectivity and stable measurements. This allows for low-cost, high-performance analysis of trace hydrocarbons, moisture, CO, CO2, and N2O, replacing traditional analytical methods. Additionally, the permanent calibration feature eliminates the need for expensive calibration reference gases. 【Features】 ■ High analytical performance ■ Low detection limits, high stability, and a wide range of linearity ■ Integration-ready system that reduces complex setup and installation work ■ Permanent calibration feature eliminates the need for expensive calibration reference gases ■ Low COO (cost of ownership), easy installation and maintenance *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments
• Analytical Equipment and Devices

The "Series 355" is a vacuum gauge for high vacuum applications that combines a world-class miniaturized ion gauge with control electronics, offering a compact, simple, highly reliable, and low-cost solution. It is equipped with many features that enable more accurate and reproducible measurements in the vacuum range of 6.66 Pa to 1.33×10^-7 Pa compared to traditional Baird-Alpert gauges. The transducer includes an analog output and an RS485 or DeviceNet interface. Additionally, the analog output and DeviceNet versions come with a pressure display digital display option. 【Features】 ■ Compact, simple, highly reliable, low-cost vacuum measurement ■ Vacuum pressure measurement of 1.33×10^-7 Pa (10^-9 Tor/10^-9 mbar) ■ Dual filament extends the operating time of the device ■ Ultra-clean design provides fast response during pump-down ■ Robust all-metal package compliant with CE, featuring excellent RF and noise resistance transducer *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "Type GM51A" is a mass flow controller with a metal seal of 1.125" (28.6mm) width, suitable for a wide range of applications, with a full-scale flow rate of 5sccm to 50slm converted to N2. It combines a proven patented thermal sensor design with digital flow control electronics. With digital control electronics using the MKS control algorithm, it provides a standard response time of 500 msec and a fast, highly reproducible response to flow set points. It can be used in a multi-range for various gas types with a full-scale flow rate of 5sccm to 50slm converted to N2. Parameters for over 100 types of gases and gas mixtures are already registered in memory. The electropolished metal seal makes it suitable for high-purity process applications. 【Features】 ■ Excellent zero stability due to patented thermal sensor design ■ High precision and accurate process control at a set point of 1% (calibration gas) ■ Built-in user interface ■ Easy to change range and gas type, reducing inventory ■ In-situ equipment monitoring and data collection possible *For more details, please refer to the PDF document or feel free to contact us.

• controller
• Other process controls

The "High-Precision Pressure Measuring Device" is a system based on capacitance diaphragm sensor technology and solid-state electronics. It is equipped with functions required in cutting-edge processes and measurement fields, supporting high-precision measurements regardless of manufacturing lines or measurement laboratories. The MKS high-precision Baratron, which has a long-standing reputation as a standard model for pressure measurement in manufacturing and research environments, offers various pressure ranges, accuracies, options, and accessories, allowing users to select specifications suitable for their applications. 【Features】 ■ Excellent temperature stability achieved with a very low temperature coefficient ■ Provides high-precision pressure measurement among sensors of the same type ■ Measurement is conducted with a set of Type 670B signal conditioner and sensor ■ Suitable as a secondary standard for pressure calibration ■ Capable of measuring multiple sensors with a single device through 6-digit measurement (with resolution limitations) *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

"R*evolution V" is a product that integrates proven low magnetic field toroidal plasma technology, advanced communication capabilities, and high-precision power control functions. The remote plasma source in this series is suitable for oxygen radical-based applications such as photoresist stripping and various surface treatments. Additionally, the EtherCAT communication protocol enables near real-time information provision of critical plasma source operating parameters to process tools and factory networks. This product can circulate information to process tools and factory databases to support monitoring and modification of process parameters and operational diagnostics (APC/FDC) applications, ensuring high operational rates of process tools. [Features] - Function-integrated unit that can be directly installed in the chamber - Quartz applicator for high-density oxygen-based plasma - Output up to 6kW - High output reproducibility - High precision output control <1% *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "AIRGARD CWA/TIC" is an ultra-high sensitivity gas analyzer that rapidly detects toxic gases using Fourier Transform Infrared Spectroscopy. It is capable of detecting most CWAs and TICs at ppb levels below toxic IDLH levels within 20 seconds. With its low-level detection capability and fast response, it ensures sufficient time for appropriate action in the event of a need for air conditioning system shutdown, indoor evacuation, or evacuation from a disaster area. Thorough testing has been conducted by the U.S. Department of Defense to prevent unnecessary outdoor evacuations, associated business shutdowns, and emergency notifications. 【Features】 ■ Detection limit in the low ppb range - identifies and alerts on a wide range of harmful substances ■ Standard time to issue alerts and identify harmful chemicals is less than 20 seconds ■ Self-contained unit with built-in computer and sampling pump ■ Continuous atmospheric monitoring capability (7 days a week / 24 hours) ■ Remote troubleshooting capability *For more details, please refer to the PDF materials or feel free to contact us.

• Logic Analyzer

The "Type AA07A/Type AA08A" is a high-precision pressure transducer with excellent value and performance. It features an extremely low thermal coefficient due to its robust sensor housing made of Incoloy, allowing it to be used over a wide temperature range. With high precision, long-term stability, and a low thermal coefficient, it achieves the measurement reproducibility required for today's gas measurement applications. 【Features】 ■ Excellent value and performance ■ The gas contact parts are made of Incoloy, suitable for measuring corrosive gases and liquids ■ Available in output types of 0-5VDC, 0-10 VDC, and 4-20mA two-wire ■ High pressure resistance specifications guarantee zero point reproducibility and long-term stability of performance ■ Percentage accuracy of readings provides excellent results in low pressure ranges *For more details, please refer to the PDF document or feel free to contact us.

• Converters and Transducers

The "1179C" is a versatile mass flow controller compatible with various applications. It has a full-scale range from 10 sccm to 20 sim and enables high-speed, highly reproducible flow control down to a low flow rate of 0.2 sccm. Additionally, by connecting a compatible pressure transducer, it can also be used as a pressure control device. It can be directly replaced with most common MFCs. The electrical connector is a D-sub connector with the same pin configuration, signals, and functions as industry standards, eliminating the need for changes to cables or connectors. It is compatible with MKS and other manufacturers' MFC power supplies and displays. 【Features】 ■ Supports demanding processes ■ Excellent zero stability due to patented sensor design ■ Accurate and highly reproducible flow measurement and control across a full-scale range of 10 sccm to 20 sim ■ Analog accuracy at full scale in percentage ■ Reduced downtime with fast warm-up ■ Compatible with other MKS MFCs and power readouts *For more details, please refer to the PDF document or feel free to contact us.

• controller

The "Baratron 600 Series" is a RoHS-compliant absolute capacitance manometer designed to provide accurate and highly reproducible pressure and vacuum measurements even in harsh process environments. It is utilized as the most stable low-pressure measurement pressure transducer. 【Features】 ■ Achieves a minimum of 2.66 Pa F.S. ■ Directly measures total pressure regardless of gas composition ■ Measures up to 1×10^-4 F.S. with % accuracy ■ Various lineups from temperature-controlled types up to 200°C to those with setpoint relays ■ Corrosion-resistant structure made of all Inconel or Incoloy nickel alloys *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

"MultiGas TM Purity" is an FTIR-based analyzer capable of detecting ppb-level impurities in high-purity bulk process gases. It excels in identifying impurities in bulk gases with high-resolution analysis. 【Features】 ■ Proven contribution to quality improvement in bulk gas manufacturing with gases such as NF3, NH3, and H2 ■ Configuration that accommodates corrosive high-purity gases ・Sample line and gas cell are made of welded 316SS ・Adopts a heated optical path to reduce contaminants from moisture and the atmosphere *For more details, please refer to the PDF document or feel free to contact us.

• others

"Paragon (R)" has achieved more suitable data transfer and control for next-generation nano process development and manufacturing, based on the characteristics of the MKS low magnetic field toroidal plasma source with a proven track record in mass production. It supports CVD and ALD/ALE process chamber cleaning, achieving high analytical efficiency (>98%) even under conditions of 8 slm NF gas flow and a maximum pressure of 10 Torr. 【Features】 ■ Maximum NF flow rate of 8 slm, compact design reduces cleaning time ■ Unique plasma block design with PEO coating improves process performance and lifespan ■ RoHS compliant, CE, S2, F47 *For more details, please refer to the PDF document or feel free to contact us.

• others

The "DA03A" is a RoHS-compliant digital high-temperature type Baratron® capacitance manometer. By operating at high temperatures, it minimizes the deposition of process by-products inside the sensor. This nearly eliminates output drift caused by by-product accumulation. It can be used at operating temperatures of 150°C or 160°C, making it suitable for the most demanding and harsh vacuum processes in semiconductor manufacturing, such as metal etching and insulating film CVD. 【Features】 ■ High-temperature operation at 150°C and 160°C ■ All Inconel capacitance sensor ■ Space-saving compact design ■ Stable performance regardless of gas type ■ EU RoHS compliant *For more details, please refer to the PDF document or feel free to contact us.

• others

■F.S. Range: 1.33×10<SUP>1</SUP> to 3.33×10<SUP>6</SUP> Pa ■Accuracy: 0.05 to 0.12% ■Significant Figures: 6 digits ■Temperature Control: 45°C

• Other semiconductor manufacturing equipment

This is an RGA device that determines the quality of vacuum in the apparatus (normal/abnormal). Until now, RGA management control, which had distance limitations using serial cables or LAN (Ethernet), can now be accessed from anywhere in the world where there is an internet connection, allowing control beyond distances. Not only does it improve ease of use, but it also opens up new possibilities for process monitoring and e-Diagnostics. 【Specifications】 ◇Mass range: 1-100 / 1-200 amu ◇Resolution: ≦10% valley (between peaks of the same height within the mass range) 【Features】 ○Low cost & compact 1.9 kg (controller weight) ○Easy installation and can be used with minimal maintenance. ○Built-in Ethernet interface of 10Base-T and embedded web server, enabling direct operation using the internet environment. *For more details, please inquire through the document request.

• Other semiconductor manufacturing equipment

The latest model provided by MKS, which has a long track record in high-temperature controlled vacuum gauges, features a compact integrated design and achieves low power consumption.

• Other semiconductor manufacturing equipment