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This is an analysis case of a counter-target sputtering method, which is one of the film deposition techniques that causes low damage to the substrate. 3D calculations have a higher computational cost compared to 2D calculations, but they allow for simulations that take into account more complex shapes and their effects. ◇ Features of 'Particle-PLUS' - Specializes in low-pressure plasma analysis. - By combining axisymmetric models with mirror-symmetric boundary conditions, results can be obtained quickly without the need to simulate the entire device. - Excels in plasma simulations in low-pressure gases, where calculations using fluid models are challenging. - Supports both 2D and 3D, allowing for efficient analysis even with complex models. - As a strength of our in-house developed software, customization to fit the customer's equipment is also possible. ◆ Various calculation results can be output ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the walls - Energy spectrum of electrons and ions at the walls - Density distribution/temperature distribution/velocity distribution of neutral gas and more. *Please feel free to contact us for more details.

This is an analysis case of magnetron sputtering using a cylindrical target, which is one method for forming a strong film on the inside of a long cylindrical pipe. By combining the axisymmetric model and mirror symmetry boundary conditions available in Particle-PLUS, it is possible to obtain results quickly without the need to simulate the entire device. ◇ Features of 'Particle-PLUS' - It excels in low-pressure plasma analysis. - By combining the axisymmetric model and mirror symmetry boundary conditions, it allows for rapid results without the need to simulate the entire device. - It specializes in plasma simulations for low-pressure gases, where calculations using fluid models are challenging. - It supports both 2D (two-dimensional) and 3D (three-dimensional) analyses, enabling efficient analysis of complex models. - Customization is possible as a strength of our in-house developed software. ◆ Various calculation results can be output ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the wall - Energy spectrum of electrons and ions at the wall - Density distribution/temperature distribution/velocity distribution of neutral gas and more. *Please feel free to contact us for more details.

It is said that we have entered an era where the use of machine learning and AI is desired in research and development. Our company assists in improving operational efficiency by utilizing machine learning and AI. Experienced engineers will propose various plans tailored to our customers' needs, such as "packaged software sales" and "contract analysis." Please feel free to contact us when you need assistance. 【Software We Handle】 ■ Predictive modeling tool "Neural Designer" ■ Plasma analysis "Particle PLUS/DL" ■ Data science tool "Pipeline Pilot" ■ Material development analysis software "Materials Studio" ■ Electronic lab notebook "BIOVIA Notebook" *For more details, please refer to the PDF materials or feel free to contact us.

"Particle-PLUS" is software suitable for research and development of devices using plasma, compatible with ICP and CCP. - Excels in simulations of low-pressure gases where fluid modeling is difficult - Calculation functions for inductive heating for ICP simulations - Advanced physical model analysis such as CCP and external circuit models - Capable of simultaneously simulating ICP and CCP - Supports 2D and 3D, efficiently analyzing complex models - As a strength of our in-house developed software, customization to fit customer devices is possible ◆ Supports various cases ◆ - Magnetron sputtering - PVD, plasma CVD - Capacitively coupled plasma (CCP) - Dielectric barrier discharge (DBD), etc. ◆ Outputs various calculation results ◆ - Potential distribution - Density distribution/temperature distribution/generation distribution of electrons and ions - Particle flux and energy flux to the wall - Energy spectrum of electrons and ions at the wall - Density distribution/temperature distribution/velocity distribution of neutral gas, etc. *For more details, please feel free to contact us at sales@wavefront.co.jp.

This time, the goal was to grasp the trends of optimal experimental conditions by predicting characteristic values. <Background> From traditional to modern times, developing materials with better characteristic values is an important task across all fields and remains a significant challenge. Additionally, since the characteristic values of materials can be influenced by various factors, there is a demand for increased efficiency in material development. For instance, factors such as the materials used during development, reaction time, temperature, and hysteresis may also affect the results. While it is ideal to introduce experimental design methods for all these conditions and discover optimal conditions through actual experiments and measurements, this is not realistic from a cost and time perspective. Therefore, we conducted machine learning using a small dataset that recorded several experimental conditions (for example, explanatory variables X1, X2, X3, X4, ...) and their respective characteristic values (for example, objective variables Y1, Y2). In this case, we were able to easily perform machine learning to create a model and improve prediction accuracy. *For more details, please contact us.*

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation, water hammer effect ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Flow field (velocity vectors, pressure), flow rate, fluid forces, and time variation of torque Recently, there has been an increase in projects for oil cooling analysis of eAxles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine calculation meshes - It diverges and does not converge Additionally, even when analyzing with particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it can only determine the areas where oil is present. Our company undertakes actual contract work from Tier 1 customers, gaining know-how that cannot be obtained solely from software sales. Development source's SAE presentation paper on motor oil cooling https://saemobilus.sae.org/content/2020-01-0168/

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation, water hammer effect ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque Recently, there has been an increase in projects for oil cooling analysis of E-Axles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine computational meshes - The solution diverges and does not converge Additionally, even when analyzing with particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it is only possible to determine the areas where oil is present. Our company has gained know-how that cannot be obtained solely from software sales by actually undertaking contract work from Tier 1 customers. Development source's SAE presentation paper on motor oil cooling https://saemobilus.sae.org/content/2020-01-0168/

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in the liquid ■ Pressure pulsation, water hammer effect ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque Recently, there has been an increase in projects for oil cooling analysis of e-axles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries regarding: - Excessive analysis time - Difficulty in creating fine computational meshes - Divergence and failure to converge Additionally, even when analyzing with particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it is only possible to determine the areas where oil is present. Our company has gained know-how that cannot be obtained solely from software sales by actually undertaking contracted work from Tier 1 customers. SAE presentation paper on motor oil cooling from the developer: https://saemobilus.sae.org/content/2020-01-0168/

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation, water hammer effect ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque Recently, there has been an increase in projects for oil cooling analysis of e-axles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine computational meshes - It diverges and does not converge Additionally, even when analyzed using particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it only provides a rough idea of where the oil is located. Our company has gained know-how that cannot be obtained solely from software sales by actually undertaking contracted work from Tier 1 customers. Development source's SAE presentation paper on motor oil cooling https://saemobilus.sae.org/content/2020-01-0168/

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation, water hammer effect ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque Recently, there has been an increase in projects for cooling analysis of eAxles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine computational meshes - The solution diverges and does not converge Additionally, even when analyzing with particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it can only determine the areas where oil is present. Our company undertakes actual contracted work from Tier 1 customers, gaining know-how that cannot be obtained solely from software sales. Development source's SAE presentation paper on motor oil cooling https://saemobilus.sae.org/content/2020-01-0168/

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation, water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Time variation of flow field (velocity vectors, pressure), flow rate, fluid forces, and torque Recently, there has been an increase in projects for cooling analysis of E-Axles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine calculation meshes - The analysis diverges and does not converge Additionally, even when analyzed using particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it is only possible to identify areas where oil is present. Our company undertakes actual contracted work from Tier 1 customers, gaining know-how that cannot be obtained solely from software sales. Development source's SAE presentation paper on motor oil cooling: https://saemobilus.sae.org/content/2020-01-0168/

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsations, water hammer effects ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Flow field (velocity vectors, pressure), flow rate, fluid forces, and time variations of torque Recently, there has been an increase in projects for cooling analysis of e-axles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine computational meshes - The solution diverges and does not converge Additionally, even when analyzing with particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it is only possible to identify areas where oil is present. Our company has gained know-how that cannot be obtained solely from software sales by undertaking actual contract work from Tier 1 customers. SAE presentation paper on motor oil cooling from the developer: https://saemobilus.sae.org/content/2020-01-0168/

【The following fluid analyses are possible】 ■ Free surface flow ■ Flow considering the compressibility of air contained in liquids ■ Pressure pulsation, water hammer effect ■ Coupling of pump flow with the rigid body motion of valves and cam rings ■ Flow in low to medium vacuum conditions ■ Compressible flow (subsonic) ■ Cavitation ■ Flow field (velocity vectors, pressure), flow rate, fluid forces, and torque over time Recently, there has been an increase in projects for cooling analysis of e-axles for automobiles, and when solving the VOF method with other CFD software, we have received inquiries such as: - Analysis time is too long - It is difficult to create fine computational meshes - The analysis diverges and does not converge Additionally, even when analyzed using particle methods, we have received feedback that accurate thermal analysis cannot be performed, and it is only possible to determine the areas where oil is present. Our company has gained know-how that cannot be obtained solely from software sales by actually undertaking contracted work from Tier 1 customers. SAE presentation paper on motor oil cooling from the developer https://saemobilus.sae.org/content/2020-01-0168/

Simulation Analysis of Dust Behavior Affecting Contamination Initially compatible with various simulations 【Features】 ■ By adopting unstructured meshes, it is possible to compute the exact shape of complex actual devices. ■ High parallel efficiency allows for quick computation results even for large-scale shapes. ■ Since a particle method is used, unlike fluid models, convergence solutions can be obtained even with poor-quality computational grids. ■ With comprehensive technical support, even those new to simulations or busy with experiments can reliably achieve results. ◆ Supports various case studies ◆ - Simulation of rarefied gas flow in a vacuum chamber - Simulation of thin film generation in semiconductor manufacturing - Simulation of thin film generation in semiconductor manufacturing such as Chemical Vapor Deposition (CVD), Organic EL (OLED), and Molecular Beam Epitaxy (MBE) ◆ Outputs various computational results ◆ - Calculation of chemical reactions - Calculation of chemical reactions from Arrhenius-type reaction data - Calculation of dissociation, recombination, and molecular (atomic) exchange reactions - Multiple reaction equations can be set up on the GUI *We also offer contract analysis, so please feel free to contact us.*

**Features** - Adopts unstructured mesh, allowing for calculations that accurately reflect the complex shapes of actual devices. - High parallel efficiency enables quick computation results even for large-scale geometries. - Utilizes a particle method, ensuring convergence to a solution even with poor-quality computational grids, unlike fluid models. - Comprehensive technical support ensures that even those new to simulation or busy with experiments can reliably achieve results. **Supports Various Cases** - Simulation of rarefied gas flow in a vacuum chamber. - Simulation of thin film generation in semiconductor manufacturing. - Chemical vapor deposition (CVD), organic light-emitting diode (OLED), molecular beam epitaxy (MBE). - Film deposition simulations involving chemical reactions like CVD. **Outputs Various Computational Results** - Calculation of chemical reactions. - Calculation of chemical reactions from Arrhenius-type reaction data. - Calculation of dissociation, recombination, and molecular (atomic) exchange reactions. - Ability to set multiple reaction equations on the GUI. *For more details, please refer to the catalog or feel free to contact us.*

Simulation Analysis of Gas Flow in Shower Head Type CVD Equipment Initially compatible with various simulations 【Features】 ■ By adopting a non-structured mesh, it is possible to calculate the complex shapes of actual equipment as they are. ■ High parallel efficiency allows for quick computation results even for large-scale shapes. ■ Since a particle method is used, unlike fluid models, convergence solutions can always be obtained even with poor quality computational grids. ■ With comprehensive technical support, even those new to simulations or busy with experiments can reliably achieve results. ◆ Compatible with various cases ◆ - Simulation of rarefied gas flow in a vacuum chamber - Simulation of thin film generation in semiconductor manufacturing - Simulation of thin film generation in semiconductor manufacturing such as Chemical Vapor Deposition (CVD), Organic Light Emitting Diodes (OLED), and Molecular Beam Epitaxy (MBE) ◆ Outputs various computation results ◆ - Calculation of chemical reactions - Calculation of chemical reactions from Arrhenius-type reaction data - Calculation of dissociation, recombination, and molecular (atomic) exchange reactions - Multiple reaction equations can be set on the GUI *We also offer contract analysis, so please feel free to contact us.

"Particle-PLUS" is a simulation software suitable for research, development, and manufacturing of devices, materials, and systems using plasma. It allows for fast results without the need to simulate the entire device by combining axisymmetric models and mirror-symmetric boundary conditions. It supports both 2D (two-dimensional) and 3D (three-dimensional) analyses, enabling efficient analysis even for complex models. 【Features】 ■ Specializes in low-pressure plasma analysis ■ Allows for fast results without the need to simulate the entire device by combining axisymmetric models and mirror-symmetric boundary conditions ■ Excels in plasma simulation for low-pressure gases, which are difficult to compute with fluid models ■ Supports both 2D (two-dimensional) and 3D (three-dimensional) analyses, enabling efficient analysis even for complex models ■ Customization to fit customer devices is possible as a strength of in-house developed software *For more details, please refer to the PDF document or feel free to contact us.

The particle method plasma analysis software "Particle-PLUS," developed by Wavefront Inc., can analyze magnetron sputtering even in cases where there are microtrench structures on the substrate. "Particle-PLUS" is capable of simulating the film deposition process by calculating both the macro scale for the entire sputtering device on a substrate that includes microtrench structures and the micro scale for the areas with microtrench. *For more details, please download the PDF or feel free to contact us.*

The particle-based plasma analysis software 'Particle-PLUS' developed by Wavefront Inc. can analyze simultaneous magnetron sputtering in devices where the substrate and target are not in equilibrium. With the cut cell creation feature, it allows for high-precision electric field calculations characteristic of orthogonal grids while considering accurate shapes and normal directions. *For more details, please download the PDF or feel free to contact us.*