ヤマトマテリアル List of Products and Services

In addition to the ashing applications for semiconductor wafers and small substrates with photoresist, it is effective when you want to utilize processing from all directions using isotropic plasma. For mass production, please refer to the YSP650W, which processes 50 sheets at a time.

• Wafer
• Glass

This catalog features plasma devices handled by Yamato Material. In addition to demo units and the lineup of plasma devices, we also introduce "The Mechanism of RIE Plasma Treatment" and "The Mechanism of DP Plasma Treatment." Our company offers plasma devices tailored to the processing purposes of plasma dry cleaners, etchers (etching), and ashers (ashing), in both standard and custom-made options. We handle everything from planning to proposals in a consistent manner. [Contents] ■ Market and Applications ■ Explanation of Plasma Modes ■ Demo Unit Lineup ■ Plasma Device Lineup *For more details, please refer to the PDF materials or feel free to contact us.

• Etching Equipment
• Ashing device
• Other semiconductor manufacturing equipment

We offer a comprehensive service for the proposal, development, sales, installation, and after-support of production equipment and machinery in a wide range of fields, including beverages, cosmetics, and paints. Utilizing our expertise in packaging containers, we propose bottling systems such as filling machines, bottle washers, and labelers. We provide total support for optimal equipment from factory layout. Additionally, if requested, we can bring demo machines to your factory and confirm the filling conditions by having you send us the raw liquid, allowing us to operate the machines for verification. With our unique know-how and information capabilities, we propose the most suitable equipment to improve production efficiency and support the reduction of manufacturing costs. 【Business Content】 ■ We provide a comprehensive service from proposal, development, sales, installation, to after-support of production equipment and machinery in a wide range of fields, including beverages, cosmetics, and paints. *For more details, please refer to our catalog or feel free to contact us.

• Sterilizer
• Other packaging machines
• Clean Room

In this business, we propose optimal products and cost reductions with consideration for the environment. We offer a variety of innovative packaging containers made from various materials, including glass and plastic, taking into account safety and functionality, and providing them to a wide range of industries such as alcoholic beverages, food, cosmetics, toiletries, and sanitary products. Additionally, we pursue design and functionality tailored to specific industries and fields, and we are committed to developing original products that meet customer demands, including environmentally friendly products and the development of glass, PET bottles, and caps incorporating the latest technologies. **Features** - Over 10,000 diverse product variations - Support for product development - Various OEM for supplements, automotive products, etc. - Consistent proposals for container equipment - Cost reduction and environmental considerations through returnable options *For more details, please refer to our catalog or feel free to contact us.*

• Food containers and packaging
• Pharmaceutical containers and packages
• Cosmetic containers and packaging

Yamato Material Co., Ltd. is a specialized trading company primarily engaged in the fields of "containers and packaging," "production systems," and "electronics-related products." The New Materials Division conducts planning and sales from inspection and packaging to production equipment in the semiconductor and electronics fields. 【Business Overview】 ■ New Materials Division *For more details, please refer to the catalog or feel free to contact us.*

• Wafer

Converting mercury lamps used in factories, outdoor facilities, and sign lighting to LED significantly contributes to a substantial reduction in electricity costs (expenses). - Oil mist compatibility (metal parts factories, machinery factories, and other oil smoke environments) ➣ Tested with six types of oil agents specified by JIS K2241, all confirmed to be compliant. - Hydrogen sulfide compatibility (plating factories, metal processing factories, rubber, petroleum, and chemical factories) ➣ Gas corrosion tests conducted, durability confirmed. - High-temperature environment compatibility (casting, forging, steelmaking, heat treatment facilities, boilers, and incinerators) ➣ Tested at a temperature of 85°C, recommended up to +80°C. - Seismic resistance for crane installation (hoist cranes, gantry cranes) ➣ Passed strict testing conditions with uniquely designed seismic rubber. *Testing standard: JIS C 60068-2-27, standard reference.

• LED lighting
• Floodlight
• Other lighting equipment

In addition to conventional low-pressure plasma, atmospheric pressure (normal pressure) plasma is being developed in collaboration between industry and academia. Due to the thermal non-equilibrium of atmospheric pressure glow discharge plasma, low-temperature processing is possible.

• Other cleaning machines
• Other semiconductor manufacturing equipment
• Other semiconductors

It provides the highest level of resolution and contrast that overturns the common sense of non-destructive internal inspection. From tomographic image acquisition to measurement and analysis, everything is completed in one system. With standard, high-speed, and high-precision mode-specific scans, data can be collected in as fast as 160 seconds. A next-generation system that integrates an X-ray CT device with extensive and diverse image processing software functionalities.

• Image Processing Equipment
• Microscope
• X-ray inspection equipment

- Space-saving, ideal for research and development purposes - User-friendly, low-cost device that is easy to operate - Recommended vacuum pump PD139 - Dedicated to RIE mode

• Etching Equipment
• Ashing device
• Surface treatment contract service

This is a leak detection device that employs a distortion detection method for airtightness and waterproof performance testing. It conducts airtightness and waterproof performance tests by measuring the distortion on the surface of the workpiece that occurs when pressure is applied around it. Since it uses a non-submersion method with air pressure, there is no risk of damaging defective workpieces due to immersion. There are semi-automatic and automatic types available. It is equipped with two distortion sensors in the capsule, allowing simultaneous airtightness and waterproof testing of multi-chamber structures. The maximum measurement pressure is [0.05 MPa]. It excels in pressure resolution at low pressures, making it ideal for airtightness and waterproof testing of waterproof portable devices and multi-chamber structural components. It can be set in 1 kPa steps, allowing for stable leak detection at optimal test pressures, even for workpieces that are prone to deformation due to pressure.

• Other measurement, recording and measuring instruments
• Other PCs and OA equipment
• others

We offer high-performance devices at low prices. Ashing rate: over 300 Å, in-plane uniformity: ±20% or less, inter-batch uniformity: ±20% or less, processing capacity: 150 wafers/hour (calculated at RF0 minutes). We also provide low-cost batch-type ashers and etchers. We accept retrofitting of aging equipment as well.

• Ashing device
• Other semiconductor manufacturing equipment

Three-axis feeling (load) precision measuring device (load cell) Quantitative measurement of pushing, pulling, and twisting forces (loads).

• Other measurement, recording and measuring instruments

- Tabletop, low-cost, high-performance type - Usable from experimental to full-scale production - RIE mode standard (DP mode switch is optional) - Equipped with two mass flow meters for argon and oxygen - Standard oil rotary pump included We also customize based on standard models to meet customer requirements. Our company offers a wide range of products from small batch systems to medium and large batch systems, as well as various automated machines. The chamber structure supports a variety of types, including quartz barrels, parallel plates, and load-lock types. We also provide atmospheric pressure plasma options.

• Etching Equipment
• Ashing device
• Other semiconductor manufacturing equipment