大阪真空機器製作所 List of Products and Services

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation. It has a structural design that is resistant to atmospheric intrusion.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation and compact design with integrated power supply. It features a robust structural design that is resistant to atmospheric entry.

• Other pumps
• Vacuum Equipment
• Vacuum pump

It is a grease-lubricated bearing type turbo molecular pump, allowing for flexible installation orientation and compact design with integrated power supply. It has a structural design that is strong against atmospheric entry.

• Other pumps
• Vacuum Equipment
• Vacuum pump

In addition to standard and chemical types, we also offer various special specifications (ultra-low vibration, reaction product countermeasure specifications, ultra-high vacuum specifications, radiation-resistant specifications)!

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for a long time with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports exhaust over a wide range from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

**Features of the Compound Molecular Pump** ○ Wide Range Exhaust It supports a wide range of exhaust from low to ultra-high vacuum. ○ High Flow Exhaust It can handle a large volume of gas. ○ Excellent Durability It has a structure that is resistant to sudden atmospheric introduction. ○ Long-term Usability It can be used for an extended period with proper overhauling. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

【Product Features】 ○ The suction ratio can be extremely high. ○ Suction ratio = Suction steam volume / Drive steam volume ○ Simple structure with almost no failures The structure is exactly the same as that of a steam ejector. Additionally, large suction volumes can be produced at a low cost. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

The multi-jet condenser is a water ejector that also has condensation capabilities. 【Product Features】 ○ It serves both as an exhaust pump and a condenser, making it even more effective than a water ejector for exhausting condensable gases. ○ It has a check valve on the intake side, eliminating the need for an atmospheric leg and preventing backflow during power outages or water supply interruptions. ○ It possesses all the features of a water ejector. ● For other functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum Equipment
• Vacuum pump

A water ejector is an ejector that uses water as a driving source to suction and exhaust gas. It can achieve an inlet pressure equivalent to the vapor pressure of the driving water, making it effective for exhausting gases that contain condensable and corrosive gases, as well as dust. It can also be used as the final stage in a multi-stage steam ejector system.

• Other pumps
• Vacuum Equipment
• Vacuum pump

The ejector has a simple structure without mechanical drive components, so there are almost no occurrences of failure.

• Other pumps
• Vacuum Equipment
• Vacuum pump

A steam ejector is an ejector that uses gas as a driving source to suction and exhaust gas. It is characterized by its simple structure, low failure rate, and ease of handling. Additionally, by arranging multiple ejectors in series, it is possible to reach higher vacuum levels.

• Other pumps
• Vacuum Equipment
• Vacuum pump

In addition to being easily usable with standard combinations, we will propose the optimal combinations tailored to your specifications.

• Other pumps
• Vacuum Equipment
• Vacuum pump

This is a compact turbo molecular pump for analytical instruments. Since a small diaphragm pump can be used as an auxiliary pump, the device can be miniaturized, and its complete freedom of orientation also increases the flexibility of the device layout. It is a pump suitable for analytical and measurement instruments that require compactness, lightweight, and high performance.

• Other processing machines
• Analytical Equipment and Devices
• Other pumps

【Features】 ○ Pumps with exhaust speeds of 10,000 L/s (without baffles) or more are also available in the lineup. ○ Highly reliable ultra-high vacuum pumps with minimal pressure fluctuations due to the boiling of the operating fluid. ○ No mechanical moving parts, making them robust and long-lasting. ○ Simple structure allows for easy internal cleaning, maintenance, and inspection. ● For additional functions and features, please refer to the catalog or contact us.

• Other pumps
• Vacuum pump
• Vacuum Equipment

At Osaka Vacuum Co., our motto is to provide "reliable products that can be used with peace of mind, satisfaction, and for a long time." Based on a diverse lineup, we will offer the best vacuum systems tailored to user needs, backed by our solid technical capabilities and track record. 【Various Vacuum Systems】 ○ Vacuum systems using turbo molecular pumps ○ Vacuum systems using dry vacuum pumps ○ Vacuum systems using oil-sealed rotary vacuum pumps ○ Vacuum systems using liquid-sealed vacuum pumps ○ Vacuum systems using Roots vacuum pumps ○ Vacuum systems using ejectors ● For more details, please contact us.

• Development support tools (ICE, emulators, debuggers, etc.)
• Other pumps
• Testing Equipment and Devices

It is possible to obtain the reaching pressure near the vapor pressure of the sealing liquid, and it is often referred to as a water-sealed vacuum pump when water is used as the sealing liquid. 【Features】 ○ Various sealing liquids, including water, can be selected, allowing for the choice of the optimal sealing liquid according to the application, thus accommodating the exhaust of gases containing water vapor and organic solvents (condensable gases). ○ By circulating the sealing liquid in a closed (closed-cycle) system, it is also possible to minimize the generation of waste liquid. ○ By combining with other pumps, it can accommodate various processes. - By combining with a Roots pump, it achieves high exhaust and high vacuum with less energy (PRL series). - By combining with an Atmosstar (air ejector), it can favorably improve the reaching pressure and prevent cavitation (single-stage Atmosstar: WA series, two-stage Atmosstar: WB series). ● For more details, please contact us.

• Other pumps
• Vacuum pump
• Vacuum Equipment

Osaka Vacuum's efforts in the field of clean high vacuum are expanding alongside the development of research in physical sciences, as well as in the semiconductor and liquid crystal sectors. We strive to provide systems with high operability and productivity, ensuring that all equipment reflects the needs of our users. 【Vacuum Equipment Offered】 ○ Sputtering Equipment ○ Deposition Equipment ○ Vacuum Exhaust Equipment ○ Thin Film Equipment ○ FPD Manufacturing ○ Vacuum Environmental Testing Equipment ● For more details on various vacuum equipment, please contact us.

• Hydraulic Equipment

A vacuum pump that performs compression and exhaust by rotating a crescent-shaped rotor. 【Features】 ○ Installed in front of oil rotary vacuum pumps to increase exhaust speed, also referred to as a mechanical booster due to its mechanical vacuum pump nature. ○ Used in combination with vacuum pumps that can compress to atmospheric pressure, such as dry vacuum pumps, oil rotary vacuum pumps, and liquid-sealed vacuum pumps. ○ Compact design makes it easy to integrate into a system. ○ A belt-driven large Roots vacuum pump (R series) is also available in the lineup, suitable for applications requiring high exhaust, such as large chambers for space testing. ○ Inverter control allows operation from atmospheric pressure and pressure control under low intake pressure conditions. ● For other functions and details, please contact us.

• Other pumps
• Vacuum pump

【Features】 ○ Adopts a swinging piston design, which offers excellent durability and allows for a large intake space structurally, enabling efficient exhaust, making it ideal for large pumps. ○ Equipped with a mechanism that ensures proper oil supply even under harsh operating conditions, such as continuous operation in low vacuum areas or rapid cycling between atmospheric pressure and vacuum, allowing for long-term, reliable use. ○ Precision and robust design, with a structure that is easy to maintain. * With appropriate maintenance, there are examples of use for long periods, such as 20 or 30 years. ● For more details, please contact us.

• Other pumps
• Vacuum pump
• Vacuum Equipment