日本スターテクノ Product Lineup

Our representative technology is the dome-shaped porous backpressure regulator, and we offer models that accommodate a wide range of Cv values, maximum pressures, and temperatures. Equilibar also has a rich product lineup, including electronic regulators, pressure-reducing regulators, special valves and regulators, and vacuum regulators, providing optimal solutions for even the most complex situations.

The dome is pressurized by the vacuum pressure above the diaphragm, and the inlet vacuum pressure is controlled to be almost equal to this "pilot vacuum pressure." The pilot vacuum pressure on the dome can be adjusted using a manual or electronic vacuum regulator and can operate in either an open-loop or closed-loop control system. The choice of vacuum pilot control method depends on the performance requirements of the application. Note: The Equilibar EVR is designed to withstand harsh chemical conditions, but our vacuum pilot regulators and fittings are not. The flow through the vacuum pilot moves from atmospheric pressure toward the inlet of the vacuum supply pump, so during normal operation, chemicals do not flow into the vacuum pilot. There is always a small amount of leakage from the vacuum pilot regulator. For more details, please refer to the bottom of the safety design page. If you are using harsh chemicals, please consult with an application engineer.

EVR maintains precise control despite changes in supply vacuum and flow rate. The Equilibar precision vacuum regulator operates differently from traditional vacuum control valves. They use a flexible diaphragm as the only moving part. This diaphragm seals directly against the orifice of the internal valve, eliminating the "stiction" commonly seen in traditional vacuum control valves that rely on dynamic O-rings or wiper-type seals. Equilibar's design is frictionless and can control vacuum with very high resolution. Let's learn more about how it works.

The design incorporates dome-shaped porous orifice technology, achieving precise control over a wide range of flow rates. The Equilibar precision EVR uses a flexible diaphragm as its only moving part for the control mechanism. This diaphragm makes direct contact with the orifice inside the valve, eliminating the "stiction" commonly seen in vacuum control valves that use traditional dynamic O-rings or wiper-type seals. The Equilibar design is frictionless and can control vacuum with extremely high resolution. For more details on the operating principle, please see here. Our high-precision high-flow vacuum valves are available in sizes ranging from 1 1/2 inches to 4 inches, with materials selected based on temperature and chemical resistance for specific applications, including stainless steel 316/316L, anodized aluminum, or PVC. Each EVR comes with a manual pilot setpoint regulator that can be easily adjusted with a knob. If you wish to automate the EVR, you can purchase an electronic pilot regulator.

Vacuum control is performed by command signals from a computer. The command signals are first sent to a small electronic regulator, from which a pilot signal is generated and sent to the reference port of the dome-shaped Equilibar vacuum regulator (EVR) to control the process pressure. Equilibar offers a series of high-precision electronic pressure regulators that provide this pilot reference signal. The QPV ultra-high resolution model and the EPR-30Hg model allow for precise adjustments due to their minimal hysteresis and deadband. These regulators can be used in open-loop mode or closed-loop mode. In open-loop mode, the vacuum setpoint is sent to the electronic pilot regulator by the computer signal, and the pilot regulator supplies the commanded pressure to the EVR reference port, maintaining the process vacuum very close to the setpoint. In open-loop mode, slight variations in vacuum pressure occur as the flow rate increases.

High-flow electronic vacuum control valves provide a much faster and more precise solution than traditional PID-controlled butterfly valves. Equilibar's two-stage pilot control solution uses a small electronic vacuum pilot regulator to send the vacuum setpoint signal to a large back pressure regulator (BRP), achieving a vacuum state controlled in a 1:1 direct relationship at the inlet of the BRP. For this purpose, Equilibar's high-resolution electronic vacuum pilot regulator is employed. The combination of this electronic vacuum pilot regulator and a high-precision pilot-controlled back pressure regulator forms a complete electronic vacuum valve package. The electronic vacuum valve is compatible with both traditional 4-20mA analog inputs and the latest serial digital inputs.