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  3. 日本スターテクノ
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Industrial Electrical Equipment
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日本スターテクノ

EstablishmentOctober 1, 2002
capital1000Ten thousand
number of employees6
addressIbaraki/Toride-shi/202 Nakayama Building, 3-4-20 Toride
phone0297-86-6688
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last updated:May 28, 2026
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マスフローメーター/コントローラー マスフローメーター/コントローラー
液体用フローメーター/コントローラー 液体用フローメーター/コントローラー
コリオリ式流量計 コリオリ式流量計
圧力コントローラー 圧力コントローラー
ガスミキサー ガスミキサー
背圧レギュレーター 背圧レギュレーター
真空レギュレーター 真空レギュレーター
電子式圧力調整器 電子式圧力調整器
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Dome-type multi-orifice valve <for fuel cell evaluation>

Multi-orifice design utilizing a diaphragm! Achieves excellent precision and frictionless control.

The "Dome-Type Multi-Orifice Valve" that we handle is a product of Equilibar, which provides innovative fluid control technology. This product features a multi-orifice design that employs a diaphragm, achieving excellent precision and stable operation without friction. It allows for precise and frictionless control over flow rates, multiphase fluids, corrosive media, sanitary conditions, and extreme temperatures. Please feel free to contact us when you need assistance. 【Features】 ■ Excellent precision ■ Realizes frictionless control ■ High-quality regulator *For more details, please download the PDF or feel free to contact us.

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Equilibar High Precision Vacuum Regulator

It is specially designed to control the inlet pressure very stably under significantly different input conditions.

EVR maintains precise control despite changes in supply vacuum and flow rate. The Equilibar precision vacuum regulator operates differently from traditional vacuum control valves. They use a flexible diaphragm as the only moving part. This diaphragm seals directly against the orifice of the internal valve, eliminating the "stiction" commonly seen in traditional vacuum control valves that rely on dynamic O-rings or wiper-type seals. Equilibar's design is frictionless and can control vacuum with very high resolution. Let's learn more about how it works.

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Equilibar High Flow Vacuum Valve

High flow vacuum valve

The design incorporates dome-shaped porous orifice technology, achieving precise control over a wide range of flow rates. The Equilibar precision EVR uses a flexible diaphragm as its only moving part for the control mechanism. This diaphragm makes direct contact with the orifice inside the valve, eliminating the "stiction" commonly seen in vacuum control valves that use traditional dynamic O-rings or wiper-type seals. The Equilibar design is frictionless and can control vacuum with extremely high resolution. For more details on the operating principle, please see here. Our high-precision high-flow vacuum valves are available in sizes ranging from 1 1/2 inches to 4 inches, with materials selected based on temperature and chemical resistance for specific applications, including stainless steel 316/316L, anodized aluminum, or PVC. Each EVR comes with a manual pilot setpoint regulator that can be easily adjusted with a knob. If you wish to automate the EVR, you can purchase an electronic pilot regulator.

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Equilibar Electronic Vacuum Regulator

Electronic vacuum regulator

Vacuum control is performed by command signals from a computer. The command signals are first sent to a small electronic regulator, from which a pilot signal is generated and sent to the reference port of the dome-shaped Equilibar vacuum regulator (EVR) to control the process pressure. Equilibar offers a series of high-precision electronic pressure regulators that provide this pilot reference signal. The QPV ultra-high resolution model and the EPR-30Hg model allow for precise adjustments due to their minimal hysteresis and deadband. These regulators can be used in open-loop mode or closed-loop mode. In open-loop mode, the vacuum setpoint is sent to the electronic pilot regulator by the computer signal, and the pilot regulator supplies the commanded pressure to the EVR reference port, maintaining the process vacuum very close to the setpoint. In open-loop mode, slight variations in vacuum pressure occur as the flow rate increases.

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Equilibar Large Electronic Vacuum Valve

Large electronic vacuum valve

High-flow electronic vacuum control valves provide a much faster and more precise solution than traditional PID-controlled butterfly valves. Equilibar's two-stage pilot control solution uses a small electronic vacuum pilot regulator to send the vacuum setpoint signal to a large back pressure regulator (BRP), achieving a vacuum state controlled in a 1:1 direct relationship at the inlet of the BRP. For this purpose, Equilibar's high-resolution electronic vacuum pilot regulator is employed. The combination of this electronic vacuum pilot regulator and a high-precision pilot-controlled back pressure regulator forms a complete electronic vacuum valve package. The electronic vacuum valve is compatible with both traditional 4-20mA analog inputs and the latest serial digital inputs.

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Equilibar Vacuum Pilot Regulator

Vacuum pilot regulator

The dome is pressurized by the vacuum pressure above the diaphragm, and the inlet vacuum pressure is controlled to be almost equal to this "pilot vacuum pressure." The pilot vacuum pressure on the dome can be adjusted using a manual or electronic vacuum regulator and can operate in either an open-loop or closed-loop control system. The choice of vacuum pilot control method depends on the performance requirements of the application. Note: The Equilibar EVR is designed to withstand harsh chemical conditions, but our vacuum pilot regulators and fittings are not. The flow through the vacuum pilot moves from atmospheric pressure toward the inlet of the vacuum supply pump, so during normal operation, chemicals do not flow into the vacuum pilot. There is always a small amount of leakage from the vacuum pilot regulator. For more details, please refer to the bottom of the safety design page. If you are using harsh chemicals, please consult with an application engineer.

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