ファーストゲート List of Products and Services

The "6EZ" is a fully automatic dry-out polish device that can improve the yield of SiC substrates and devices. By using Revasum's 7AF-HMG grinder and 6ZE polish device simultaneously, we provide process simplification. As an import and export trading company for semiconductor manufacturing equipment and precision parts for equipment, we actively seek innovative technologies worldwide and quickly propose products that meet our customers' needs. 【Features】 ■ Compatible with 150mm and 200mm ■ Dry-in, dry-out ■ Supports single-side and double-side polishing ■ Target polish rate of 10μm/hour ■ Provides surface flatness of ≦1Å with 1μm removal *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment

TIH Series: Compatible with a wide variety of applications. By using fluororesin for the wetted surface, it is a heater that can be used for various purposes, including strong acids, strong alkalis, and ozonated water.

• Other heaters

The low-cost and compact bellows pump developed by White Knight does not use O-rings in the wetted parts, eliminating concerns about contamination. Additionally, the body seal utilizes White Knight's unique sealing technology, so maintenance tasks such as re-tightening are unnecessary. Since the entire pump, including the main body, is 100% non-metallic, there are no worries about contamination or corrosion.

• Other pumps

The "Manual Type Transparent Substrate Inspection Device" is a manual glass substrate surface inspection device/sapphire surface inspection device manufactured by YGK (Yamanashi Technical Workshop), designed for workpiece placement. It is compact and inexpensive, capable of measuring foreign substances on silicon wafers and glass substrates, and has made it possible to measure the separation of the front and back sides of glass substrates and detect latent defects on SiC surfaces, which were previously difficult. Additionally, we accept customer samples of silicon wafers/glass substrates and conduct sample measurements using the YPI series. 【Features】 ■ Unprecedented high speed, high precision, and low cost ■ Space-saving ■ Reduced measurement time, etc. *For more details, please contact us or download the catalog.

• Other inspection equipment and devices

The "Bellows Pump" is a Teflon chemical supply pump manufactured by White Knight. With features such as "compact size, 100% non-metallic, high flow rate at high temperatures, and maintenance-free," it holds over 50% market share in the US and is widely used as a standard component in various semiconductor manufacturing equipment. We provide the optimal pump for your application based on usage temperature, chemical, and flow rate. 【Features】 ■ Low pulsation ■ Capable of handling up to 210°C ■ Teflon pump ■ Completely free of metals, O-rings, etc. ■ No concerns about contamination, etc. *For more details, please contact us or download the catalog.

• Other pumps

The "Precision Flow Control Valve" is a liquid flow controller manufactured by Futurestar, designed for precise and rapid flow control of acidic and organic chemical solutions for quantitative discharge management. All flow path components are made of Teflon resin, providing a wide range of chemical resistance. Depending on the application, you can choose between two types of flow meter: a Karman vortex flow meter and an ultrasonic flow meter. Additionally, the liquid flow controller is also available for standalone purchase (Product name: AutoValve). 【Features】 ■ Integration of liquid flow controller and flow meter into a single system ■ Monitoring and feedback of the set flow rate ■ Achieves high reproducibility and high reliability *For more details, please contact us or download the catalog.

• Other semiconductors

The "Flow Controller" manufactured by Malema is made entirely of Teflon for contact parts, designed for high-purity chemical solutions. It is used worldwide as a standard component in various semiconductor manufacturing equipment, including control and monitoring products. Additionally, we offer Coriolis-type flow controllers specifically designed for controlling foaming chemical solutions and CMP slurries, which have previously been difficult to monitor and control. 【Features】 - High-precision control of foaming chemical solutions and slurries that cannot be achieved with ultrasonic flow meters - Capable of high-precision flow monitoring and control unaffected by changes in fluid viscosity - No adjustments or settings required based on the characteristics of the measured fluid - Capable of controlling liquids with gas content up to 30% *For more details, please contact us or download the catalog.

• Flow Control

The "Automatic Transport Type Transparent Substrate Inspection Device" is a surface inspection device for glass substrates and sapphire substrates developed by YGK (Yamanashi Technical Workshop). It is a dedicated machine for transparent glass substrates and is also compatible with various types of frosted back substrates. With an automatic sensor focusing mechanism, it enables high-precision front and back separation. The compatible substrate size is up to 200mm x 200mm. If you require sizes larger than 200mm, please consult us. 【Features】 ■ Automatic transport ■ High-precision front and back separation ■ High performance *For more details, please contact us or download the catalog.

• Other inspection equipment and devices

The "Ion Implantation Equipment Disk Renewal Service" is a service provided by Core Systems that offers full renewal of batch-type implant disks for all manufacturers including Varian, SEN, and AMAT, as well as repair of heat sink renewal disks and sales of parts such as Finger and Restraint. Batch-type end station disks for high-current and high-energy ion implantation equipment can experience issues that cannot be overlooked in management, such as particle adhesion to wafers due to prolonged ion irradiation, elemental-level contamination, reduced cooling capacity due to aging of elastomers, and problems with wafer attachment and detachment. It is necessary to regularly perform disk renewal, including parts cleaning and elastomer replacement, to prevent these issues before they arise. We provide high-quality disk renewal at a low price. 【Features】 ■ Compatible with ion implantation equipment from various manufacturers ■ Provides wafer interfaces that are equivalent to or better than OEM specifications ■ Offered at significantly lower prices than purchasing new parts *For more details, please contact us or download the catalog.

• Ion implantation equipment

The "First Gate Corporation Comprehensive Catalog" is the comprehensive catalog of First Gate Corporation, which engages in the import and export sales of semiconductor manufacturing equipment and inspection equipment, as well as technical support. This catalog introduces products such as semiconductor manufacturing components including "Teflon flow meters," "flow controllers," "Teflon chemical supply pumps," and "various heaters." [Contents] ■ Company Overview ■ History ■ Product Lineup *For more details, please contact us or download the catalog.

• Ion implantation equipment

Malema's flow controllers are made entirely of Teflon for the wetted parts, designed for high-purity chemical solutions, and are used worldwide as standard components in various semiconductor manufacturing equipment, including control and monitoring products. Additionally, we offer Coriolis flow controllers specifically designed for the control of challenging liquids such as foaming chemicals and CMP slurries, which have previously been difficult to monitor and control.

• Flow Control

First Gate aims to be a company that provides dream-like devices and technologies that can always lead to innovation in the ever-evolving electronics and semiconductor industries. The name "First Gate" expresses our desire to be a FAST (quick) GATE (path) that delivers solutions to our customers faster than anyone else. As a semiconductor trading company, we seek innovative technologies worldwide, and as a semiconductor manufacturing equipment manufacturer, we will continue our relentless challenge to improve our own technologies. As Mencius said, "Heaven's timing is not as good as the earth's advantage, and the earth's advantage is not as good as the harmony among people." First Gate will leverage the opportunities given to enhance our technological capabilities, aiming for limitless leaps as a company that values the harmony among people, where each employee can demonstrate their abilities, learn from each other, and collaborate. We aspire to be a company that continues to contribute to society while cherishing the connections we have with our customers, shareholders, employees, and their families. For more details, please contact us or refer to our catalog.

• Other semiconductors

The end station disk of the ion implantation device experiences issues such as particle adhesion to the wafer, elemental-level contamination, reduced cooling capacity due to the aging of elastomers, and problems with wafer detachment due to prolonged ion irradiation. Regular disk regeneration can lead to improved equipment uptime and product yield.

• Ion implantation equipment

The Futurestar company's flow meter is an all-fluororesin flow meter compatible with high-temperature fluids up to 200°C. It is used for flow control and display of acids and organic supply in cleaning devices and chemical supply systems. Recently, there has been an increasing demand for high-temperature process compatibility, and we offer a wide range of flow meters suitable for customer needs, from small flow rates (75cc/min. H2O) to large flow rates (75 L/min. H2O). Optional features include analog output and contact output for flow measurement. ◆ Flow range: 0-10 ml/min to 6000 ml/min (MAX) ◆ Orifice valve: High linearity characteristics ◆ Material used: PTFE, PFA, CTFE (Wetted Parts) ◆ Maximum operating fluid temperature: 200°C ◆ Maximum operating pressure: 0.59 Mpa (100 psi) ◆ Options: Analog and contact output, along with many other types available. Please contact us for more details.

• Flow Control

All flow path components are made of Teflon resin, providing a wide range of chemical resistance. Depending on the application, you can choose between two types of flow meters: the Karman vortex flow meter and the ultrasonic flow meter. We also sell the liquid flow controller separately (product name: AutoValve). For more details, please contact us.

• Other cleaning machines
• Other semiconductor manufacturing equipment
• Food Cleaning Equipment

The Teflon liquid supply pump manufactured by White Knight features "compact size, 100% non-metal, high flow rate at high temperatures, and maintenance-free" characteristics, holding over 50% market share in the US and widely used as standard components in various semiconductor manufacturing equipment. We provide pumps suitable for your application based on usage temperature, chemicals, and flow rate. ◆ Materials used: PTFE, PFA, Polypropylene (non-contact parts) ◆ Maximum operating liquid temperature: 210°C, capable of high flow output with high-temperature liquids ◆ Flow rate: 3 types ranging from 20 to 110 l/min ◆ Maintenance-free with a one-year operational guarantee. Please contact us for more details.

• Other semiconductor manufacturing equipment
• Other pumps