It is a liquid flow controller for quantitative discharge management of acids, organic chemical solutions, and other substances. It performs flow control with high precision and speed.
All flow path components are made of Teflon resin, providing a wide range of chemical resistance. Depending on the application, you can choose between two types of flow meters: the Karman vortex flow meter and the ultrasonic flow meter. We also sell the liquid flow controller separately (product name: AutoValve). For more details, please contact us.
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basic information
【Features】 ○ Integration of liquid flow controller and flow meter into a single system ○ Monitoring and feedback of set flow rate ○ Achieves high reproducibility and high reliability ○ Input: 0-4mA, 24VDC ○ Output: 0-4mA ○ Supply capacity: B-Series 0-3 L/min, M-Series 0-20 L/min ○ Materials used: Chemical contact surfaces made of PTFE, PFA ○ Operating environment: Maximum supply pressure 65psi, maximum back pressure 30psi ○ Maximum operating chemical temperature: 65℃ ○ Input voltage: 12-30VDC ○ Options: Controller for auto valve ● For more details, please contact us.
Price information
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Delivery Time
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Applications/Examples of results
【Purpose】 ○ Semiconductor cleaning equipment, quantitative dispensing, quantitative blending, quantitative spraying, quantitative mixing, etc. ● For more details, please contact us.
Company information
We are a trading company that provides the sale of semiconductor manufacturing equipment, inspection equipment, and components for semiconductor manufacturing both domestically and internationally, as well as technical support and cost reduction in device manufacturing.
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