Brooks Expert Support Tool (BEST)

Applications for gas flow control with excellent response speed and repeatability.

The "GF100 Series" is a metal-sealed mass flow controller/meter that achieves high purity and ultra-high purity process gas supply with excellent response speed and repeatability. It ensures high repeatability and stable performance, providing reliability that exceeds industry standards. It achieves the highest level of gas cleanliness in the industry while enhancing process flexibility and efficiency, maximizing yield and productivity. 【Features】 ■ Long-term zero point stability: less than 0.5% full scale/year ■ Settling time: less than 700 ms - 1 second ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: surface finish options of 4µ or 10µ inch Ra ■ Corrosion-resistant Hastelloy(R) T-Rise sensor improves measurement reproducibility even with rising temperatures, among other features. *For more details, please download the PDF or feel free to contact us.

• Flow Meter
• Flow Control

MFC that makes everything possible

The "GF125 Series," equipped with ultra-fast response times and high levels of cleanliness, is a second-generation multivariable measurement, PTI (Pressure Variation Resistance) metal-sealed mass flow controller. It minimizes fluctuations in process gas flow due to variations in pressure and temperature. With standard MultiFlo technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. As a result, it reduces the need for pressure regulators, pressure transducers, and related hardware installations at each point, thereby shrinking the size and cost of gas panels while maximizing yield and productivity with industry-leading PTI performance. 【Features】 ■ Long-term zero stability: less than 0.5% full scale/year ■ Settling time: less than 300 ms - 700 ms ■ Maximum full-scale flow rate: 300 slpm ■ Metal-sealed flow path: 4µ inch Ra surface finish ■ SEMI F20 compliant materials for gas and liquid contact parts ■ Corrosion-resistant Hastelloy® T-Rise sensor, etc. *For more details, please download the PDF or feel free to contact us.

• Flow Meter
• Flow Control

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.

• Other measurement, recording and measuring instruments

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

• Flow Meter
• Flow Control
• Safety Controller

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

The Quantim® QMC Coriolis mass flow controller and meter provide extremely accurate, stable, and reproducible measurement and control for very low flow rates of gases and liquids. This third-generation new Quantim QMC Coriolis mass flow controller and meter contribute to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. 【Features】 ■ True mass flow measurement ■ Accurate density measurement ■ Additional I/O options: 0-10 Vdc, 0-20 mA, RS485 S-Protocol ■ A wide range of seal materials, certificates, and certification options ■ Easily accessible service port *For more details, please refer to the related link page or feel free to contact us.

• Flow Meter
• Flow Control

Achieving the highest flow accuracy in ultra-high purity DI steam supply.

The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-pure vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions and eliminates the influence of pure water, ensuring high reliability and cleanliness in manufacturing. An independent service port and an intuitive GUI (graphic user interface) provide user-friendly data logging and diagnostic capabilities. **Benefits** - Utilizes proven and reliable thermal mass flow measurement and control technology - Compatible with various water supply pressures - Enhanced corrosion resistance - Clean manufacturing - Tool interface using analog or digital communication - Direct interface for enhanced data collection or troubleshooting *For more details, please download the PDF or feel free to contact us.*

• Flow Meter
• Flow Control

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact on the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

The "Mechanical Stitching Method" by Nichinichisui Road Machinery Co., Ltd. is a new technique that allows for the repair of metal cracks without the application of heat. By using special bolts and reinforcement plates, cracks are physically removed, and repairs are made without causing any thermal impact to the base material. Repairs can be carried out in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. ◎ For more details, please contact us. ◎ If a detailed technical explanation is needed, please contact us.

● The production time for casting prototypes can be shortened! Since model production is not required, the time needed to create prototypes, which previously took about a month, can be significantly reduced. ● Model costs can be reduced! By directly producing sand molds from 3D data, there is no need for model production costs. If changes to the model are necessary, they can be addressed by modifying the 3D data. ● Similar products with different shapes and dimensions can be prototyped simultaneously! With one molding process, different products with similar shapes or varying dimensions can be molded at the same time. This allows for the verification of multiple types in a short period.

We will introduce the implementation results of the sensor technology developed by the Hotron Group, which has been cultivated over more than half a century, through customer case studies. In addition to automatic door sensors, we also offer a wide range of vehicle detection sensors and nursing/care sensors. Many implementation examples are also presented, so please take a look at the case study page.

Parking space management refers to the real-time display of parking availability and the management of efficient use of parking spaces. By utilizing Hotron's sensors, drivers can quickly discover available parking spaces, enabling efficient parking lot operations. For large parking lots, we recommend the "Floor Management Method" and "Block Management Method," which focus on cost reduction. Sensors are installed at regular intervals to count and manage the number of passing vehicles. This method offers the advantages of easy installation and low costs. 【Target Products】 - Vehicle Count Sensor CCS2 - Ultrasonic Sensor HM-UX2/UW2 For smaller facilities, we recommend the "Parking Space Management Method," where sensors are installed in each parking space to display availability with high accuracy. By providing reliable occupancy information, this method helps reduce unnecessary entry of new vehicles and ensures safe parking lot operations. 【Target Products】 - Occupancy Detection Sensor HM-UX2/UW2 - Occupancy/Pass Detection Sensor HM-LC6 - Occupancy Detection Sensor HM-LC7/LC7-FLS - Occupancy/Pass Detection Sensor HM-S6 - Occupancy Detection Sensor HM-S8