"MEMS Engineer Forum 2025" - Announcement of Technical Exhibitions

Improving the precision and efficiency of MEMS processing! We will introduce high-precision etching and film deposition technologies. *Held from April 16 to April 17.

Plasma Thermo Japan Co., Ltd. will exhibit at the technical exhibition corner of the "MEMS Engineer Forum 2025" held at the International Fashion Center Building (KFC Hall) in Ryogoku, Tokyo. <Exhibition Contents> 1. Low-temperature, low-damage etching and cleaning equipment using high-density radicals The patented HDRF technology (High Density Radical Flux) eliminates the causes of yield reduction in MEMS. 2. Processing technology essential for future high-frequency devices and high-speed optical modulation waveguide processing (Ion Beam Etching) Ion beam etching suitable for processing multilayer structures. The tilt mechanism of the wafer stage allows for adjustment of side wall angles. 3. Plasma etching and film deposition equipment suitable for batch processing of compound semiconductors Multiple wafers can be loaded onto a "shuttle" (wafer carrier) for batch processing. This equipment is suitable for small-scale production. We sincerely look forward to your visit. *You can download the equipment catalog. *Please feel free to contact us for more details.

• Etching Equipment

Generates 50 to 100 times more radicals compared to similar technologies from other companies, providing a damage-free process!

The high-density radical cleaning process can completely remove residues such as photoresist and polymers without damaging delicate devices or complex structures. Furthermore, for fine structures such as medical implants, our unique plasma source using remote plasma allows for the removal of residues that could not be completely eliminated by wet processes. Additionally, processing can be performed at both high and low temperatures for complex shapes using high-density radical flux. 【Features】 ■ Flexible processing over a wide temperature range ■ High selectivity and uniformity in the process ■ Capability to completely clean samples with complex shapes *For more details, please feel free to contact us.

• Other contract services

Inert gas Ar etching and enhanced RIBE using reactive gases are possible!

"QuaZar" is an etching processing technology that enables vertical etching capability, which is difficult to achieve with plasma etching, in the etching process of hard-to-etch materials such as ferroelectric PZT, thanks to its large-area ion source and advanced motion control. By adopting a unique Ion Source, Marathon Grids, and optional Dual PBN, it triples the MTBM compared to conventional products (and can also be installed in existing equipment from other companies). Additionally, the REDEP Breaker and AUXILIARY Electrode prevent RF shunting and anode disappearance. 【Features】 ■ In PZT etching applications, etch stop is possible with noble metal electrode layers without EPD (with no deposition on sidewalls and a smooth surface). ■ The selectivity of photoresist in PZT etching improves from 0.6:1 with inert IBE to 1.1:1 with RIBE. ■ The etching speed for PZT improves from about 20 nm/min with inert IBE to about 30 nm/min with RIBE. *For more details, please feel free to contact us.

• others

This course is designed to meet the requests of many customers and expands and enriches the content of the previously popular course "Organic Structure Analysis" by including applied topics such as 2D-NMR analysis and chemical decomposition analysis. It is an ideal course for those who have taken the beginner course and want to deepen their understanding of organic structure analysis to aid in research and development.

We would like to inform you about the upcoming semiconductor fundamentals course hosted by Nisshinbo Micro Devices, which has received positive feedback and participation from many attendees each time. This time, we will be presenting "Introduction to Power IC Linear Regulators." The difficulty level is beginner, so we encourage everyone, from those who want to start learning about analog ICs to those facing challenges, to participate actively. With recorded lectures and live chat Q&A with our technical engineers, even busy engineers can learn efficiently. ● Target Participants - New employees and young designers - Those who want to refresh their knowledge of analog ICs - Those preparing for circuit design ● Agenda 1. What is a Power IC? 2. Linear Regulators - Shunt Regulators - Series Regulators 3. Key Characteristics 4. Main Functions 5. External Components 6. Thermal Characteristics We look forward to your participation.

In the world, there are more information systems than there are companies, but the number of systems that truly "help with a company's business operations" in a meaningful way is limited. To address this challenge, our company has developed and evolved our unique supply chain solutions, the "Φ-Conductor Series" and "Φ-Pilot Series." Since our establishment, we have upheld the philosophy of "together with our customers, for our customers," and, unlike many IT vendors, we have consistently focused on the effectiveness of our implementations, steadily building our track record. Therefore, on the occasion of our 25th anniversary, we have decided to hold an event where customers who have implemented our solutions will share their experiences regarding the effectiveness of the implementation and any challenges they faced. The companies presenting will include a diverse range of six user companies, primarily from the food industry. Additionally, at the concurrently held exhibition, we will showcase our original lineup, the "Φ-Pilot Series" and "Φ-Conductor Series," along with add-on features and optional products related to φ-Pilot that our partner companies are working on. We warmly invite you to attend this event.

[Speaker] Ministry of Economy, Trade and Industry, Manufacturing Industries Bureau, Automotive Division Deputy Director Toshiki Okabayashi [Key Lecture Content] Japan's basic policy is the "Multi-Passthway Strategy," which pursues various options such as EVs, PHEVs, hydrogen, and synthetic fuels to achieve carbon neutrality in the automotive sector. This lecture will introduce the direction of automotive policy while considering global electrification trends, policy trends in major countries, and changes in domestic and international market structures. [Lecture Items] 1. Current Situation Surrounding the Automotive Industry - Policy trends in major countries - Market trends in major countries 2. GX-related Initiatives - Electrification - Utilization of hydrogen in the mobility sector - Expansion of synthetic fuel introduction 3. Q&A / Business Card Exchange

Attention those using open columns for purification and tired of checking TLC after separation! "We're still using open columns? It's not just about automation; let's explore the benefits of flash chromatography." We will be hosting a webinar. - How much time and solvent can be saved by introducing flash chromatography? - What impact does it have on separation? - Tricks that cannot be applied to open columns. Let's consider the advantages of flash chromatography that go beyond just making things easier! 【Target Audience】 - Those using open columns - Those interested in flash chromatography - Those considering the introduction of flash chromatography - Those who want to know the benefits of flash chromatography We look forward to your participation. *Please note that participation from competing companies is not allowed.