"MEMS Engineer Forum 2025" - Announcement of Technical Exhibitions

Improving the precision and efficiency of MEMS processing! We will introduce high-precision etching and film deposition technologies. *Held from April 16 to April 17.

Plasma Thermo Japan Co., Ltd. will exhibit at the technical exhibition corner of the "MEMS Engineer Forum 2025" held at the International Fashion Center Building (KFC Hall) in Ryogoku, Tokyo. <Exhibition Contents> 1. Low-temperature, low-damage etching and cleaning equipment using high-density radicals The patented HDRF technology (High Density Radical Flux) eliminates the causes of yield reduction in MEMS. 2. Processing technology essential for future high-frequency devices and high-speed optical modulation waveguide processing (Ion Beam Etching) Ion beam etching suitable for processing multilayer structures. The tilt mechanism of the wafer stage allows for adjustment of side wall angles. 3. Plasma etching and film deposition equipment suitable for batch processing of compound semiconductors Multiple wafers can be loaded onto a "shuttle" (wafer carrier) for batch processing. This equipment is suitable for small-scale production. We sincerely look forward to your visit. *You can download the equipment catalog. *Please feel free to contact us for more details.

• Etching Equipment

Generates 50 to 100 times more radicals compared to similar technologies from other companies, providing a damage-free process!

The high-density radical cleaning process can completely remove residues such as photoresist and polymers without damaging delicate devices or complex structures. Furthermore, for fine structures such as medical implants, our unique plasma source using remote plasma allows for the removal of residues that could not be completely eliminated by wet processes. Additionally, processing can be performed at both high and low temperatures for complex shapes using high-density radical flux. 【Features】 ■ Flexible processing over a wide temperature range ■ High selectivity and uniformity in the process ■ Capability to completely clean samples with complex shapes *For more details, please feel free to contact us.

• Other contract services

Inert gas Ar etching and enhanced RIBE using reactive gases are possible!

"QuaZar" is an etching processing technology that enables vertical etching capability, which is difficult to achieve with plasma etching, in the etching process of hard-to-etch materials such as ferroelectric PZT, thanks to its large-area ion source and advanced motion control. By adopting a unique Ion Source, Marathon Grids, and optional Dual PBN, it triples the MTBM compared to conventional products (and can also be installed in existing equipment from other companies). Additionally, the REDEP Breaker and AUXILIARY Electrode prevent RF shunting and anode disappearance. 【Features】 ■ In PZT etching applications, etch stop is possible with noble metal electrode layers without EPD (with no deposition on sidewalls and a smooth surface). ■ The selectivity of photoresist in PZT etching improves from 0.6:1 with inert IBE to 1.1:1 with RIBE. ■ The etching speed for PZT improves from about 20 nm/min with inert IBE to about 30 nm/min with RIBE. *For more details, please feel free to contact us.

• others

We would like to extend our heartfelt congratulations on the continued prosperity of your esteemed company. Our company will be exhibiting at the following trade show, where we will introduce a number of products, including our new product, the Pillow Packaging Full Air Tightness Inspection Machine MSQ-2003. We sincerely apologize for the inconvenience during your busy schedule, but we would like to invite you to visit us at this opportunity. 【 Exhibition Name 】 JAPAN PACK 2025 Japan Packaging Industry Exhibition https://www.japanpack.jp/ 【 Dates 】 October 7 (Tuesday) to October 10 (Friday), 2025 *4 days 10:00 AM to 5:00 PM 【 Venue / Booth Number 】 Tokyo Big Sight / East Hall 8, Booth 8-505

[Speaker] Hajime Hiraki, CEO of Chemistry Cube Co., Ltd., Innovation Consultant [Key Lecture Content] Until now, in many companies, managers who operate and manage organizations and specialists in specific technical fields have been established as the career paths for engineers and researchers. However, as uncertainty increases, there is a growing demand for value creation capabilities that anticipate societal challenges and customer needs and generate innovation. In this context, the importance of a new career path, "Technical Leader," distinct from traditional managers and specialists, is on the rise. In this lecture, we will focus on the "Technical Leader," who plays a central role in value creation centered on technology, and explain their role, the required abilities, and the approach to their development, using case studies. [Lecture Items] 1. The Era of Technical Leaders 2. What is a Technical Leader? 3. Practicing Technical Leadership - Management Techniques for Technical Leaders 4. Development of Technical Leaders 5. Q&A / Business Card Exchange

[Lecture Topics] 1. Smart City Policies by the Cabinet Office Yusuke Nakamura, Planning Officer, Cabinet Office, Science and Technology Innovation Promotion Secretariat 1. Policy Positioning of Smart Cities 2. Smart City Policies of the Cabinet Office 3. Revision of SCRA 4. Q&A / Business Card Exchange 2. Digital Policies of the Ministry of Internal Affairs and Communications Promoting Community DX Tatsuhiko Saruta, Deputy Director (Smart City and Subsidy Projects), Digital Economy Promotion Office, Information and Communications Bureau, Ministry of Internal Affairs and Communications 1. Current Status and Challenges of Local Communities 2. Expected Roles of Digital Technology and Strategies for Problem Solving 3. Status of Initiatives in FY R7 by the Ministry of Internal Affairs and Communications 4. Future Initiatives 5. Q&A / Business Card Exchange 3. Initiatives for Promoting Smart Cities by the Ministry of Land, Infrastructure, Transport and Tourism Masahiro Kobayashi, Planning Specialist, Digital Information Utilization Promotion Office, International and Digital Policy Division, Urban Bureau, Ministry of Land, Infrastructure, Transport and Tourism 1. Initiatives to Promote the Spread of Smart Cities 2. Urban Development DX and Project PLATEAU 3. Q&A / Business Card Exchange

[Speaker] Toru Kumagai, Journalist from Germany [Lecture Topics] 1. The German government holds a summit meeting to support the automotive industry 2. Will the EU change the ban on new internal combustion engine vehicle sales by 2035? 3. The main players at the Munich Auto Show IAA Mobility are China and BEVs 4. The strategy of Chinese OEMs steadily expanding their foothold in Europe 5. Reasons for the recovery of new BEV registrations in Europe by 2025 6. Is the hollowing out of the German automotive industry progressing due to Trump tariffs? 7. Q&A

We will be exhibiting at "BioJapan 2025." We would like to invite you to visit our booth. All of our staff are sincerely looking forward to your visit. ■ Booth Number: D-69 ■ Exhibitor Website https://biojapan2025.jcdbizmatch.jp/Lookup/jp/Member/u0?ke=%E9%96%A2%E6%9D%B1%E5%8C%96%E5%AD%A6&np=2&ob=1&ub=1 ■ Exhibition Content: Manufacturing services for cell culture media and preparation solutions, reagents related to regenerative medicine (such as the ciKIC series), reagents related to cell assays (such as the ad-MED Vitrogel series), etc.