"MEMS Engineer Forum 2025" - Announcement of Technical Exhibitions

Improving the precision and efficiency of MEMS processing! We will introduce high-precision etching and film deposition technologies. *Held from April 16 to April 17.

Plasma Thermo Japan Co., Ltd. will exhibit at the technical exhibition corner of the "MEMS Engineer Forum 2025" held at the International Fashion Center Building (KFC Hall) in Ryogoku, Tokyo. <Exhibition Contents> 1. Low-temperature, low-damage etching and cleaning equipment using high-density radicals The patented HDRF technology (High Density Radical Flux) eliminates the causes of yield reduction in MEMS. 2. Processing technology essential for future high-frequency devices and high-speed optical modulation waveguide processing (Ion Beam Etching) Ion beam etching suitable for processing multilayer structures. The tilt mechanism of the wafer stage allows for adjustment of side wall angles. 3. Plasma etching and film deposition equipment suitable for batch processing of compound semiconductors Multiple wafers can be loaded onto a "shuttle" (wafer carrier) for batch processing. This equipment is suitable for small-scale production. We sincerely look forward to your visit. *You can download the equipment catalog. *Please feel free to contact us for more details.

• Etching Equipment

Generates 50 to 100 times more radicals compared to similar technologies from other companies, providing a damage-free process!

The high-density radical cleaning process can completely remove residues such as photoresist and polymers without damaging delicate devices or complex structures. Furthermore, for fine structures such as medical implants, our unique plasma source using remote plasma allows for the removal of residues that could not be completely eliminated by wet processes. Additionally, processing can be performed at both high and low temperatures for complex shapes using high-density radical flux. 【Features】 ■ Flexible processing over a wide temperature range ■ High selectivity and uniformity in the process ■ Capability to completely clean samples with complex shapes *For more details, please feel free to contact us.

• Other contract services

Inert gas Ar etching and enhanced RIBE using reactive gases are possible!

"QuaZar" is an etching processing technology that enables vertical etching capability, which is difficult to achieve with plasma etching, in the etching process of hard-to-etch materials such as ferroelectric PZT, thanks to its large-area ion source and advanced motion control. By adopting a unique Ion Source, Marathon Grids, and optional Dual PBN, it triples the MTBM compared to conventional products (and can also be installed in existing equipment from other companies). Additionally, the REDEP Breaker and AUXILIARY Electrode prevent RF shunting and anode disappearance. 【Features】 ■ In PZT etching applications, etch stop is possible with noble metal electrode layers without EPD (with no deposition on sidewalls and a smooth surface). ■ The selectivity of photoresist in PZT etching improves from 0.6:1 with inert IBE to 1.1:1 with RIBE. ■ The etching speed for PZT improves from about 20 nm/min with inert IBE to about 30 nm/min with RIBE. *For more details, please feel free to contact us.

• others

[Speaker] Naomasa Shibuya, Department Manager Data Marketing Unit, Strategy and Platform Division East Japan Railway Company Marketing Headquarters [Key Lecture Content] East Japan Railway Company announced a new group management vision, "Yusho 2034," aimed at realizing a rich life for all people by July 2025. In addition to the railway transportation business, we will further expand lifestyle service businesses (non-railway) such as station facilities, station buildings, hotels, and real estate, promoting human-centered marketing focused on our customers. To achieve this, data marketing utilizing usage history from Suica and JRE Point members is essential. It is not enough to simply implement tools or acquire analytical techniques; it is crucial to cultivate personnel who understand the business and can conduct appropriate data analysis and strategy planning. We will also introduce the development of job-type personnel in data marketing, which we began recruiting in 2024. In this lecture, I will discuss the key points for advancing data marketing within a business company, incorporating case studies.

[Lecturers] Mitsubishi UFJ Research and Consulting Co., Ltd. Consulting Business Division Sustainability Business Unit, Sustainability Strategy Department, Group 1 Senior Manager Ryo Maeda Consultant Keiro Shimada [Key Lecture Content] Towards achieving carbon neutrality by 2050, Japan is advancing the introduction of a carbon pricing system. This lecture will explain the overview of carbon pricing and the price determination mechanisms for fossil fuel levies and specific business burdens, and will discuss future price forecasts and their impact on companies. Furthermore, it will organize the latest trends in GX-ETS Phase 2 and carbon credits, as well as issues related to credit supply and demand and utilization, and will propose measures that companies need to take in light of the introduction of the carbon pricing system. [Lecture Items] 1. Trends in the carbon pricing system 2. Trends in carbon credits 3. Required responses from companies 4. Q&A / Business card exchange

We will be exhibiting at the "International Frontier Industry Messe," one of the largest comprehensive exhibitions in western Japan. September 4 (Thursday) - 5 (Friday), 2025 Kobe International Exhibition Hall 2nd floor, Hall 1, Booth Number P-74 Inside the Aioi Chamber of Commerce booth We sincerely look forward to your visit.

In recent years, the pharmaceutical and medical industries have faced urgent challenges, including the digitization of standard operating procedures (SOPs) and the strengthening of continuous education and human resource development. In this webinar, we will introduce a comprehensive system that not only streamlines operations but also consistently supports education and human resource development by integrating Agatha's SOP management cloud solution "Agatha SOP" with "Ave-TMS," a training management system provided by BIO-TREND BIOPRODUCTS, with whom Agatha has recently signed a distribution agreement. [Program] Part 1: 14:00 - 14:20 "Introduction to Agatha Solutions" Agatha Inc. Sales & Marketing Department, Quality Group Part 2: 14:20 - 15:00 "Ave-TMS Demo Presentation" BIO-TREND BIOPRODUCTS Project Manager, Choi Woo-Chun *For Q&A, please fill out the survey displayed after the webinar, and we will respond later.

[Speaker] Toshio Kawamoto, Managing Director / Head of Cross Creation Group, NTT Data Management Research Institute, Business Transformation Unit, and Co-representative of Social Innovation Alliance Japan Denmark Takaaki Sukegawa, Senior Manager [Lecture Items] 1. Competitiveness and Governance in the Post-Generative AI Era - Toshio Kawamoto [13:00 - 14:00] 1. Introduction to NTT Data Management Research Institute 2. Major countries' perspectives on AI utilization 3. Considerations for companies when building AI governance 4. Examples of AI governance construction in Japan 5. Introduction of our company's achievements in related projects 6. Q&A / Business card exchange 2. On-Site AI Risk Management in Europe ~Introduction to Trends in AI Utilization in Europe and Advanced Centralized AI Risk Management Solutions~ - Takaaki Sukegawa [14:10 - 15:10] 1. Overview of centralized AI risk management 2. Detailed approach 3. Introduction of case studies applying the approach 4. Q&A / Business card exchange