Wide range of applications from vacuum film forming devices to research experimental equipment.
This is an introduction to the low-cost mass flow controllers handled by Kawaguchi Liquefied Chemical Co., which supplies gas, vacuum, and low-temperature equipment R&D.
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basic information
**Features** ■ Manufacturer: Hitachi Metals, Ltd. ■ Model Number: SFC280ERC ■ Specifications: Accuracy ±2%, Response time within 3 seconds (reaching F.S. ±2%) ■ Gas Type: Specify at the time of order ■ Flow Range: Full scale, specify at the time of order from 10 SCCM to 5 SLM ■ Body Material: SUS316L, Viton ■ Fitting Size: Sizes: 1/8, 1/4 ■ Type: SWL, UJR type ■ The SFC281RC series is also available for medium flow rates from 5 SLM to 20 SLM □ For other functions and details, please contact us.
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Applications/Examples of results
【Applications】 ■Vacuum Film Formation Device ■Research Experimental Equipment
Company information
We provide equipment ranging from high-pressure gas (generally 15MPa: 150kg/cm²) to ultra-high vacuum regions (1x10⁻⁹Pa: 1x10⁻¹¹TORR), including both standard and custom products. Additionally, we can offer environments from high-temperature regions (2300°C) to ultra-low temperature regions (-270°C) as part of our equipment. Specifically, we can design and manufacture high-temperature vacuum heat treatment furnaces and vacuum low-temperature experimental devices upon consultation. Of course, we also provide utility piping for various equipment, as well as gases for the atmosphere and process gases. Please feel free to consult us with any inquiries.
![[★Demo unit available for loan] Airflow visualization set](https://image.mono.ipros.com/public/product/image/5e2/2000716136/IPROS26507171211429380701.jpeg?w=280&h=280)