Equipped with both analog and digital interfaces.
A mass flow controller capable of handling ultra-high pressure specifications up to 30MPa, thanks to its distinctive valve structure.
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basic information
【Features】 ■ Analog interface: 0-5V, 4-20mA ■ Digital interface: RS485 (HART-based) ■ Optional support for DeviceNet and FOUNDATION Fieldbus ■ Manufacturer: Brooks Instrument Co., Ltd. ■ Specifications: Accuracy ±1.0% R (between 20-100% FS), ±0.2% FS (below 20% FS) ■ Response time: Within 1 second ■ Gas type: Specify at the time of order ■ Flow range: Specify between full scale 30mL/min to 30L/min (Co-planar valve can support 30-50L/min) ■ Maximum pressure: 10MPa (optional 30MPa) ■ Body material: SUS316L, Viton ■ Connection size: Size: 1/8, 1/4, Type: SWL, VCR type ■ Input/output signals: 0-5V, 0-20mA, 4-20mA, RS485 □ For other functions and details, please contact us.
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We provide equipment ranging from high-pressure gas (generally 15MPa: 150kg/cm²) to ultra-high vacuum regions (1x10⁻⁹Pa: 1x10⁻¹¹TORR), including both standard and custom products. Additionally, we can offer environments from high-temperature regions (2300°C) to ultra-low temperature regions (-270°C) as part of our equipment. Specifically, we can design and manufacture high-temperature vacuum heat treatment furnaces and vacuum low-temperature experimental devices upon consultation. Of course, we also provide utility piping for various equipment, as well as gases for the atmosphere and process gases. Please feel free to consult us with any inquiries.
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