Achieving a flatness accuracy of 0.001mm or less (for φ12 inches).
Our company (TDC Corporation) specializes in ultra-precision mirror polishing of various materials and general precision machining. We respond to customer requests regarding material, size, machining accuracy, and other product specifications. Please feel free to contact us. For more information about our processing capabilities and achievements, please refer to our website (http://www.mirror-polish.com/).
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basic information
1. New creation of tables for wafer adsorption and measurement stages 2. Wear correction of currently used stages Flatness of 0.001mm is achievable in a φ12-inch size. Materials include SUS, ceramic, glass, and we also accept orders for special materials such as titanium and molybdenum. Surface treatments such as plating and deposition can also be accommodated upon consultation.
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Applications/Examples of results
Precision measuring instrument stage Vacuum suction table Polishing table for CMP equipment Others: jigs, V-blocks, etc.
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Company information
We specialize particularly in ultra-precision mirror surface processing, with a maximum size capability of φ1500 for single-sided machines. We excel in improving flatness, parallelism, and surface roughness for precision stages and suction plates. For suction plates around φ300*10t, we produce with flatness of 0.001, parallelism of 0.001, and Ra below 0.01 (for SUS material). For φ100*5t (materials such as SUS, Ni, Ti, Mo, Ta, W, ceramics, Si, etc.), we can manufacture plates with precision of less than 0.001 in flatness and around Ra 0.001, which are used as ultra-high precision jigs and molds. ◆ Selected as one of the 300 vibrant small and medium-sized manufacturing companies in 2007. ◆ ◆ Chosen as one of the "Global Niche Top 100 Companies" by the Ministry of Economy, Trade and Industry in 2014. ◆ Selected as a "Regional Future Leading Company" by the Ministry of Economy, Trade and Industry in 2018.