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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Semiconductor inspection/test equipment
  6. Precision stage/table

Precision stage/table

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last updated:Aug 18, 2016

ティ・ディ・シー
ティ・ディ・シー
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Achieving a flatness accuracy of 0.001mm or less (for φ12 inches).

Our company (TDC Corporation) specializes in ultra-precision mirror polishing of various materials and general precision machining. We respond to customer requests regarding material, size, machining accuracy, and other product specifications. Please feel free to contact us. For more information about our processing capabilities and achievements, please refer to our website (http://www.mirror-polish.com/).

    Processing JigSemiconductor inspection/test equipmentWafer processing/polishing equipment
吸着テーブル.jpg

Precision stage/table

吸着テーブル.jpg
吸着テーブル.jpg

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basic information

1. New creation of tables for wafer adsorption and measurement stages 2. Wear correction of currently used stages Flatness of 0.001mm is achievable in a φ12-inch size. Materials include SUS, ceramic, glass, and we also accept orders for special materials such as titanium and molybdenum. Surface treatments such as plating and deposition can also be accommodated upon consultation.

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Applications/Examples of results

Precision measuring instrument stage Vacuum suction table Polishing table for CMP equipment Others: jigs, V-blocks, etc.

News about this product(3)

The second installment of the TDC introduction video has been completed!

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The introduction video part 2 of TDC has been completed. This time, it features an introduction to management by our president, Akabane. It's a short movie of about one minute, so please take a look. You can watch the video from the "Related Information" section below. Title: TDC Management Now, we are exhibiting at "Nanotech 2018," which is being held at Tokyo Big Sight starting today. We are showcasing not only mirror samples of various materials but also finely crafted precision parts and inner diameter mirror products created through lap polishing. Additionally, we have mirror plates of size 400 and large rolls of about one meter, so please take this opportunity to check them out. Since today is Valentine's Day, we will be providing coffee and chocolate for three days. Feel free to stop by. <Exhibitors> 2/14 (Wed): President, Fujino, Arisa 2/15 (Thu): President, Fujino, Maeda 2/16 (Fri): President, Fujino, Arisa, Maeda ★ Technical meetings are also possible ★ All of our staff are looking forward to your visit.

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The new TDC introduction video has been completed!

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The new introduction video for TDC has been completed. It clearly summarizes how ultra-precision mirror finishing and ultra-precision machining are achieved. Since it is a short video of about one minute, you can watch it during a little free time. You can view the video from the "Related Information" section below. Title: TDC Technology As mentioned in the video, TDC not only achieves a surface roughness of Ra1nm level but can also accommodate various specifications simultaneously. We excel at requests such as "I want to improve surface roughness while also enhancing parallelism" and "Surface roughness is not that important, but the dimensional tolerance and flatness are strict," so please feel free to consult us!

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We have introduced a digital microscope.

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We have introduced a digital microscope to our measuring equipment. KEYENCE VHX-6000 series "Observe, Record, Measure" all with this one device. "Observe" allows for observation from all directions. You can tilt the lens and rotate the stage without losing the field of view, enabling observation from 360 degrees in any direction. Since there is no need to touch the object, highly reproducible observations are possible. "Record" allows you to save the observation screen as it is. Saved images can be easily utilized via LAN or USB. "Measure" enables real-time measurement. Anyone can easily measure dimensions with just mouse operations. You can perform all kinds of measurements in real-time on the screen, including distances between two points, angles, diameters, parallel lines, and areas. Additionally, as an option, we have also introduced a wide-range zoom lens. With this lens, the VHX-6000 digital microscope can achieve magnifications from 0 to 1000 times, combining the capabilities of a stereo microscope, electron microscope, metallurgical microscope, and measuring microscope. By making previously unseen details more visible, all forms of "Observe, Record, Measure" become possible. We hope to be of service to everyone.

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ティ・ディ・シー

ティ・ディ・シー

Other manufacturing

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We specialize particularly in ultra-precision mirror surface processing, with a maximum size capability of φ1500 for single-sided machines. We excel in improving flatness, parallelism, and surface roughness for precision stages and suction plates. For suction plates around φ300*10t, we produce with flatness of 0.001, parallelism of 0.001, and Ra below 0.01 (for SUS material). For φ100*5t (materials such as SUS, Ni, Ti, Mo, Ta, W, ceramics, Si, etc.), we can manufacture plates with precision of less than 0.001 in flatness and around Ra 0.001, which are used as ultra-high precision jigs and molds. ◆ Selected as one of the 300 vibrant small and medium-sized manufacturing companies in 2007. ◆ ◆ Chosen as one of the "Global Niche Top 100 Companies" by the Ministry of Economy, Trade and Industry in 2014. ◆ Selected as a "Regional Future Leading Company" by the Ministry of Economy, Trade and Industry in 2018.

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The related categories of Processing Jig

  • Manufacturing and processing machinery
  • Semiconductor Manufacturing Equipment
  • Semiconductor inspection/test equipment
  • Wafer processing/polishing equipment
  • Machinery Parts
  • jig
  • Processing Jig
          

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