Equipped with a CO2 gas automatic fire extinguishing system.
This is an IPA vapor drying device that automatically raises and lowers a cassette containing the substrate using an elevator. The condensed IPA is collected into a recovery tank.
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basic information
**Features** ■ Safety Device Monitors the concentration of IPA in the air using a gas concentration detector, triggering an alarm and shutting off the heater power when the set value is exceeded. ■ IPA Supply/Disposal Automatically supplies IPA using a built-in canister. Condensed IPA and water from the workpiece are collected in a buffer tank, and when the waste liquid temperature falls below the set value, it is pumped to a recovery tank. ■ Specifications Work Size: Wafer 4in to 8in Mask 5in to □9in Main Unit Dimensions: 1400W × 1100D × 2000H □ For more details, please refer to the catalog.
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Company information
Kanamex Co., Ltd. has been engaged in the design and manufacturing of wet processing equipment related to photolithography in the semiconductor industry since its establishment. In today's electronics industry, particularly in the semiconductor front-end, advanced packaging technology, and FPD fields, there is an increasing demand for manufacturing processes that accommodate thinner, larger, and more advanced device substrates, as well as devices with higher functionalities, which require innovative manufacturing equipment. To meet the needs of the industry, our company is always alongside our customers, striving to improve customer satisfaction, maintaining a constant research and development mindset, and building innovative technologies to provide products and services that align with industry demands. We aim to conduct vibrant corporate activities as part of our management philosophy and will continue to work towards contributing to the development of society.
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