Planar TEM observation of specific areas using the FIB method.
By using FIB technology that allows for processing at the nanoscale, it is possible to perform planar TEM observations of specific areas. This enables the confirmation of the ONO three-layer structure (silicon oxide film / silicon nitride film / silicon oxide film) of the capacitor insulating film on the sidewall of the hole, which is difficult to verify through cross-sectional observations.
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For detailed data, please refer to the catalog.
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Applications/Examples of results
Analysis of LSI and memory.
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Download All Catalogs![[Analysis Case] Structural Observation of Hall Side Wall ONO Film_C0005](https://image.mono.ipros.com/public/catalog/image_generated/01/4a0/210259/210259_IPROS6044802258772075648_1.jpg?w=120&h=170)
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!