Pioneer of combustion type
● Compatible with various exhaust gases from CVD and Dry Etcher. ● G-type and F-type are available according to the gas recipe.
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basic information
● G-Type GUARDIAN 1. Complete combustion even with high flow rates in flame overcurrent 2. Excellent powder handling 3. Gas introduction through large-diameter multi-port 4. Capable of introducing all types of gas 5. Simple and easy to handle 6. Exhaust gas treatment possible with a short startup time ● F-Type GUARDIAN 1. Decomposes PFC gas by over 99% 2. Burner capable of high-temperature combustion 3. Low fuel consumption 4. Simple structure 5. Ideal for exhaust gas treatment of Dry Etcher 6. Excellent corrosion resistance 7. Outstanding high-temperature technology 8. HF removal with downstream scrubber
Applications/Examples of results
Semiconductor manufacturing company, liquid crystal panel manufacturing company
Company information
Since its founding in 1918 (Taisho 7), Koike has served as an opinion leader in machine tools utilizing "gas energy," contributing to the development of key industries. During this time, in line with the progress of the era, we have developed cutting machines utilizing "plasma" and "laser" ahead of others, and have commercialized advanced automated systems using NC technology. At the same time, we have established a comprehensive total system to meet all customer needs, ranging from "gas, welding, and cutting to related equipment."
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