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  1. Home
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  5. Visual Inspection Equipment
  6. Inspection device "Wafer Edge Appearance Inspection Machine"

Inspection device "Wafer Edge Appearance Inspection Machine"

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last updated:Aug 30, 2022

アローズエンジニアリング
アローズエンジニアリング
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Inspection of defects such as scratches, foreign objects, and cracks. Achieving detailed image inspection of edges.

The inspection device "Wafer Edge Appearance Inspection Machine" simultaneously inspects defects such as scratches, foreign objects, and cracks on the edge and three surfaces (top and bottom) of the wafer through high-speed optical image inspection. (The inspection time for an 8” wafer is 6 seconds, making it very fast.) The wafer is adhered to the back side, and its shape is recognized by the camera to detect outer diameter eccentricity and the position/amount of the orifice, which controls the inspection machine. The newly developed triple optical system and integrated lighting have enabled detailed image inspection of the edge. External PIO control is also possible, allowing it to be integrated into automated systems. It can accommodate wafer sizes from 4 inches to 8 inches. For more details, please download the catalog.

    Visual Inspection Equipment
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Inspection device "Wafer Edge Appearance Inspection Machine"

06_seihin01.JPG
06_seihin01.JPG
  • Related Link - http://arrowseng.com/index.php?id=126
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【Features】 ○ Inspects three edges simultaneously with a single camera ○ Adjustable wafer thickness from 0.2 mm to 1.5 mm ○ Achieves optimal shadow-free illumination with a triple optical system and integrated lighting ○ Capable of exterior inspection including the orifice area ○ Image measurement resolution of 10 μm ● For more details, please contact us or download the catalog.

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Product catalog for the inspection device "Wafer Edge Appearance Inspection Machine"

Product catalog for the inspection device "Wafer Edge Appearance Inspection Machine"

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アローズエンジニアリング

アローズエンジニアリング

Testing, Analysis and Measurement

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Since our company's establishment in 1986, we have long been engaged in semiconductor-related businesses that support Japan's cutting-edge technology. On the hardware side, we have developed construction and manufacturing environments, including clean rooms. On the human resources side, we have focused on training semiconductor engineers and establishing a service system that can promptly respond to customer needs. Last year, we participated in SEMICON Japan for the first time, and by directly interacting with many industry stakeholders, we were able to learn again what is currently needed and what services should be created. At the same time, the morale within the company has been rising, and we are actively conducting sales activities. It is said that the Japanese economy is finally showing signs of recovery. However, even just looking at the semiconductor industry, the entry of overseas manufacturers and the significant improvement in technology and services are remarkable, so we aim to enhance our international competitiveness in our sales expansion. Not only domestically but also in response to the era of globalization, our role as a hub connecting North America and Asia, especially given our excellent airport access, will further increase.

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