Demo units available for loan! A clean filter is installed at the top to ensure cleanliness within the chamber.
The SPD type simultaneously dries 2 or 4 carriers, equipped with a clean filter at the top, ensuring that clean air continuously flows through the main body, maintaining cleanliness within the chamber. By changing the cradle, it can dry wafers ranging from 4 to 12 inches. For more details, please contact us.
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basic information
**Features** - Built-in ULPA or HEPA filter in the lid → The introduction of clean air significantly improves the cleanliness inside the chamber. - Wafer drying is possible with 4 to 12 inches by exchanging the cradle. - Automatically stops in case of abnormal vibrations. - Prevents particle generation from the rotating shaft through special seals and vacuum. - Always stops in a fixed position. **Specifications** - Model: SPD400, 500, 600, 800, 1200 - 4-carrier type (2-carrier type also available); however, 8-inch and 12-inch are 2-carrier types. - Rotational speed: → Spin drying 0–1200 rpm (variable) → Normal 400–600 rpm (variable) → Drying 0–1200 rpm (variable) → Normal 700–1000 rpm (variable) - Processing time: → Spin drying 0–999.9 sec (variable) → Drying 0–999.9 sec (variable) - ULPA filter: 0.1um, repair rate of 99.9995% or more. - Lid: Automatic opening and closing by air cylinder. - Exhaust: With auto damper, one location at the rear of the main unit. - Shaft sealant: Special seal. - Power supply: 3-phase AC 200V 6KVA 50/60Hz. ● For more details, please contact us.
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Company information
Japan Create has been challenging cutting-edge technologies to respond to the diversification of the semiconductor industry with high precision, labor-saving, and miniaturization. We seek infinite possibilities in high technology and create reliable know-how that matches user needs with our uniqueness. We will continue to strive towards high-level technology.
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