Demo units available for loan! High-quality drying equipment with a single carrier (25 sheets or 13 sheets) processing type.
The SRD type is a drying device of the single carrier (25 sheets or 13 sheets) processing type that achieves high quality in addition to the excellent drying performance and operability of conventional models. By incorporating ULPA or HEPA filters into the lid and introducing clean air, it dramatically improves the cleanliness within the chamber. By changing the cradle, it can dry 2 to 3 types of wafers. For more details, please contact us.
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basic information
**Features** - Built-in ULPA or HEPA filter in the lid → By introducing clean air, the cleanliness inside the chamber is dramatically improved. - By exchanging the cradle, drying of 2 to 3 types of wafers is possible. - Automatically stops in case of abnormal vibrations. **Specifications** - Model: SRD400, 500, 600, 800, 1200 - Rotation speed: 0 to 2000 rpm (variable) - Processing time: 0 to 999.9 sec (variable) - HEPA filter: 0.3μ, 99.97% or higher - ULPA filter: 0.1μ, 99.9995% or higher - Lid: Made of static electricity prevention plate, automatic opening and closing by air cylinder - Exhaust: φ100, auto damper type - External dimensions: Changeable by carrier - Power supply: 3φ AC200V 3KVA 50/60Hz ● For more details, please contact us.
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Company information
Japan Create has been challenging cutting-edge technologies to respond to the diversification of the semiconductor industry with high precision, labor-saving, and miniaturization. We seek infinite possibilities in high technology and create reliable know-how that matches user needs with our uniqueness. We will continue to strive towards high-level technology.
![[Semiconductor/Class 100 Compatible] 100% Water-Free Air Nozzle](https://image.mono.ipros.com/public/product/image/2116982/IPROS15202438644694791694.png?w=280&h=280)
