No need for electrode formation with mercury probes! Provides reduced development time and lower costs in R&D.
The "MCV-530/530L/2200/2500" is a device that enables the evaluation of electrical characteristics of semiconductor silicon wafers and the characteristics of MOS device oxide films, among others. Traditionally, gate electrodes such as Poly-Si or Al were deposited on the wafer, and after forming MOS structures or Schottky structures, CV/IV characteristic evaluations were conducted. This product has its own gate electrode, allowing for the acquisition of electrical characteristics of oxide films and wafers without the need to create a metal gate. It provides quick feedback through process monitoring, reduces development time in R&D, and lowers costs. 【Features】 ■ No need for electrode formation due to the mercury probe ■ Excellent reproducibility ・Schottky: 0.3% (1σ) / MOS: 0.1% (1σ) ■ Mapping of the wafer surface is possible ■ Safe and easy mercury exchange enabled by a newly developed mercury exchange mechanism *For more details, please refer to the PDF document or feel free to contact us.
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【Main Measurement and Evaluation Items】 ■ Evaluation of charge in the film (VFB) ■ Interface state level measurement (Dit) ■ Measurement of the resistivity of the epitaxial layer (ρ) ■ Evaluation of partial dose amount for low-dose ion implantation (PID) ■ Lifetime measurement (τg) ■ Measurement of dielectric constant of high/low dielectric materials (ε) ■ Reliability testing of insulating films (TZDB, TDDB) *For more details, please refer to the PDF document or feel free to contact us.
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Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.